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Papers by Catherine Dubourdieu

Research paper thumbnail of Dielectric Properties and Flat-Band Voltages of Doped HfO2

Dielectric Properties and Flat-Band Voltages of Doped HfO2

ECS Meeting Abstracts, 2010

ABSTRACT The control of high-symmetry phases of HfO2 can be achieved by cationic substitution for... more ABSTRACT The control of high-symmetry phases of HfO2 can be achieved by cationic substitution for Hf. The electrical properties of HfO2 cubic phase stabilized by addition of yttrium or magnesium are investigated. The introduction of moderate Y or Mg doping content (similar to 10-15 at.%) in HfO2 results in an enhancement of the dielectric constant. No degradation of the interface state density and leakage current is noticed. The flat-band voltage is shifted to positive voltages, similarly as it was observed for monoclinic and cubic pure HfO2 thin films. This result confirms that the contribution of the SiO2/high-kappa interface to the flat-band voltage depends on the structural high-kappa properties.

Research paper thumbnail of Insights on the variability of Cu filament formation in the SiO2 electrolyte of quantized-conductance conductive bridge random access memory devices

arXiv (Cornell University), Apr 27, 2022

Conductive bridge random access memory devices such as Cu/SiO2/W are promising candidates for app... more Conductive bridge random access memory devices such as Cu/SiO2/W are promising candidates for applications in neuromorphic computing due to their fast, low-voltage switching, multiple-conductance states, scalability, low off-current, and full compatibility with advanced Si CMOS technologies. The conductance states, which can be quantized, originate from the formation of a Cu filament in the SiO2 electrolyte due to cation-migration-based electrochemical processes. A major challenge related to the filamentary nature is the strong variability of the voltage required to switch the device to its conducting state. Here, based on a statistical analysis of more than hundred fifty Cu/SiO2/W devices, we point to the key role of the activation energy distribution for copper ion diffusion in the amorphous SiO2. The cycleto-cycle variability is modeled well when considering the theoretical energy landscape for Cu diffusion paths to grow the filament. Perspectives of this work point to developing strategies to narrow the distribution of activation energies in amorphous SiO2.

Research paper thumbnail of High k SrTiO3 Perovskite on Si/SiO2: CVD Growth, Interface Engineering and Dielectric Properties

High k SrTiO3 Perovskite on Si/SiO2: CVD Growth, Interface Engineering and Dielectric Properties

ECS Meeting Abstracts, 2009

not Available.

Research paper thumbnail of Electrically induced cancellation and inversion of piezoelectricity in ferroelectric Hf0.5Zr0.5O2

Nature communications, Jan 29, 2024

Research paper thumbnail of Strain and Cation Stoichiometry in Epitaxial BaTiO3 Thin Films Grown on Silicon

Strain and Cation Stoichiometry in Epitaxial BaTiO3 Thin Films Grown on Silicon

International audienc

Research paper thumbnail of Epitaxial pyroelectric thin films on silicon for thermal energy harvesting

Epitaxial pyroelectric thin films on silicon for thermal energy harvesting

Research paper thumbnail of Growth parameters and tetragonality at the nanoscale of MBE epitaxial BaTiO3 films on Si

Growth parameters and tetragonality at the nanoscale of MBE epitaxial BaTiO3 films on Si

Research paper thumbnail of Thermal energy harvesting through epitaxial pyroelectric oxide films integrated on silicon

Thermal energy harvesting through epitaxial pyroelectric oxide films integrated on silicon

Research paper thumbnail of Integration of functional oxides on silicon for nanoelectronics and energy

Integration of functional oxides on silicon for nanoelectronics and energy

Research paper thumbnail of Electro-optic modulation with functional oxides monolithically integrated on silicon

Electro-optic modulation with functional oxides monolithically integrated on silicon

june 29-july 4 2014International audienceno abstrac

Research paper thumbnail of Epitaxial pyroelectric Pb(Zr,Ti)O3 thin films on silicon for thermal energy harvesting

Epitaxial pyroelectric Pb(Zr,Ti)O3 thin films on silicon for thermal energy harvesting

11-15 mai 2015International audienceno abstrac

Research paper thumbnail of Pulsed-MOCVD Growth of Transition Metal Oxides

Pulsed-MOCVD Growth of Transition Metal Oxides

ECS Meeting Abstracts, 2005

not Available.

Research paper thumbnail of Toward van der Waals epitaxy of transferable ferroelectric barium titanate films via a graphene monolayer

Toward van der Waals epitaxy of transferable ferroelectric barium titanate films via a graphene monolayer

Journal of Materials Chemistry C, 2020

Transferable highly (001)-oriented textured ferroelectric BaTiO3 thin films have been achieved on... more Transferable highly (001)-oriented textured ferroelectric BaTiO3 thin films have been achieved on a graphene monolayer for wearable devices like sensors and actuators for future “Internet of Things” era.

Research paper thumbnail of Correlation between the microwave surface resistance and the volumic fraction of a-axis grains in YBa2Cu3O7−x films

Correlation between the microwave surface resistance and the volumic fraction of a-axis grains in YBa2Cu3O7−x films

Physica C: Superconductivity, 1998

A quantitative study of the effect of a-axis grains (the a-axis is perpendicular to the substrate... more A quantitative study of the effect of a-axis grains (the a-axis is perpendicular to the substrate plane) on the microwave surface resistance in epitaxial YBa2Cu3O7−x films is reported. The films were grown by Metal Organic Chemical Vapor Deposition on MgO and LaAlO3 substrates. The fraction of a-axis grains %a has been varied in the range 0–70% by changing the oxygen partial pressure during the growth. A clear correlation between the surface resistance Rs(0.85Tc), measured at 87 GHz, and the volumic fraction %a is found. At variance, the residual surface resistance Rs(4.2 K) does not correlate to %a.

Research paper thumbnail of Mixed electrochemical–ferroelectric states in nanoscale ferroelectrics

Nature Physics, 2017

Ferroelectricity on the nanoscale has been the subject of much fascination in condensed-matter ph... more Ferroelectricity on the nanoscale has been the subject of much fascination in condensed-matter physics for over half a century. In recent years, multiple reports claiming ferroelectricity in ultrathin ferroelectric films based on the formation of remnant polarization states, local electromechanical hysteresis loops, and pressure-induced switching were made. However, similar phenomena were reported for traditionally non-ferroelectric materials, creating a significant level of uncertainty in the field. Here we show that in nanoscale systems the ferroelectric state is fundamentally inseparable from the electrochemical state of the surface, leading to the emergence of a mixed electrochemical-ferroelectric state. We explore the nature, thermodynamics, and thickness evolution of such states, and demonstrate the experimental pathway to establish its presence. This analysis reconciles multiple prior studies, provides guidelines for studies of ferroelectric materials on the nanoscale, and establishes the design paradigm for new generations of ferroelectric-based devices.

Research paper thumbnail of Method for Developing Thin Film from Oxide or Silicate of Hafnium Nitride, Coordination Compound Used in Said Method, and Method for Producing Integrated Electronic Circuit

Method for Developing Thin Film from Oxide or Silicate of Hafnium Nitride, Coordination Compound Used in Said Method, and Method for Producing Integrated Electronic Circuit

Research paper thumbnail of Phase Change Material Cell with Piezoelectric or Ferroelectric Stress Inducer Liner

Phase Change Material Cell with Piezoelectric or Ferroelectric Stress Inducer Liner

Research paper thumbnail of A 250 mV Cu/SiO2/W Memristor with Half-Integer Quantum Conductance States

Nano letters, Jan 9, 2016

Memristive devices, whose conductance depends on previous programming history, are of significant... more Memristive devices, whose conductance depends on previous programming history, are of significant interest for building nonvolatile memory and brain-inspired computing systems. Here, we report half-integer quantized conductance transitions G = (n/2) (2e(2)/h) for n = 1, 2, 3, etc., in Cu/SiO2/W memristive devices observed below 300 mV at room temperature. This is attributed to the nanoscale filamentary nature of Cu conductance pathways formed inside SiO2. Retention measurements also show spontaneous filament decay with quantized conductance levels. Numerical simulations shed light into the dynamics underlying the data retention loss mechanisms and provide new insights into the nanoscale physics of memristive devices and trade-offs involved in engineering them for computational applications.

Research paper thumbnail of Controlling ferroelectricity in dielectric films by process induced uniaxial strain

Controlling ferroelectricity in dielectric films by process induced uniaxial strain

Research paper thumbnail of Engineering multiple threshold voltages in an integrated circuit

Engineering multiple threshold voltages in an integrated circuit

Research paper thumbnail of Dielectric Properties and Flat-Band Voltages of Doped HfO2

Dielectric Properties and Flat-Band Voltages of Doped HfO2

ECS Meeting Abstracts, 2010

ABSTRACT The control of high-symmetry phases of HfO2 can be achieved by cationic substitution for... more ABSTRACT The control of high-symmetry phases of HfO2 can be achieved by cationic substitution for Hf. The electrical properties of HfO2 cubic phase stabilized by addition of yttrium or magnesium are investigated. The introduction of moderate Y or Mg doping content (similar to 10-15 at.%) in HfO2 results in an enhancement of the dielectric constant. No degradation of the interface state density and leakage current is noticed. The flat-band voltage is shifted to positive voltages, similarly as it was observed for monoclinic and cubic pure HfO2 thin films. This result confirms that the contribution of the SiO2/high-kappa interface to the flat-band voltage depends on the structural high-kappa properties.

Research paper thumbnail of Insights on the variability of Cu filament formation in the SiO2 electrolyte of quantized-conductance conductive bridge random access memory devices

arXiv (Cornell University), Apr 27, 2022

Conductive bridge random access memory devices such as Cu/SiO2/W are promising candidates for app... more Conductive bridge random access memory devices such as Cu/SiO2/W are promising candidates for applications in neuromorphic computing due to their fast, low-voltage switching, multiple-conductance states, scalability, low off-current, and full compatibility with advanced Si CMOS technologies. The conductance states, which can be quantized, originate from the formation of a Cu filament in the SiO2 electrolyte due to cation-migration-based electrochemical processes. A major challenge related to the filamentary nature is the strong variability of the voltage required to switch the device to its conducting state. Here, based on a statistical analysis of more than hundred fifty Cu/SiO2/W devices, we point to the key role of the activation energy distribution for copper ion diffusion in the amorphous SiO2. The cycleto-cycle variability is modeled well when considering the theoretical energy landscape for Cu diffusion paths to grow the filament. Perspectives of this work point to developing strategies to narrow the distribution of activation energies in amorphous SiO2.

Research paper thumbnail of High k SrTiO3 Perovskite on Si/SiO2: CVD Growth, Interface Engineering and Dielectric Properties

High k SrTiO3 Perovskite on Si/SiO2: CVD Growth, Interface Engineering and Dielectric Properties

ECS Meeting Abstracts, 2009

not Available.

Research paper thumbnail of Electrically induced cancellation and inversion of piezoelectricity in ferroelectric Hf0.5Zr0.5O2

Nature communications, Jan 29, 2024

Research paper thumbnail of Strain and Cation Stoichiometry in Epitaxial BaTiO3 Thin Films Grown on Silicon

Strain and Cation Stoichiometry in Epitaxial BaTiO3 Thin Films Grown on Silicon

International audienc

Research paper thumbnail of Epitaxial pyroelectric thin films on silicon for thermal energy harvesting

Epitaxial pyroelectric thin films on silicon for thermal energy harvesting

Research paper thumbnail of Growth parameters and tetragonality at the nanoscale of MBE epitaxial BaTiO3 films on Si

Growth parameters and tetragonality at the nanoscale of MBE epitaxial BaTiO3 films on Si

Research paper thumbnail of Thermal energy harvesting through epitaxial pyroelectric oxide films integrated on silicon

Thermal energy harvesting through epitaxial pyroelectric oxide films integrated on silicon

Research paper thumbnail of Integration of functional oxides on silicon for nanoelectronics and energy

Integration of functional oxides on silicon for nanoelectronics and energy

Research paper thumbnail of Electro-optic modulation with functional oxides monolithically integrated on silicon

Electro-optic modulation with functional oxides monolithically integrated on silicon

june 29-july 4 2014International audienceno abstrac

Research paper thumbnail of Epitaxial pyroelectric Pb(Zr,Ti)O3 thin films on silicon for thermal energy harvesting

Epitaxial pyroelectric Pb(Zr,Ti)O3 thin films on silicon for thermal energy harvesting

11-15 mai 2015International audienceno abstrac

Research paper thumbnail of Pulsed-MOCVD Growth of Transition Metal Oxides

Pulsed-MOCVD Growth of Transition Metal Oxides

ECS Meeting Abstracts, 2005

not Available.

Research paper thumbnail of Toward van der Waals epitaxy of transferable ferroelectric barium titanate films via a graphene monolayer

Toward van der Waals epitaxy of transferable ferroelectric barium titanate films via a graphene monolayer

Journal of Materials Chemistry C, 2020

Transferable highly (001)-oriented textured ferroelectric BaTiO3 thin films have been achieved on... more Transferable highly (001)-oriented textured ferroelectric BaTiO3 thin films have been achieved on a graphene monolayer for wearable devices like sensors and actuators for future “Internet of Things” era.

Research paper thumbnail of Correlation between the microwave surface resistance and the volumic fraction of a-axis grains in YBa2Cu3O7−x films

Correlation between the microwave surface resistance and the volumic fraction of a-axis grains in YBa2Cu3O7−x films

Physica C: Superconductivity, 1998

A quantitative study of the effect of a-axis grains (the a-axis is perpendicular to the substrate... more A quantitative study of the effect of a-axis grains (the a-axis is perpendicular to the substrate plane) on the microwave surface resistance in epitaxial YBa2Cu3O7−x films is reported. The films were grown by Metal Organic Chemical Vapor Deposition on MgO and LaAlO3 substrates. The fraction of a-axis grains %a has been varied in the range 0–70% by changing the oxygen partial pressure during the growth. A clear correlation between the surface resistance Rs(0.85Tc), measured at 87 GHz, and the volumic fraction %a is found. At variance, the residual surface resistance Rs(4.2 K) does not correlate to %a.

Research paper thumbnail of Mixed electrochemical–ferroelectric states in nanoscale ferroelectrics

Nature Physics, 2017

Ferroelectricity on the nanoscale has been the subject of much fascination in condensed-matter ph... more Ferroelectricity on the nanoscale has been the subject of much fascination in condensed-matter physics for over half a century. In recent years, multiple reports claiming ferroelectricity in ultrathin ferroelectric films based on the formation of remnant polarization states, local electromechanical hysteresis loops, and pressure-induced switching were made. However, similar phenomena were reported for traditionally non-ferroelectric materials, creating a significant level of uncertainty in the field. Here we show that in nanoscale systems the ferroelectric state is fundamentally inseparable from the electrochemical state of the surface, leading to the emergence of a mixed electrochemical-ferroelectric state. We explore the nature, thermodynamics, and thickness evolution of such states, and demonstrate the experimental pathway to establish its presence. This analysis reconciles multiple prior studies, provides guidelines for studies of ferroelectric materials on the nanoscale, and establishes the design paradigm for new generations of ferroelectric-based devices.

Research paper thumbnail of Method for Developing Thin Film from Oxide or Silicate of Hafnium Nitride, Coordination Compound Used in Said Method, and Method for Producing Integrated Electronic Circuit

Method for Developing Thin Film from Oxide or Silicate of Hafnium Nitride, Coordination Compound Used in Said Method, and Method for Producing Integrated Electronic Circuit

Research paper thumbnail of Phase Change Material Cell with Piezoelectric or Ferroelectric Stress Inducer Liner

Phase Change Material Cell with Piezoelectric or Ferroelectric Stress Inducer Liner

Research paper thumbnail of A 250 mV Cu/SiO2/W Memristor with Half-Integer Quantum Conductance States

Nano letters, Jan 9, 2016

Memristive devices, whose conductance depends on previous programming history, are of significant... more Memristive devices, whose conductance depends on previous programming history, are of significant interest for building nonvolatile memory and brain-inspired computing systems. Here, we report half-integer quantized conductance transitions G = (n/2) (2e(2)/h) for n = 1, 2, 3, etc., in Cu/SiO2/W memristive devices observed below 300 mV at room temperature. This is attributed to the nanoscale filamentary nature of Cu conductance pathways formed inside SiO2. Retention measurements also show spontaneous filament decay with quantized conductance levels. Numerical simulations shed light into the dynamics underlying the data retention loss mechanisms and provide new insights into the nanoscale physics of memristive devices and trade-offs involved in engineering them for computational applications.

Research paper thumbnail of Controlling ferroelectricity in dielectric films by process induced uniaxial strain

Controlling ferroelectricity in dielectric films by process induced uniaxial strain

Research paper thumbnail of Engineering multiple threshold voltages in an integrated circuit

Engineering multiple threshold voltages in an integrated circuit