30nm resolution x-ray imaging at 8keV using third order diffraction of a zone plate lens objective in a transmission microscope (original) (raw)
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Research Article| December 01 2006
National Synchrotron Radiation Research Center
, 101 Hsin-Ann Road, Hsinchu 30076, Taiwan; Department of Photonics,
National Chiao Tung University
, Hsinchu 300, Taiwan; and Display Institute,
National Chiao Tung University
, Hsinchu 300, Taiwan
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National Synchrotron Radiation Research Center
, 101 Hsin-Ann Road, Hsinchu 30076, Taiwan
Search for other works by this author on:
National Synchrotron Radiation Research Center
, 101 Hsin-Ann Road, Hsinchu 30076, Taiwan
Search for other works by this author on:
National Synchrotron Radiation Research Center
, 101 Hsin-Ann Road, Hsinchu 30076, Taiwan
Search for other works by this author on:
National Synchrotron Radiation Research Center
, 101 Hsin-Ann Road, Hsinchu 30076, Taiwan
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Xradia Inc.
, 5052 Commercial Circle, Concord, California 94520
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Xradia Inc.
, 5052 Commercial Circle, Concord, California 94520
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Xradia Inc.
, 5052 Commercial Circle, Concord, California 94520
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Department of Photonics,
National Chiao Tung University
, Hsinchu 300, Taiwan and Display Institute,
National Chiao Tung University
, Hsinchu 300, Taiwan
Search for other works by this author on:
Electronic mail: gcyin@nsrrc.org.tw
Appl. Phys. Lett. 89, 221122 (2006)
A hard x-ray transmission microscope with 30nm spatial resolution has been developed employing the third diffraction order of a zone plate objective. The microscope utilizes a capillary type condenser with suitable surface figure to generate a hollow cone illumination which is matched in illumination range to the numerical aperture of the third order diffraction of a zone plate with an outmost zone width of 50nm. Using a test sample of a 150nm thick gold spoke pattern with finest half-pitch of 30nm, the authors obtained x-ray images with 30nm resolution at 8keV x-ray energy.
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© 2006 American Institute of Physics.
2006
American Institute of Physics
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