Silicon Micromechanical Devices (original) (raw)

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Scientific American

April 1, 1983

1 min read

Tiny valves, nozzles, pressure sensors and other mechanical systems can be chemically etched in a wafer of single-crystal silicon. Such devices can be mass-produced much as microelectronic circuits are

By James B. Angell, Stephen C. Terry & Phillip W. Barth

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