Etienne Quesnel - Academia.edu (original) (raw)
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Papers by Etienne Quesnel
2D Materials, 2015
Here we report on technology developments implemented into the Graphene Flagship European project... more Here we report on technology developments implemented into the Graphene Flagship European project for the integration of graphene and graphene-related materials (GRMs) into energy application devices. Many of the technologies investigated so far aim at producing composite materials associating graphene or GRMs with either metal or semiconducting nanocrystals or other carbon nanostructures (e.g., CNT, graphite). These composites can be used favourably as hydrogen storage materials or solar cell absorbers. They can also provide better performing electrodes for fuel cells, batteries, or supercapacitors. For photovoltaic (PV) electrodes, where thin layers and interface engineering are required, surface technologies are preferred. We are using conventional vacuum processes to integrate graphene as well as radically new approaches based on laser irradiation strategies. For each application, the potential of implemented technologies is then presented on the basis of selected experimental and modelling results. It is shown in particular how some of these technologies can maximize the benefit taken from GRM integration. The technical challenges still to be addressed are highlighted and perspectives derived from the running works emphasized.
Silicon oxynitride thin films were deposited on various substrates by dual ion beam sputtering fr... more Silicon oxynitride thin films were deposited on various substrates by dual ion beam sputtering from a silicon target in an argon oxygen nitrogen mixture. The composition and density of the films were deduced from Rutherford backscattering spectroscopy and nuclear reaction analyses. The residual stress was determined by measurements of the radius of curvature of the silicon substrates. The refractive index, extinction coefficient, composition and residual stress were investigated as a function of oxygen flow rate and deposition rate. The composition of the deposited materials was found to vary from Si3N4 to SiO2 with increasing oxygen flow rate. The resulting films were dense, stable and insensitive to ambient moisture. A strong correlation between the compressive residual stress and the nitrogen content of the films was established. The origin of residual stress and its evolution with deposition parameters and composition of the films are discussed.
The photoacoustic beam deflection technique at (lambda) equals 248 nm was employed for the measur... more The photoacoustic beam deflection technique at (lambda) equals 248 nm was employed for the measurement of the laser damage threshold of single films of magnesium fluoride deposited on superpolished calcium fluoride and fused silica substrates. Different samples were investigated. All films have similar thickness but are deposited by various techniques in different laboratories. The samples are fully characterized, both from
Microelectronic Engineering, 2002
Copper nanoparticles NPs were synthesized by inert-gas condensation of a sputtered metallic vapor... more Copper nanoparticles NPs were synthesized by inert-gas condensation of a sputtered metallic vapor using a dedicated commercial reactor. By controlling the time of residence of NPs in the carrier gas phase via the tuning of the collision path length, Cu NPs were produced. They exhibit various and well controlled diameters 3–10 nm and a relatively narrow size dispersion. On the basis of these experimental results, a detailed modeling of NP nucleation and growth based on the classical nucleation theory was developed. It takes into account the peculiar geometry and thermal profile of the NP reactor. The simulated curves, calculated by a MATLAB ® program developed for that purpose, exhibit a good qualitative agreement with experiment. Moreover, they highlight the role of process parameters and the strong influence of the reactor temperature profile on the NP size distribution. In the future, such calculations could be used for the optimization of the NP source design in order to increase its efficiency and reproducibility.
Thin Solid Films, Feb 1, 2000
J Vac Sci Technol a, 2001
ABSTRACT The results of laser damage studies performed at 248 nm (KrF excimer laser) on MgF2 thin... more ABSTRACT The results of laser damage studies performed at 248 nm (KrF excimer laser) on MgF2 thin films deposited by different techniques (electron-beam evaporation, thermal boat evaporation, and ion-beam sputtering) on fused silica and CaF2 substrates are presented. We find that the films deposited on CaF2 substrates by the electron-beam evaporation technique present the highest damage threshold fluence (9 J/cm2). The photoacoustic (PA) beam deflection technique was employed, in addition to microscopical inspection, to determine laser damage fluences. We confirm, by scanning electron microscopy analysis of the damaged spots, the capability of the PA technique to provide information on the mechanisms leading to damage. The dependence of both laser damage fluence and damage morphology on the film deposition technique, as well as on the film substrate, is discussed. © 2001 American Vacuum Society.
Thin Solid Films, Dec 1, 1995
Journal of Vacuum Science Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, 2005
A comparative study of yttrium fluoride thin films deposited either by conventional e-beam evapor... more A comparative study of yttrium fluoride thin films deposited either by conventional e-beam evaporation or ion beam sputtering (IBS) processes was made. Each coating was systematically characterized in terms of chemical composition, density and optical properties in the near UV- visible and IR wavelength ranges. The evaporated films exhibited low densities whereas the IBS coatings were found to be rather
2D Materials, 2015
Here we report on technology developments implemented into the Graphene Flagship European project... more Here we report on technology developments implemented into the Graphene Flagship European project for the integration of graphene and graphene-related materials (GRMs) into energy application devices. Many of the technologies investigated so far aim at producing composite materials associating graphene or GRMs with either metal or semiconducting nanocrystals or other carbon nanostructures (e.g., CNT, graphite). These composites can be used favourably as hydrogen storage materials or solar cell absorbers. They can also provide better performing electrodes for fuel cells, batteries, or supercapacitors. For photovoltaic (PV) electrodes, where thin layers and interface engineering are required, surface technologies are preferred. We are using conventional vacuum processes to integrate graphene as well as radically new approaches based on laser irradiation strategies. For each application, the potential of implemented technologies is then presented on the basis of selected experimental and modelling results. It is shown in particular how some of these technologies can maximize the benefit taken from GRM integration. The technical challenges still to be addressed are highlighted and perspectives derived from the running works emphasized.
Silicon oxynitride thin films were deposited on various substrates by dual ion beam sputtering fr... more Silicon oxynitride thin films were deposited on various substrates by dual ion beam sputtering from a silicon target in an argon oxygen nitrogen mixture. The composition and density of the films were deduced from Rutherford backscattering spectroscopy and nuclear reaction analyses. The residual stress was determined by measurements of the radius of curvature of the silicon substrates. The refractive index, extinction coefficient, composition and residual stress were investigated as a function of oxygen flow rate and deposition rate. The composition of the deposited materials was found to vary from Si3N4 to SiO2 with increasing oxygen flow rate. The resulting films were dense, stable and insensitive to ambient moisture. A strong correlation between the compressive residual stress and the nitrogen content of the films was established. The origin of residual stress and its evolution with deposition parameters and composition of the films are discussed.
The photoacoustic beam deflection technique at (lambda) equals 248 nm was employed for the measur... more The photoacoustic beam deflection technique at (lambda) equals 248 nm was employed for the measurement of the laser damage threshold of single films of magnesium fluoride deposited on superpolished calcium fluoride and fused silica substrates. Different samples were investigated. All films have similar thickness but are deposited by various techniques in different laboratories. The samples are fully characterized, both from
Microelectronic Engineering, 2002
Copper nanoparticles NPs were synthesized by inert-gas condensation of a sputtered metallic vapor... more Copper nanoparticles NPs were synthesized by inert-gas condensation of a sputtered metallic vapor using a dedicated commercial reactor. By controlling the time of residence of NPs in the carrier gas phase via the tuning of the collision path length, Cu NPs were produced. They exhibit various and well controlled diameters 3–10 nm and a relatively narrow size dispersion. On the basis of these experimental results, a detailed modeling of NP nucleation and growth based on the classical nucleation theory was developed. It takes into account the peculiar geometry and thermal profile of the NP reactor. The simulated curves, calculated by a MATLAB ® program developed for that purpose, exhibit a good qualitative agreement with experiment. Moreover, they highlight the role of process parameters and the strong influence of the reactor temperature profile on the NP size distribution. In the future, such calculations could be used for the optimization of the NP source design in order to increase its efficiency and reproducibility.
Thin Solid Films, Feb 1, 2000
J Vac Sci Technol a, 2001
ABSTRACT The results of laser damage studies performed at 248 nm (KrF excimer laser) on MgF2 thin... more ABSTRACT The results of laser damage studies performed at 248 nm (KrF excimer laser) on MgF2 thin films deposited by different techniques (electron-beam evaporation, thermal boat evaporation, and ion-beam sputtering) on fused silica and CaF2 substrates are presented. We find that the films deposited on CaF2 substrates by the electron-beam evaporation technique present the highest damage threshold fluence (9 J/cm2). The photoacoustic (PA) beam deflection technique was employed, in addition to microscopical inspection, to determine laser damage fluences. We confirm, by scanning electron microscopy analysis of the damaged spots, the capability of the PA technique to provide information on the mechanisms leading to damage. The dependence of both laser damage fluence and damage morphology on the film deposition technique, as well as on the film substrate, is discussed. © 2001 American Vacuum Society.
Thin Solid Films, Dec 1, 1995
Journal of Vacuum Science Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, 2005
A comparative study of yttrium fluoride thin films deposited either by conventional e-beam evapor... more A comparative study of yttrium fluoride thin films deposited either by conventional e-beam evaporation or ion beam sputtering (IBS) processes was made. Each coating was systematically characterized in terms of chemical composition, density and optical properties in the near UV- visible and IR wavelength ranges. The evaporated films exhibited low densities whereas the IBS coatings were found to be rather