$\mu \text{m}$ CMOS technology and is packaged with two three-axis MEMS sensors achieving a 4-kHz, 25-

$\mu \text{g} / \surd $

Hz, ±8-g accelerometer consuming 375

$\mu \text{A}$

and an 8-kHz, 59-

$\mu \text{g} / \surd $

Hz, ±30-g accelerometer consuming 550

$\mu \text{A}$

. The proposed technique compensates the transfer function deviation from 4.6 and 8.9 dB to less than ±0.56 and ±0.52 dB in two accelerometer prototypes.">

A Low-Power, Wide-Bandwidth, Three-Axis MEMS Accelerometer ASIC Using Beyond-Resonant-Frequency Sensing (original) (raw)

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