C. Cané - Academia.edu (original) (raw)
Papers by C. Cané
Sensors and Actuators B: Chemical
Sensors and Actuators B: Chemical, 1995
The study of the degradation of the packaging materials of ISFET pH chemical sensors is very usef... more The study of the degradation of the packaging materials of ISFET pH chemical sensors is very useful if it can be done while the sensor is working, as the information obtained will determine when the sensor must be replaced due to excessive drift. The use of special test structures has been demonstrated to give good electrical information about the degradation. Simple devices based on MOS structures have been previously presented and now the results of further research are given. New designs and materials have been tested in order to optimize the test structures and have been used to determine epoxy degradation under different work conditions. Finally, a study of the correlation between the behavior of ISFETs and test structures is presented. It concludes that test structures are more sensitive to aging and can be combined with sensors and circuits on the same chip to form smart sensors. A simple CMOS oscillator with a humidity-dependent output frequency is presented as an example.
Sensors and Actuators B: Chemical, 1996
The fabrication of microsystems in which chemical measurements play a role make the on-chip combi... more The fabrication of microsystems in which chemical measurements play a role make the on-chip combination of chemical sensors and signal processing circuitry highly desirable. Chemical sensors use sensitive layers which are not a part of MOS devices and in this sense, the determination of the best sensors and technological processes to achieve good integrated smart sensors is very important, in this paper a study of compatibility of ISFET chemical sensors and CMOS circuitry is presented for application to biomedical microsysterns.
Sensors and Actuators a-Physical, 1995
... A PHYSICAL A technology for the monolithic fabrication of a pressure sensor and related circu... more ... A PHYSICAL A technology for the monolithic fabrication of a pressure sensor and related circuitry C. Can a,* F. Campabadal a, J Esteve a, M. Lozano a A ... 4 kfl were fixed to avoid an extra low output impedance of the resistor bridge and so an extra implant of 400 fl/ElI was used ...
Procedia Chemistry, 2009
Chemical warfare agent simulants detection is of great interest for security reasons. An electron... more Chemical warfare agent simulants detection is of great interest for security reasons. An electronic nose based on Surface Acoustic Wave (SAW) sensors has been developed and sensor polymer coatings have been optimized. These allowed us to detect very low concentrations of certain simulants. A good classification was achieved.
Sensors and Actuators, A: Physical, 2004
A new approach of enlarging the measurement range of a thermal calorimetric flow sensor is presen... more A new approach of enlarging the measurement range of a thermal calorimetric flow sensor is presented. It is based on the fact that the response of these kind of sensors tends to saturate at a certain flow ratio, so the widening of the flow range can be achieved by increasing the number of sensing elements of the sensor. This implies
Sensors and Actuators, B: Chemical, 2005
In this paper, the monitoring of gas concentration of a flowing gas with a semiconductor gas sens... more In this paper, the monitoring of gas concentration of a flowing gas with a semiconductor gas sensor is faced. In this kind of devices, the flow rate has a significant effect on the gas sensors' output signal. One way to obtain reliable measurements is the simultaneous ...
Active layers consisting of rf sputtered WO3 were deposited on microhotplate substrates. The film... more Active layers consisting of rf sputtered WO3 were deposited on microhotplate substrates. The films were doped with seven different materials (Pt, Au, Ag, Ti, SnO2, ZnO and ITO (indium tin oxide)). The eight types of sensors (including pure tungsten oxide ones) were tested in the presence of ammonia, hydrogen sulphide, nitrogen dioxide, carbon monoxide and methane. It was found that
Abstract In the present work, a silicon-based gas chromatographic microsystem is proposed and dev... more Abstract In the present work, a silicon-based gas chromatographic microsystem is proposed and developed; it consists of a spiral-shaped μ preconcentrator followed by a μ-hotplate sensor matrix. The shape of the preconcentrator was chosen according to technological ...
ABSTRACT Sensors embedded in micro fuel cells can help in controlling some important parameters s... more ABSTRACT Sensors embedded in micro fuel cells can help in controlling some important parameters such as temperature, humidity or gas concentration. In this paper we introduce the fabrication procedure for MEMs-compatible nanocolumnar tungsten oxide gas microsensors and show the results of measuring their responses to H2, CO and humidity. Tungsten oxide nanoculumns were grown by smart anodization of Al/W layers on silicon micro-hotplate substrates. An excellent linear sensor response was observed for hydrogen in the 0-20 ppm concentration range and a low response to CO and moisture in the usual operating conditions of micro fuel cells. The sensors operated at moderate temperature due to the high surface-to-volume ratio and the nanostructured morphology of the sensing films.
Sensors and Actuators, B: Chemical, 2013
ABSTRACT An immunosensor based on a Love-wave device and a PDMS microfluidic chip has been develo... more ABSTRACT An immunosensor based on a Love-wave device and a PDMS microfluidic chip has been developed to detect potentially pathogenic microorganisms in real time. In order to characterize and test the immunosensor, the M13 bacteriophage has been chosen as a model of microorganism. The M13 was detected with the mouse monoclonal antibody, anti-M13 (AM13), which has been immobilized on the Love wave-device. The immunoassay has been carried out in a dynamic mode (continuous flow) through microchannels with the goal of obtaining a short response time in detecting a small volume of a sample of M13 bacteriophage. The concentrations of the bacteriophage have been varied between 5 × 108 pfu ml−1 and 2 × 1010 pfu ml−1, a range for which a fast detection and a favorable discrimination among concentrations have been achieved. The AM13 has been also used as a secondary antibody in order to measure lower concentrations such as 5 × 107 pfu ml−1.The Double-Layer Agar technique has been used to quantify, as plaques-forming unit (pfu), the number of M13 bacteriophage in the initial sample as well as those linked to the sensor surface during the detection. Finally, the number of bacteriophage was estimated by calculating the mass sensitivity. The values obtained in both procedures have been very similar.
Conference on Electron Devices, 2005 Spanish, 2005
The fabrication and characterization of a thermopile sensor array is described in this work. The ... more The fabrication and characterization of a thermopile sensor array is described in this work. The device is intended to be part of a non-dispersive infrared (NDIR) gas detection system integrated in an electronic nose where each sensor is not oriented for the detection of a particular substance. Different designs were considered changing the size of the array (9 or 16 elements) and improving some specific detector performance parameters: responsivity and noise equivalent power (NEP). After device fabrication, the measurements of these parameters show a good agreement with the thermal one-dimensional model used for the design.
Smart Sensors, Actuators, and MEMS III, 2007
The development of an integrated gas chromatographic system using micro and nanotechnologies is p... more The development of an integrated gas chromatographic system using micro and nanotechnologies is presented in this paper. For this purpose, the different components of the chromatographic system, namely the preconcentrator, the chromatographic column and the gas sensors are being investigated and developed, and the actual state of this investigation is presented. The proposed target application comes from the agrofood industry,
IEEE Conference on Cybernetics and Intelligent Systems, 2004., 2004
Vacuum, 1989
The etch rate of a positive photoresist in a mixture of oxygen and tetrafluoromethane depends on ... more The etch rate of a positive photoresist in a mixture of oxygen and tetrafluoromethane depends on many parameters such as the total pressure of the reaction chamber, the composition of the initial mixture, the total flow of the gases, the applied power to the discharge and the number of wafers processed at a time (known as "loading effect'). The stripping reaction involves two mechanisms: a gas phase reaction and a surface reaction. One of these mechanisms dominates the reaction depending on the values of the system parameters. In this paper we analyze the influence of each of our system parameters on the etch rate in order to obtain a high etch rate taking into account the selectivity to other layers under the resist film.
Sensors and Actuators B: Chemical
Sensors and Actuators B: Chemical, 1995
The study of the degradation of the packaging materials of ISFET pH chemical sensors is very usef... more The study of the degradation of the packaging materials of ISFET pH chemical sensors is very useful if it can be done while the sensor is working, as the information obtained will determine when the sensor must be replaced due to excessive drift. The use of special test structures has been demonstrated to give good electrical information about the degradation. Simple devices based on MOS structures have been previously presented and now the results of further research are given. New designs and materials have been tested in order to optimize the test structures and have been used to determine epoxy degradation under different work conditions. Finally, a study of the correlation between the behavior of ISFETs and test structures is presented. It concludes that test structures are more sensitive to aging and can be combined with sensors and circuits on the same chip to form smart sensors. A simple CMOS oscillator with a humidity-dependent output frequency is presented as an example.
Sensors and Actuators B: Chemical, 1996
The fabrication of microsystems in which chemical measurements play a role make the on-chip combi... more The fabrication of microsystems in which chemical measurements play a role make the on-chip combination of chemical sensors and signal processing circuitry highly desirable. Chemical sensors use sensitive layers which are not a part of MOS devices and in this sense, the determination of the best sensors and technological processes to achieve good integrated smart sensors is very important, in this paper a study of compatibility of ISFET chemical sensors and CMOS circuitry is presented for application to biomedical microsysterns.
Sensors and Actuators a-Physical, 1995
... A PHYSICAL A technology for the monolithic fabrication of a pressure sensor and related circu... more ... A PHYSICAL A technology for the monolithic fabrication of a pressure sensor and related circuitry C. Can a,* F. Campabadal a, J Esteve a, M. Lozano a A ... 4 kfl were fixed to avoid an extra low output impedance of the resistor bridge and so an extra implant of 400 fl/ElI was used ...
Procedia Chemistry, 2009
Chemical warfare agent simulants detection is of great interest for security reasons. An electron... more Chemical warfare agent simulants detection is of great interest for security reasons. An electronic nose based on Surface Acoustic Wave (SAW) sensors has been developed and sensor polymer coatings have been optimized. These allowed us to detect very low concentrations of certain simulants. A good classification was achieved.
Sensors and Actuators, A: Physical, 2004
A new approach of enlarging the measurement range of a thermal calorimetric flow sensor is presen... more A new approach of enlarging the measurement range of a thermal calorimetric flow sensor is presented. It is based on the fact that the response of these kind of sensors tends to saturate at a certain flow ratio, so the widening of the flow range can be achieved by increasing the number of sensing elements of the sensor. This implies
Sensors and Actuators, B: Chemical, 2005
In this paper, the monitoring of gas concentration of a flowing gas with a semiconductor gas sens... more In this paper, the monitoring of gas concentration of a flowing gas with a semiconductor gas sensor is faced. In this kind of devices, the flow rate has a significant effect on the gas sensors' output signal. One way to obtain reliable measurements is the simultaneous ...
Active layers consisting of rf sputtered WO3 were deposited on microhotplate substrates. The film... more Active layers consisting of rf sputtered WO3 were deposited on microhotplate substrates. The films were doped with seven different materials (Pt, Au, Ag, Ti, SnO2, ZnO and ITO (indium tin oxide)). The eight types of sensors (including pure tungsten oxide ones) were tested in the presence of ammonia, hydrogen sulphide, nitrogen dioxide, carbon monoxide and methane. It was found that
Abstract In the present work, a silicon-based gas chromatographic microsystem is proposed and dev... more Abstract In the present work, a silicon-based gas chromatographic microsystem is proposed and developed; it consists of a spiral-shaped μ preconcentrator followed by a μ-hotplate sensor matrix. The shape of the preconcentrator was chosen according to technological ...
ABSTRACT Sensors embedded in micro fuel cells can help in controlling some important parameters s... more ABSTRACT Sensors embedded in micro fuel cells can help in controlling some important parameters such as temperature, humidity or gas concentration. In this paper we introduce the fabrication procedure for MEMs-compatible nanocolumnar tungsten oxide gas microsensors and show the results of measuring their responses to H2, CO and humidity. Tungsten oxide nanoculumns were grown by smart anodization of Al/W layers on silicon micro-hotplate substrates. An excellent linear sensor response was observed for hydrogen in the 0-20 ppm concentration range and a low response to CO and moisture in the usual operating conditions of micro fuel cells. The sensors operated at moderate temperature due to the high surface-to-volume ratio and the nanostructured morphology of the sensing films.
Sensors and Actuators, B: Chemical, 2013
ABSTRACT An immunosensor based on a Love-wave device and a PDMS microfluidic chip has been develo... more ABSTRACT An immunosensor based on a Love-wave device and a PDMS microfluidic chip has been developed to detect potentially pathogenic microorganisms in real time. In order to characterize and test the immunosensor, the M13 bacteriophage has been chosen as a model of microorganism. The M13 was detected with the mouse monoclonal antibody, anti-M13 (AM13), which has been immobilized on the Love wave-device. The immunoassay has been carried out in a dynamic mode (continuous flow) through microchannels with the goal of obtaining a short response time in detecting a small volume of a sample of M13 bacteriophage. The concentrations of the bacteriophage have been varied between 5 × 108 pfu ml−1 and 2 × 1010 pfu ml−1, a range for which a fast detection and a favorable discrimination among concentrations have been achieved. The AM13 has been also used as a secondary antibody in order to measure lower concentrations such as 5 × 107 pfu ml−1.The Double-Layer Agar technique has been used to quantify, as plaques-forming unit (pfu), the number of M13 bacteriophage in the initial sample as well as those linked to the sensor surface during the detection. Finally, the number of bacteriophage was estimated by calculating the mass sensitivity. The values obtained in both procedures have been very similar.
Conference on Electron Devices, 2005 Spanish, 2005
The fabrication and characterization of a thermopile sensor array is described in this work. The ... more The fabrication and characterization of a thermopile sensor array is described in this work. The device is intended to be part of a non-dispersive infrared (NDIR) gas detection system integrated in an electronic nose where each sensor is not oriented for the detection of a particular substance. Different designs were considered changing the size of the array (9 or 16 elements) and improving some specific detector performance parameters: responsivity and noise equivalent power (NEP). After device fabrication, the measurements of these parameters show a good agreement with the thermal one-dimensional model used for the design.
Smart Sensors, Actuators, and MEMS III, 2007
The development of an integrated gas chromatographic system using micro and nanotechnologies is p... more The development of an integrated gas chromatographic system using micro and nanotechnologies is presented in this paper. For this purpose, the different components of the chromatographic system, namely the preconcentrator, the chromatographic column and the gas sensors are being investigated and developed, and the actual state of this investigation is presented. The proposed target application comes from the agrofood industry,
IEEE Conference on Cybernetics and Intelligent Systems, 2004., 2004
Vacuum, 1989
The etch rate of a positive photoresist in a mixture of oxygen and tetrafluoromethane depends on ... more The etch rate of a positive photoresist in a mixture of oxygen and tetrafluoromethane depends on many parameters such as the total pressure of the reaction chamber, the composition of the initial mixture, the total flow of the gases, the applied power to the discharge and the number of wafers processed at a time (known as "loading effect'). The stripping reaction involves two mechanisms: a gas phase reaction and a surface reaction. One of these mechanisms dominates the reaction depending on the values of the system parameters. In this paper we analyze the influence of each of our system parameters on the etch rate in order to obtain a high etch rate taking into account the selectivity to other layers under the resist film.