Elżbieta Klimek - Academia.edu (original) (raw)
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Indian Institute of Engineering Science and Technology, Shibpur
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Papers by Elżbieta Klimek
Vacuum, 2010
The article presents results of structural studies of polycrystalline diamond thin films deposite... more The article presents results of structural studies of polycrystalline diamond thin films deposited by hot filament CVD on silicon substrates. The films were characterized using Scanning Electron Microscopy (SEM), Raman Spectroscopy (RS), Electron Backscattered Diffraction (EBSD), Energy Dispersive Spectroscopy (EDS) and Secondary Ion Mass Spectroscopy (SIMS). Both the EBSD patterns and Raman spectra confirm that the grains visible in the electron micrographs are diamond micro-crystallites. The residual stress in the films is found to be in the range between À4.29 GPa and À0.56 GPa depending on the sample thickness. No evidence of lonsdalite and graphite has been registered in the polycrystalline material of the investigated samples. Evidence of the existence of silicon carbide at the diamond/silicon interface is presented. It is also suggested that an amorphous carbonaceous film covers the silicon surface in the regions of holes in the thin diamond layers.
Optical Materials, 2008
The results of investigations into on composition and biaxial stress in polycrystalline diamond f... more The results of investigations into on composition and biaxial stress in polycrystalline diamond films deposited on silicon substrates are presented. The diamond films' characteristics were carried out using Raman spectroscopy and Electron back-scattered diffraction. The results indicate that, apart from the dominating crystalline diamond phase inside the grains, an amount of disordered phase exists among the grains. No evidence of such diamond polymorphs as lonsdalite and graphite has been detected in the investigated films.
Vacuum, 2010
The article presents results of structural studies of polycrystalline diamond thin films deposite... more The article presents results of structural studies of polycrystalline diamond thin films deposited by hot filament CVD on silicon substrates. The films were characterized using Scanning Electron Microscopy (SEM), Raman Spectroscopy (RS), Electron Backscattered Diffraction (EBSD), Energy Dispersive Spectroscopy (EDS) and Secondary Ion Mass Spectroscopy (SIMS). Both the EBSD patterns and Raman spectra confirm that the grains visible in the electron micrographs are diamond micro-crystallites. The residual stress in the films is found to be in the range between À4.29 GPa and À0.56 GPa depending on the sample thickness. No evidence of lonsdalite and graphite has been registered in the polycrystalline material of the investigated samples. Evidence of the existence of silicon carbide at the diamond/silicon interface is presented. It is also suggested that an amorphous carbonaceous film covers the silicon surface in the regions of holes in the thin diamond layers.
Optical Materials, 2008
The results of investigations into on composition and biaxial stress in polycrystalline diamond f... more The results of investigations into on composition and biaxial stress in polycrystalline diamond films deposited on silicon substrates are presented. The diamond films' characteristics were carried out using Raman spectroscopy and Electron back-scattered diffraction. The results indicate that, apart from the dominating crystalline diamond phase inside the grains, an amount of disordered phase exists among the grains. No evidence of such diamond polymorphs as lonsdalite and graphite has been detected in the investigated films.