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Papers by Ali Said
Topics in Applied Physics, 2011
ABSTRACT In this chapter, the use of femtosecond laser to fabricate glass-based microsystems and ... more ABSTRACT In this chapter, the use of femtosecond laser to fabricate glass-based microsystems and sensors is examined. Several advanced technology demonstrators are presented, including some very unusual fused silica MEMS. Present technological barriers are discussed.
Optics express, Jan 17, 2004
We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstru... more We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure is presented. The results obtained gives new insights toward a better understanding of the femtosecond laser interaction with fused silica glass (a-SiO(2)).
MRS Proceedings, 2004
Femtosecond laser irradiation has various noticeable effects on fused silica. It can locally incr... more Femtosecond laser irradiation has various noticeable effects on fused silica. It can locally increase the index of refraction and modify the material chemical selectivity. Regions that have been exposed to the laser are etched hundred fold faster than unexposed regions. These effects are of practical importance from an application point-of-view and open new opportunities for the development of integrated photonics
Topics in Applied Physics, 2011
ABSTRACT In this chapter, the use of femtosecond laser to fabricate glass-based microsystems and ... more ABSTRACT In this chapter, the use of femtosecond laser to fabricate glass-based microsystems and sensors is examined. Several advanced technology demonstrators are presented, including some very unusual fused silica MEMS. Present technological barriers are discussed.
Optics express, Jan 17, 2004
We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstru... more We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure is presented. The results obtained gives new insights toward a better understanding of the femtosecond laser interaction with fused silica glass (a-SiO(2)).
MRS Proceedings, 2004
Femtosecond laser irradiation has various noticeable effects on fused silica. It can locally incr... more Femtosecond laser irradiation has various noticeable effects on fused silica. It can locally increase the index of refraction and modify the material chemical selectivity. Regions that have been exposed to the laser are etched hundred fold faster than unexposed regions. These effects are of practical importance from an application point-of-view and open new opportunities for the development of integrated photonics