Nis Fisker-Bødker - Profile on Academia.edu (original) (raw)
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Papers by Nis Fisker-Bødker
Microelectronic Engineering, 2011
The biodegradable polymer poly(l-lactide) (PLLA) was introduced for the fabrication of micromecha... more The biodegradable polymer poly(l-lactide) (PLLA) was introduced for the fabrication of micromechanical devices. For this purpose, thin biopolymer films with thickness around 10μm were spin-coated on silicon substrates. Patterning of microcantilevers is achieved by nanoimprint lithography. A major challenge was the high adhesion between PLLA and silicon stamp. Optimized stamp fabrication and the deposition of a 125nm thick fluorocarbon anti-stiction
Microelectronic Engineering, 2011
The biodegradable polymer poly(L-lactide) (PLLA) was introduced for the fabrication of micromecha... more The biodegradable polymer poly(L-lactide) (PLLA) was introduced for the fabrication of micromechanical devices. For this purpose, thin biopolymer films with thickness around 10 lm were spin-coated on silicon substrates. Patterning of microcantilevers is achieved by nanoimprint lithography. A major challenge was the high adhesion between PLLA and silicon stamp. Optimized stamp fabrication and the deposition of a 125 nm thick fluorocarbon anti-stiction coating on the PLLA allowed the fabrication of biopolymer cantilevers. Resonance frequency measurements were used to estimate the Young's modulus of the device material.
Microelectronic Engineering, 2011
The biodegradable polymer poly(l-lactide) (PLLA) was introduced for the fabrication of micromecha... more The biodegradable polymer poly(l-lactide) (PLLA) was introduced for the fabrication of micromechanical devices. For this purpose, thin biopolymer films with thickness around 10μm were spin-coated on silicon substrates. Patterning of microcantilevers is achieved by nanoimprint lithography. A major challenge was the high adhesion between PLLA and silicon stamp. Optimized stamp fabrication and the deposition of a 125nm thick fluorocarbon anti-stiction
Microelectronic Engineering, 2011
The biodegradable polymer poly(L-lactide) (PLLA) was introduced for the fabrication of micromecha... more The biodegradable polymer poly(L-lactide) (PLLA) was introduced for the fabrication of micromechanical devices. For this purpose, thin biopolymer films with thickness around 10 lm were spin-coated on silicon substrates. Patterning of microcantilevers is achieved by nanoimprint lithography. A major challenge was the high adhesion between PLLA and silicon stamp. Optimized stamp fabrication and the deposition of a 125 nm thick fluorocarbon anti-stiction coating on the PLLA allowed the fabrication of biopolymer cantilevers. Resonance frequency measurements were used to estimate the Young's modulus of the device material.