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Papers by De-Yin Jeng

Proceedings of the 15th Annual Conference on Composites and Advanced Ceramic Materials, Part 1 of 2: Ceramic Engineering and Science Proceedings, Volume 12, Issue 7/8

Journal of Materials Science, 1993

ABSTRACT

Optical Microlithography XVI, 2003

22nd Annual BACUS Symposium on Photomask Technology, 2002

23rd Annual BACUS Symposium on Photomask Technology, 2003

Two main issues with current pellicle frames are: (1) thermal expansion mismatch between the anod... more Two main issues with current pellicle frames are: (1) thermal expansion mismatch between the anodized aluminum frame and the photomask, and (2) the lack of porosity for purging and contamination control. Both issues can be addressed by using a sol-gel-derived porous silica frame. The silica frame has essentially the same thermal expansion coefficient as the fused silica photomask substrate. The porous nature of the silica frame provides contamination control by N2 purging and scavenging capability. The porosity characteristics and mechanical properties of the frame material were determined. Porous silica frame was successfully mounted onto quartz plate by a commercial process, suggesting the suitability of using porous silica as pellicle frame material. The sol-gel derived porous silica represents the first proof-of-concept for an alternative frame material with a potentially significant impact on the photomask industry.

Journal of Micro/Nanolithography, MEMS, and MOEMS, 2004

ABSTRACT Several significant technical issues are associated with the current anodized aluminum p... more ABSTRACT Several significant technical issues are associated with the current anodized aluminum pellicle frame. These problems will become more acute as shorter wavelengths such as 193 and 157 nm become standard. For example, it is difficult to purge the pellicle space, and the nonporous nature of the aluminum frame can lead to pressure-induced film breakage during transport. In addition, the thermal expansion behavior of aluminum does not match that of the silica substrate, which can lead to pattern distortion or bending of a hard pellicle film. Proposed solutions such as a perforated silica frame or a porous Invar(TM) frame may address some of these issues, but a complete solution has not been forthcoming. A porous silica frame technology based on sol-gel processing may eliminate concerns associated with the lack of porosity in the aluminum frame, as well as thermal expansion mismatch problems. Several additional advantages may also be realized, including the removal of organic contaminants from inside the pellicle space, filtration of particulate contaminants, and stability under aggressive cleaning. This approach to a porous silica frame may help enable a cost-effective route to more rapid commercialization of shorter-wavelength microlithographic processes. (C) 2004 Society of Photo-Optical Instrumentation Engineers.

IEEE Transactions on Instrumentation and Measurement, 2003

A Nasicon (sodium super ion conductor) CO 2 gas sensor with a new structure is developed for moni... more A Nasicon (sodium super ion conductor) CO 2 gas sensor with a new structure is developed for monitoring CO 2 levels in the atmospheric air. In addition to the sensing and reference electrodes of a conventional Nasicon sensor, an auxiliary electrode, referred to as the base electrode, is provided with the new structure. The principle of CO 2 detection is the same as that of a conventional Nasicon sensor, but the durability is greatly improved by using a nonaqueous carbonate as the sensing material. Characterization has also revealed that the output voltage at the base electrode is closely correlated with the drift at the sensing electrode and is available for the drift compensation.