2 to 1.55 mm². Furthermore, a new T-shaped unimorph MEMS harvester with higher conversion efficiency from mechanical vibration to electricity by offering both bending stress and torsion stress, is proposed and fabricated. Our measurement shows that the T-shaped harvester can generate higher voltage by a factor of 96% with reference to the optimized conventional unimorph piezoelectric harvester, while its occupied area is further reduced by 35% to 1.01 mm².">

Design and optimization of MEMS piezoelectric energy harvesters for improved efficiency (original) (raw)

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