Energy-tunable transmission x-ray microscope for differential contrast imaging with near 60nm resolution tomography (original) (raw)
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Research Article| June 15 2006
National Synchrotron Radiation Research Center
, 101 Hsin-Ann Road, Hsinchu 30076, Taiwan and
Department of Photonics and Display Institute National Chiao Tung University
, Hsinchu 300, Taiwan
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National Synchrotron Radiation Research Center
, 101 Hsin-Ann Road, Hsinchu 30076, Taiwan
Search for other works by this author on:
National Synchrotron Radiation Research Center
, 101 Hsin-Ann Road, Hsinchu 30076, Taiwan
Search for other works by this author on:
National Synchrotron Radiation Research Center
, 101 Hsin-Ann Road, Hsinchu 30076, Taiwan
Search for other works by this author on:
National Synchrotron Radiation Research Center
, 101 Hsin-Ann Road, Hsinchu 30076, Taiwan
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Xradia Inc.
, 5052 Commericial Circle, Concord, California 94520
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Xradia Inc.
, 5052 Commericial Circle, Concord, California 94520
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Department of Electrical Engineering, Yuan Ze University
, 135 Yuan Tung Road, Chungli 320, Taiwan
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Department of Photonics and Display Institute
, National Chiao Tung University, Hsinchu 300, Taiwan
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Appl. Phys. Lett. 88, 241115 (2006)
An energy-tunable transmission hard x-ray microscope with close to 60nm spatial resolution in three dimensions (3D) has been developed. With a cone beam illumination, a zone plate of 50nm outmost zone width, a stable mechanical design, and software feedback, we obtained tomographic data sets that are close to 60nm spatial resolution. Meanwhile, the element specific imaging was also obtained by a differential absorption contrast technique used below and above the absorption of the element. Examples of advanced intergraded circuit devices are used to demonstrate the element selectivity and spatial resolution in 3D of the microscope.
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© 2006 American Institute of Physics.
2006
American Institute of Physics
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