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Papers by Daniel Fischer

Journal of Physical Chemistry C, Jan 30, 2013

With the increasing drive towards smaller feature sizes in integrated circuits and the consequent... more With the increasing drive towards smaller feature sizes in integrated circuits and the consequent use of shorter exposure wavelengths, the imaging resist layer and underlying bottom anti-reflective coating (BARC) layer are becoming thinner. At this scale, the performance of chemically amplified resists can be adversely affected by the BARC-resist interfacial interactions. These interactions can cause distortion of resist profiles and lead to footing, undercut, or pattern collapse. -BARC components can immensely influence the deprotection and dissolution properties of the resist. A thorough understanding of the physico-chemical interactions at these interfaces is essential to design and develop new material platforms with minimal adverse interactions and maximum compatibility between BARC and resist. Results are reported from studies of (A) surface versus bulk chemistry of BARC materials as a function of cure temperature, (B) the dependence of the thickness and composition of the res...

Physical Chemistry Chemical Physics, 2020

Snapshots of hydrogen locations between non-ionic and ionic states with XPS reveal hydrogen centr... more Snapshots of hydrogen locations between non-ionic and ionic states with XPS reveal hydrogen centred in the middle of the continuum in the solid state.

Chemistry of Materials, 2018

Langmuir : the ACS journal of surfaces and colloids, Jan 29, 2017

As the quest towards novel materials proceeds, improved characterization technologies are needed.... more As the quest towards novel materials proceeds, improved characterization technologies are needed. In particular, the atomic thickness in graphene and other 2D materials renders some conventional technologies obsolete. Characterization technologies at wafer levels are needed with enough sensitivity to detect strain in order to inform fabrication. In this work, NEXAFS spectroscopy was combined with simulations to predict lattice parameters of graphene grown on copper and further transferred to a variety of substrates. The strains associated with the predicted lattice parameters are in agreement with experimental findings. The approach presented here holds promise to effectively measure strain in graphene and other 2D systems at wafer levels to inform manufacturing environments.

The Journal of Physical Chemistry C, 2017

Journal of Physics: Conference Series, 2016

APL Materials, 2014

Effects of aging on chemical structure and molecular dynamic behaviour of strained thermally acti... more Effects of aging on chemical structure and molecular dynamic behaviour of strained thermally active ethylene-vinyl acetate | multiwall carbon nanotube (EVA|MWCNT) composites were investigated by spectroscopy and microscopy techniques. Aged composites showed spatial inhomogeneity due to system relaxation. Inhomogeneity is attributed to segregation of non-covalently linked cholestryl 1-pyrenecarboxylate, acting as MWCNT dispersant and polymer compatibilizer. Analysis of molecular interplay between filler and matrix upon in situ temperature variation showed a lack of synchronicity, which had been observed in fresh composites. Reduced synchronous interplay allowed quantification of degraded π-π interactions, promoting PyChol unlatching as a result of both sonication and strained-derived π-π degradation.

Journal of Synchrotron Radiation, 2015

X-ray emission spectroscopy (XES) is a powerful element-selective tool to analyze the oxidation s... more X-ray emission spectroscopy (XES) is a powerful element-selective tool to analyze the oxidation states of atoms in complex compounds, determine their electronic configuration, and identify unknown compounds in challenging environments. Until now the low efficiency of wavelength-dispersive X-ray spectrometer technology has limited the use of XES, especially in combination with weaker laboratory X-ray sources. More efficient energy-dispersive detectors have either insufficient energy resolution because of the statistical limits described by Fano or too low counting rates to be of practical use. This paper updates an approach to high-resolution X-ray emission spectroscopy that uses a microcalorimeter detector array of superconducting transition-edge sensors (TESs). TES arrays are discussed and compared with conventional methods, and shown under which circumstances they are superior. It is also shown that a TES array can be integrated into a table-top time-resolved X-ray source and a so...

ACS Symposium Series, 2004

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2002

The performance of chemically amplified photoresists is extremely sensitive to interfacial and su... more The performance of chemically amplified photoresists is extremely sensitive to interfacial and surface phenomena, which cause deviations in the pattern profile near an interface. Striking examples include T-topping or closure near the air/resist interface and footing or undercutting near the resist/substrate interface. One focus of our research is to identify mechanisms that cause lithographic patterns to deviate near interfaces. Near edge x-ray absorption fine structure (NEXAFS) is a powerful tool that can be developed and adapted to probe for detailed chemical information near lithographically relevant interfaces. NEXAFS showed that our model resist films exhibited significant surface segregation of the photo acid generator (PAG) at the air interface. The PAG surface mole fraction was 20–70 times greater than the bulk mole fraction and the amount of surface segregation was dependent on the polarity of the polymer. NEXAFS also revealed that the PAG surface fraction was reduced afte...