Dan Gelbart - Academia.edu (original) (raw)

Papers by Dan Gelbart

Proceedings of SPIE, Jun 25, 1999

Thermoresists offer the possibility of greatly enhanced resolution and process window, mainly dep... more Thermoresists offer the possibility of greatly enhanced resolution and process window, mainly depth of focus, using conventional masks and modified conventional steppers. Unlike photoresists, which respond to total exposure, thermoresists ignore all exposures below their threshold provided that the exposures are separated in time by more than a few tens of nanoseconds. This allows thermoresists to ignore sidelobes and stray light that result from improving the resolution and depth of focus if nearby features are not imaged at the same time. Conventional steppers can be modified by adding a piezoelectrically-scanned microlens array above the mask and by adding an apodizing function to the reduction lens system. The microlens array eliminates all optical proximity effects by breaking the image into an array of dots that are moved between pulses of the stepper's laser, causing image features to be separated in time as well as space. Thermoresists also offers an advantage when imagin on non-planar materials if the intensity of the exposure is adjusted so that image spots will only reach the threshold of the resist when they are in focus. By making multiple image exposures with the focus shifted towards and away from the resist, a high-resolution image can be produced on a rough surface.

Journal of The Society for Information Display, 2003

Photolithography is currently the predominant patterning method in the flat-panel-display (FPD) i... more Photolithography is currently the predominant patterning method in the flat-panel-display (FPD) industry. Thermal lithography is a novel approach offering superior process control, a completely dry process, and considerable cost savings. Thermal imaging is now the dominant imaging method in computer-to-plate applications in the printing industry, with over 6000 installations worldwide. Two applications, in which this technology could be applied in the FPD industry, will be discussed in detail: color filters for liquid-crystal displays (LCDs) and barrier ribs for LCDs and organic light-emitting-diode (OLED) displays.

Applied Physics B, Sep 1, 2004

We have developed a three-dimensional microfabrication method using thermo-sensitive resin. This ... more We have developed a three-dimensional microfabrication method using thermo-sensitive resin. This method exploits the fact that polymerization of thermo-sensitive resins does not obey the law of linear superposition. Threedimensional (3D) objects are created inside the thermo-sensitive resin by 3D scanning of the volume with a focused laser. Fabrication with the focus of the laser inside the resin can achieve good accuracy and high resolution of the structure. A fabrication system, which consisted of a CD-R pickup laser and an XYZ stage, was built. Nonlinear polymerizations of the thermosensitive resin were verified by fabrication in various conditions of laser intensity and exposure time. In order to demonstrate the present method, a simple 3D microstructure was fabricated inside the resin.

NIP & Digital Fabrication Conference

Optical Data Storage, 1990

An optical tape recorder is disclosed using the linear motion of a slide to record data across a ... more An optical tape recorder is disclosed using the linear motion of a slide to record data across a slowly moving tape made of light sensitive material. Data is recorded on the tape by modulating the output of a laser in accordance with the data and focussing the modulated light onto the tape using a lens mounted on a slide. The position of the slide is measured using a linear optical encoder and this information is used to place the data accurately on the tape. The slide is connected to a spring and driven electromagnetically at its resonant frequency.

Scientific Reports

Emphysema is a common phenotype of chronic obstructive pulmonary disease (COPD). Although resecti... more Emphysema is a common phenotype of chronic obstructive pulmonary disease (COPD). Although resection of emphysematous tissue can improve lung mechanics, it is invasive and fraught with adverse effects. Meanwhile, radiofrequency (RF) treatment is an extracorporeal method that leads to tissue destruction and remodeling, resulting in “volume reduction” and overall improvement in lung compliance of emphysematous lungs. Whether these changes lead to improved exercise tolerance is unknown. Here, we investigated the effectiveness of RF treatment to improve the exercise capacity of mice with emphysema. Fifty-two mice (7 weeks of age) were used in this experiment. A bilateral emphysema model was created by intratracheally instilling porcine pancreatic elastase (PPE) (1.5U/100 g body weight). RF treatment (0.5 W/ g body weight) was administered extracorporeally 14 days later and mice were sacrificed after another 21 days. The exercise capacity of mice was measured using a treadmill. Treadmill ...

European Respiratory Journal

Journal of the Society For Information Display, 2003

D80. EMPHYSEMA AND COPD: PATHOPHYSIOLOGY, 2012

Journal of Photopolymer Science and Technology, 2000

A new thermo resist enhanced optical lithography (TREOL) technique is proposed. Numerical simulat... more A new thermo resist enhanced optical lithography (TREOL) technique is proposed. Numerical simulation was performed on the TREOL. The TREOL offer the possibility of greatly enhanced resoluion and process window. The TREOL uses a thermo-resist instead of photoresist taking advantage of a nonlinear superposition effect. The nonlinear superposition utilizes the fact that thermo-resists do not follow the reciprocity law. This phenomena allows to separate a complex image into simple subsets which are imaged onto the same die. This concept will realize a fabrication of 1 features with existing steppers and without and proximity effects. Hopkin's fourdimensional integral is used for calculation of the diffraction intensity of projection image. Intensity of impressed heat flux is assumed to be proportional to the intensity of this diffraction image. Transient heat transfer in wafer and layer of thermo-resist is analyzed by non-linear 3 dimensional finite element method. The numerical result demonstrates an drastic improvement in resolution and process window.

Emerging Lithographic Technologies III, 1999

SID Symposium Digest of Technical Papers, 2002