Anaïs Ferris - Academia.edu (original) (raw)

Papers by Anaïs Ferris

Research paper thumbnail of Atypical Properties of FIB-Patterned RuO<sub><i>x</i></sub> Nanosupercapacitors

ACS energy letters, Jul 10, 2017

Research paper thumbnail of Potentialities of micro-supercapacitors as energy storage buffers in embedded micro-systems

Thanks to their unique properties and potential applications in various smart electronic devices,... more Thanks to their unique properties and potential applications in various smart electronic devices, microsupercapacitors have been increasingly investigated for on-chip energy storage. In this presentation, we describe our most recent attempts to increase the areal capacitance and energy of microsupercapacitors. We deposited hydrated ruthenium oxide onto a highly porous gold current collector to realize a 3D electrode with unprecedented performances, fully compatible with current micro-fabrication and silicon-based device technology. The resulting electrode exhibits a capacitance per surface area in excess of 3 F.cm −2 , and-for the first time-an all-solid-state micro-supercapacitor with a specific energy per surface area comparable to that of lithium-ion micro-batteries has been achieved, but with superior power and cycling stability.

Research paper thumbnail of Structuration de collecteurs de courant d'or pour la réalisation de micro-supercondensateurs à base d'oxyde de ruthénium

been transferred to the micro-scale on planar interdigitated devices using a suitable photolithog... more been transferred to the micro-scale on planar interdigitated devices using a suitable photolithography process.

Research paper thumbnail of 3D Microsupercapacitors: 3D Interdigitated Microsupercapacitors with Record Areal Cell Capacitance (Small 27/2019)

Research paper thumbnail of Structuration de collecteurs de courant d'or pour la réalisation de micro-supercondensateurs à base d'oxyde de ruthénium

Depuis une dizaine d'annees, on observe un developpement de l'electronique embarquee inte... more Depuis une dizaine d'annees, on observe un developpement de l'electronique embarquee integree a la plupart des objets que nous utilisons au quotidien. Il s'agit maintenant de les interconnecter en creant des reseaux embarques connectes tels que les reseaux de capteurs autonomes sans fils. La miniaturisation des composants permet d'envisager une autonomie energetique de ces reseaux composes de capteurs, recuperateurs d'energie et de micro-batteries. Cependant la faible duree de vie des batteries et leur puissance limitee sont problematiques pour de telles applications. Les micro-supercondensateurs representent une alternative pertinente pour la gestion de l'energie dans les systemes embarques, notamment grâce a leur duree de vie tres elevee. L'objectif de cette these concerne l'optimisation des performances de ces dispositifs en termes de densite de puissance et d'energie. La capacite du supercondensateur etant proportionnelle a la surface electroc...

Research paper thumbnail of 3D Interdigitated Microsupercapacitors with Record Areal Cell Capacitance

Small, 2019

Due to their high‐power density and long lifetime, microsupercapacitors have been considered as a... more Due to their high‐power density and long lifetime, microsupercapacitors have been considered as an efficient energy supply/storage solution for the operation of small electronic devices. However, their fabrication remains confined to 2D thin‐film microdevices with limited areal energy. In this study, the integration of all‐solid‐state 3D interdigitated microsupercapacitors on 4 in. silicon wafers with record energy density is demonstrated. The device electrodes are composed of a pseudocapacitive hydrated ruthenium dioxide RuO2 deposited onto highly porous current collectors. The encapsulated devices exhibit cell capacitance of 812 mF cm−2 per footprint area at an energy density of 329 mJ cm−2, which is the highest value ever reported for planar configuration. These components achieve one of the highest surface energy/power density trade‐offs and address the issue of electrical energy storage of modern electronics.

Research paper thumbnail of Atypical Properties of FIB-Patterned RuOx Nanosupercapacitors

Research paper thumbnail of Potentialities of micro-supercapacitors as energy storage buffers in embedded micro-systems

2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2016

Thanks to their unique properties and potential applications in various smart electronic devices,... more Thanks to their unique properties and potential applications in various smart electronic devices, microsupercapacitors have been increasingly investigated for on-chip energy storage. In this presentation, we describe our most recent attempts to increase the areal capacitance and energy of microsupercapacitors. We deposited hydrated ruthenium oxide onto a highly porous gold current collector to realize a 3D electrode with unprecedented performances, fully compatible with current micro-fabrication and silicon-based device technology. The resulting electrode exhibits a capacitance per surface area in excess of 3 F.cm −2 , and-for the first time-an all-solid-state micro-supercapacitor with a specific energy per surface area comparable to that of lithium-ion micro-batteries has been achieved, but with superior power and cycling stability.

Research paper thumbnail of 3D RuO2 Microsupercapacitors with Remarkable Areal Energy

Research paper thumbnail of Capacitive deionization concept based on suspension electrodes without ion exchange membranes

Electrochemistry Communications, 2014

Capacitive deionization concept based on suspension electrodes without ion exchange membranes. (2... more Capacitive deionization concept based on suspension electrodes without ion exchange membranes. (2014) Electrochemistry Communications, 43. 18-21.

Research paper thumbnail of 3D RuO2 microsupercapacitor electrodes based on Si nanowires, nanotrunks and nanotrees

HAL (Le Centre pour la Communication Scientifique Directe), Jul 10, 2017

Research paper thumbnail of Électrodes Poreuses et Procédé et Leur Fabrication

La presente invention porte sur un procede comprenant la formation d'une couche conductrice m... more La presente invention porte sur un procede comprenant la formation d'une couche conductrice mesoporeuse et le depot d'une matiere capacitive a l'interieur de pores de la couche conductrice mesoporeuse a travers une epaisseur de la couche conductrice mesoporeuse. La couche conductrice mesoporeuse peut etre formee par depot physique ou electrodeposition d'or, de platine ou de titane, et la matiere capacitive peut etre Ru, Ni, Fe, Co, Ir ou Mn, ce qui permet d'obtenir une electrode mesoporeuse. Deux de telles electrodes peuvent etre assemblees a l'aide d'un electrolyte solide, ce qui permet d'obtenir un supercondensateur tout a l'etat solide. La couche conductrice mesoporeuse peut etre deposee sur un substrat comportant un masque de resine d'electrode interdigitee, et la resine de masque est retiree apres le depot de la matiere capacitive a l'interieur des pores de la couche conductrice mesoporeuse, pour produire des electrodes interdigitees.

Research paper thumbnail of 3D RuO2 microsupercapacitor electrodes based on Si nanowires, nanotrunks and nanotrees

Energy autonomy keeps being a critical issue in the context of off-grid applications, such as aut... more Energy autonomy keeps being a critical issue in the context of off-grid applications, such as autonomous wireless sensor networks, mostly being served by primary batteries. One solution to obtain a complete energetic autonomy of embedded microsystems, is to harvest and store the energy available in the environment, such as heat or vibrations. 3D on-chip microsupercapacitors show very interesting characteristics when it comes to these applications, thanks to their long lifetime and high power density [1].

Research paper thumbnail of 3D Microsupercapacitors: 3D Interdigitated Microsupercapacitors with Record Areal Cell Capacitance (Small 27/2019)

Research paper thumbnail of 3D Interdigitated Microsupercapacitors with Record Areal Cell Capacitance

Small, May 16, 2019

Due to their high-power density and long lifetime, micro-supercapacitors have been considered as ... more Due to their high-power density and long lifetime, micro-supercapacitors have been considered as an efficient energy supply/storage solution for operation of small electronic devices. However, their fabrication remains confined to 2D thin-film microdevices with limited areal energy. In this study, the integration of all-solid-state 3D interdigitated micro-supercapacitors on 4 in. silicon wafers with record energy density is demonstrated. The device electrodes are composed of a pseudocapacitive hydrated ruthenium dioxide RuO2 deposited onto highly porous current collectors. The encapsulated devices exhibit cell capacitance of 812 mF cm-2 per footprint area at an energy density of 329 mJ cm-2 which is the highest value ever reported for planar configuration. These components achieve one of the highest surface energy/power densities trade-off and address the issue of electrical energy storage of modern electronics.

Research paper thumbnail of 3D RuO 2 Microsupercapacitors with Remarkable Areal Energy

Advanced Materials, 2015

An attractive approach is demonstrated to realize large areal capacitance electrodes made of ruth... more An attractive approach is demonstrated to realize large areal capacitance electrodes made of ruthenium oxide onto highly porous gold current collectors. The hybrid structure exhibits a capacitance in excess of 3 F cm(-2) and an areal energy density for all-solid-state microsupercapacitors that is comparable to those of microbatteries.

Research paper thumbnail of Atypical Properties of FIB-Patterned RuO<sub><i>x</i></sub> Nanosupercapacitors

ACS energy letters, Jul 10, 2017

Research paper thumbnail of Potentialities of micro-supercapacitors as energy storage buffers in embedded micro-systems

Thanks to their unique properties and potential applications in various smart electronic devices,... more Thanks to their unique properties and potential applications in various smart electronic devices, microsupercapacitors have been increasingly investigated for on-chip energy storage. In this presentation, we describe our most recent attempts to increase the areal capacitance and energy of microsupercapacitors. We deposited hydrated ruthenium oxide onto a highly porous gold current collector to realize a 3D electrode with unprecedented performances, fully compatible with current micro-fabrication and silicon-based device technology. The resulting electrode exhibits a capacitance per surface area in excess of 3 F.cm −2 , and-for the first time-an all-solid-state micro-supercapacitor with a specific energy per surface area comparable to that of lithium-ion micro-batteries has been achieved, but with superior power and cycling stability.

Research paper thumbnail of Structuration de collecteurs de courant d'or pour la réalisation de micro-supercondensateurs à base d'oxyde de ruthénium

been transferred to the micro-scale on planar interdigitated devices using a suitable photolithog... more been transferred to the micro-scale on planar interdigitated devices using a suitable photolithography process.

Research paper thumbnail of 3D Microsupercapacitors: 3D Interdigitated Microsupercapacitors with Record Areal Cell Capacitance (Small 27/2019)

Research paper thumbnail of Structuration de collecteurs de courant d'or pour la réalisation de micro-supercondensateurs à base d'oxyde de ruthénium

Depuis une dizaine d'annees, on observe un developpement de l'electronique embarquee inte... more Depuis une dizaine d'annees, on observe un developpement de l'electronique embarquee integree a la plupart des objets que nous utilisons au quotidien. Il s'agit maintenant de les interconnecter en creant des reseaux embarques connectes tels que les reseaux de capteurs autonomes sans fils. La miniaturisation des composants permet d'envisager une autonomie energetique de ces reseaux composes de capteurs, recuperateurs d'energie et de micro-batteries. Cependant la faible duree de vie des batteries et leur puissance limitee sont problematiques pour de telles applications. Les micro-supercondensateurs representent une alternative pertinente pour la gestion de l'energie dans les systemes embarques, notamment grâce a leur duree de vie tres elevee. L'objectif de cette these concerne l'optimisation des performances de ces dispositifs en termes de densite de puissance et d'energie. La capacite du supercondensateur etant proportionnelle a la surface electroc...

Research paper thumbnail of 3D Interdigitated Microsupercapacitors with Record Areal Cell Capacitance

Small, 2019

Due to their high‐power density and long lifetime, microsupercapacitors have been considered as a... more Due to their high‐power density and long lifetime, microsupercapacitors have been considered as an efficient energy supply/storage solution for the operation of small electronic devices. However, their fabrication remains confined to 2D thin‐film microdevices with limited areal energy. In this study, the integration of all‐solid‐state 3D interdigitated microsupercapacitors on 4 in. silicon wafers with record energy density is demonstrated. The device electrodes are composed of a pseudocapacitive hydrated ruthenium dioxide RuO2 deposited onto highly porous current collectors. The encapsulated devices exhibit cell capacitance of 812 mF cm−2 per footprint area at an energy density of 329 mJ cm−2, which is the highest value ever reported for planar configuration. These components achieve one of the highest surface energy/power density trade‐offs and address the issue of electrical energy storage of modern electronics.

Research paper thumbnail of Atypical Properties of FIB-Patterned RuOx Nanosupercapacitors

Research paper thumbnail of Potentialities of micro-supercapacitors as energy storage buffers in embedded micro-systems

2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2016

Thanks to their unique properties and potential applications in various smart electronic devices,... more Thanks to their unique properties and potential applications in various smart electronic devices, microsupercapacitors have been increasingly investigated for on-chip energy storage. In this presentation, we describe our most recent attempts to increase the areal capacitance and energy of microsupercapacitors. We deposited hydrated ruthenium oxide onto a highly porous gold current collector to realize a 3D electrode with unprecedented performances, fully compatible with current micro-fabrication and silicon-based device technology. The resulting electrode exhibits a capacitance per surface area in excess of 3 F.cm −2 , and-for the first time-an all-solid-state micro-supercapacitor with a specific energy per surface area comparable to that of lithium-ion micro-batteries has been achieved, but with superior power and cycling stability.

Research paper thumbnail of 3D RuO2 Microsupercapacitors with Remarkable Areal Energy

Research paper thumbnail of Capacitive deionization concept based on suspension electrodes without ion exchange membranes

Electrochemistry Communications, 2014

Capacitive deionization concept based on suspension electrodes without ion exchange membranes. (2... more Capacitive deionization concept based on suspension electrodes without ion exchange membranes. (2014) Electrochemistry Communications, 43. 18-21.

Research paper thumbnail of 3D RuO2 microsupercapacitor electrodes based on Si nanowires, nanotrunks and nanotrees

HAL (Le Centre pour la Communication Scientifique Directe), Jul 10, 2017

Research paper thumbnail of Électrodes Poreuses et Procédé et Leur Fabrication

La presente invention porte sur un procede comprenant la formation d'une couche conductrice m... more La presente invention porte sur un procede comprenant la formation d'une couche conductrice mesoporeuse et le depot d'une matiere capacitive a l'interieur de pores de la couche conductrice mesoporeuse a travers une epaisseur de la couche conductrice mesoporeuse. La couche conductrice mesoporeuse peut etre formee par depot physique ou electrodeposition d'or, de platine ou de titane, et la matiere capacitive peut etre Ru, Ni, Fe, Co, Ir ou Mn, ce qui permet d'obtenir une electrode mesoporeuse. Deux de telles electrodes peuvent etre assemblees a l'aide d'un electrolyte solide, ce qui permet d'obtenir un supercondensateur tout a l'etat solide. La couche conductrice mesoporeuse peut etre deposee sur un substrat comportant un masque de resine d'electrode interdigitee, et la resine de masque est retiree apres le depot de la matiere capacitive a l'interieur des pores de la couche conductrice mesoporeuse, pour produire des electrodes interdigitees.

Research paper thumbnail of 3D RuO2 microsupercapacitor electrodes based on Si nanowires, nanotrunks and nanotrees

Energy autonomy keeps being a critical issue in the context of off-grid applications, such as aut... more Energy autonomy keeps being a critical issue in the context of off-grid applications, such as autonomous wireless sensor networks, mostly being served by primary batteries. One solution to obtain a complete energetic autonomy of embedded microsystems, is to harvest and store the energy available in the environment, such as heat or vibrations. 3D on-chip microsupercapacitors show very interesting characteristics when it comes to these applications, thanks to their long lifetime and high power density [1].

Research paper thumbnail of 3D Microsupercapacitors: 3D Interdigitated Microsupercapacitors with Record Areal Cell Capacitance (Small 27/2019)

Research paper thumbnail of 3D Interdigitated Microsupercapacitors with Record Areal Cell Capacitance

Small, May 16, 2019

Due to their high-power density and long lifetime, micro-supercapacitors have been considered as ... more Due to their high-power density and long lifetime, micro-supercapacitors have been considered as an efficient energy supply/storage solution for operation of small electronic devices. However, their fabrication remains confined to 2D thin-film microdevices with limited areal energy. In this study, the integration of all-solid-state 3D interdigitated micro-supercapacitors on 4 in. silicon wafers with record energy density is demonstrated. The device electrodes are composed of a pseudocapacitive hydrated ruthenium dioxide RuO2 deposited onto highly porous current collectors. The encapsulated devices exhibit cell capacitance of 812 mF cm-2 per footprint area at an energy density of 329 mJ cm-2 which is the highest value ever reported for planar configuration. These components achieve one of the highest surface energy/power densities trade-off and address the issue of electrical energy storage of modern electronics.

Research paper thumbnail of 3D RuO 2 Microsupercapacitors with Remarkable Areal Energy

Advanced Materials, 2015

An attractive approach is demonstrated to realize large areal capacitance electrodes made of ruth... more An attractive approach is demonstrated to realize large areal capacitance electrodes made of ruthenium oxide onto highly porous gold current collectors. The hybrid structure exhibits a capacitance in excess of 3 F cm(-2) and an areal energy density for all-solid-state microsupercapacitors that is comparable to those of microbatteries.