3N4 mask selection is more than 2200, corrosion rate is close to 11 $\mu \mathbf{m}/\min$. Corrosion depth reaches $337.5\mu \text{m}$. The inhomogeneity of corrosion depth between different holes is less than 3.6%. The maximum height fluctuation in the hole is less than 0.88% of the corrosion depth. The roundness of the hole is less than 5%0.">

A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes with High Roundness (original) (raw)

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