F. Josse - Academia.edu (original) (raw)
Papers by F. Josse
IEEE Transactions on Sonics and Ultrasonics, 1984
The effects of a fused silica layer on the velocity, operational frequency, and temperature stabi... more The effects of a fused silica layer on the velocity, operational frequency, and temperature stability of microwave acoustic devices on 90'-propagating rotated Y-cut quartz are investigated. The effective permittivity function at the layer-substrate interface, which contains atl the necessary mechanical and electrical information about the composite structure is derived to analyze the temperature dependence of the velocity, hence the temperature dependence of the center frequency of mter devices. The frequency-temperature characteristics WC) and the turnover temperature (temperature at which the slope of the FTC curve is zero) as a function of film thickness are presented for selected orientations supporting SH-type surface waves or Love waves. The turnover temperature has been found to increase with increasing fdm thickness. As a result, devices having temperature stability comparable to similar devices on ST-cut quartz can be realized. The composite structure device, while maintaining the advantages of higher operational frequencies of SSBW devices, also has a much lower insertion loss. Experimental results are presented on a selected orientation and are in good agreement with theory.
Proceedings of the 2002 IEEE International Frequency Control Symposium and PDA Exhibition (Cat. No.02CH37234)
... Boima Morray, Suiqiong Li, ' Jeanne Hossenlopp,2 Richard Cernosek,' and Fabien Joss... more ... Boima Morray, Suiqiong Li, ' Jeanne Hossenlopp,2 Richard Cernosek,' and Fabien Josse ... 72, pp. 4888-4898,2000. [4] F. Josse, F. Bender and RW Cernosek, “Guided SH-SAW sensors for chemical and bio-chemical detection in liquids,” Analytical Chemistry, vol. 73, pp. ...
The Journal of the Acoustical Society of America, 1985
A theory for the amplification of surface skimming SH waves, commonly known as surface skimming b... more A theory for the amplification of surface skimming SH waves, commonly known as surface skimming bulk waves (SSBW), in 90°‐propagating, rotated Y‐cut quartz is presented. In particular, the structure proposed utilizes a thin, continuous, isotropic dielectric film instead of an air gap as the medium separating the piezoelectric substrate and semiconductor. The effective permittivity function at the crystal surface, which contains all the necessary mechanical and electrical information about the structure, is derived to analyze the amplification coefficient. The results show that the amplification coefficient increases with film thickness. This is in contrast to the air gap separate piezoelectric/semiconductor configuration where the amplification coefficient decreases with increasing gap size. As a result, acoustoelectric devices, having the advantages of higher operational frequencies and better temperature stability characteristics of SSBW devices, might be realized.
Proceedings IMCS 2012, 2012
A need exists for compact sensor systems capable of in-situ monitoring of groundwater for fuel an... more A need exists for compact sensor systems capable of in-situ monitoring of groundwater for fuel and oil contamination. The work reported here addresses this need using shear horizontal surface acoustic wave (SH-SAW) sensors, which function effectively in the liquid phase. To achieve enhanced sensitivity and partial selectivity for hydrocarbons, the devices are coated with thin chemically sensitive polymer films. Various polymer materials are investigated with the goal of identifying a set of coatings suitable for a sensor array. The system is tested with compounds indicative of fuel and oil contamination, in particular, BTEX (benzene, toluene, ethylbenzene and xylenes), at relatively low concentrations. Of particular importance is benzene, a known carcinogen. Using responses of the SH-SAW sensor devices coated with three different polymer materials, benzene was quantified in the aqueous phase in the presence of other aromatic interferents. It is shown that various concentrations of BTEX in water can be identified and quantified by evaluation of both steady-state and transient response information.
IEEE Transactions on Sonics and Ultrasonics, 1982
An analytical solution describing the excitation and detection of both bulk and surface acoustic ... more An analytical solution describing the excitation and detection of both bulk and surface acoustic waves in piezoelectric media is presented. In particular, the theory is capable of treating those orientations in which propagating bulk and surface wave velocities are in close proximity. It is shown that under such conditions, the well-known parameter Au/v is no longer a valid measure of the coupling coefficient for the surface wave. Closed form expressions are derived for the transducer radiation resistance, surface potential, and insertion loss in terms of the transducer geometry and only four substrate parameters, the bulk wave cutoff velocity, the free and metallized surface SAW or pseudo SAW velocities and the off-resonance dielectric constant. The theory is extended to include the effect of an isotropic nonconductive layer over the transducer surface and comparison is made with experimental measurements on rotated Y-cut quartz. 0 The coupling parameter has found widespread acceptance because of its simple form and ease of experimental determination.
Proceedings of the 1998 IEEE International Frequency Control Symposium (Cat. No.98CH36165)
In this study, a series of new soluble dodecylsulfanylphthalocyanines are investigated as sensiti... more In this study, a series of new soluble dodecylsulfanylphthalocyanines are investigated as sensitive coatings for organic vapors by utilizing modified and conventional electrode quartz crystal resonators (QCR) based on changes in dielectric properties (electrical loading) and the well-known mass loading effect. These sensing properties were investigated by measuring both seriesand parallel-resonant frequencies (fs and fp). The results showed that the
Journal of Microelectromechanical Systems, 2015
To overcome the detrimental effects of liquid environments on MEMS resonator performance, the in-... more To overcome the detrimental effects of liquid environments on MEMS resonator performance, the in-fluid vibration of a novel disk resonator supported by two electrothermallydriven legs is investigated through analytical modeling and the effects of the system's geometric/material parameters on the dynamic response are explored. The "all-shear interaction device (ASID)" is based on engaging the surrounding fluid primarily through shearing action. The theory comprises a continuous-system, multi-modal model and a single-degree-offreedom model, the latter yielding simple formulas for the fundamental-mode resonant characteristics that often furnish excellent estimates to the results based on the more general model. Comparisons between theoretical predictions and previously published liquid-phase quality factor (Q) data (silicon devices in heptane) show that the theoretical results capture the observed trends and also give very good quantitative estimates, particularly for the highest-Q devices. Moreover, the highest Q value measured in the earlier study (304) corresponded to a specimen whose disk radius-to-thickness ratio was 2.5, a value that compares well with the optimal value of 2.3 predicted by the present model. The insight furnished by the proposed theory is expected to lead to further improvements in ASID design to achieve unprecedented levels of performance for a wide variety of liquid-phase resonator applications.
Proceedings of IEEE Sensors, 2010
To achieve higher quality factors (Q) for microcantilevers used in liquid-phase sensing applicati... more To achieve higher quality factors (Q) for microcantilevers used in liquid-phase sensing applications, recent studies have explored the use of the lateral (inplane) flexural mode. In particular, we have recently shown that this mode may be excited electrothermally using integrated heating resistors near the micro-cantilever support, and that the resulting increase in Q helps to make low-ppb limits of detection a possibility in liquids. However, because the use of electrothermally excited, liquid-phase, microcantilever-based sensors in lateral flexure is relatively new, theoretical models are lacking. Therefore, we present here a new analytical model for predicting the vibratory response of these devices. The model is also used to successfully confirm the validity of our previously derived Q formula, which was based on a single-degree-offreedom (SDOF) model and a harmonic tip force. Comparisons with experimental data show that the present model and, thus, the analytical formula provide excellent Q estimates for sufficiently thin beams vibrating laterally in water and reasonable upper-bound estimates for thicker beams.
Sensors and Actuators B: Chemical, 1996
A type of chemical sensor based on impedance spectroscopy (IS) measurements utilizing an interdig... more A type of chemical sensor based on impedance spectroscopy (IS) measurements utilizing an interdigital transducer structure on a glass substrate is investigated for the detection of organic solvent molecules, such as chloronated hydrocarbons, in the gas phase. The IDT structures were coated with sensitive materials such as soluble tetrakis-t-butyl phthalocyaninatonickel(il), ethylcellulose, poly(ethyl acrylate), and poly(etherurethane). The target organic solvent molecules are dichloromethane, chloroform, trichloroethene, tetrachloroethene, toluene, and ethanol. The sensor responses were monitored by measuring changes in the transducer/coating composite properties upon exposure to the organic solvent molecules. The sensor parameters of interest include the electrostatic capacitance, the resistance of the composite and the relaxation time, which will lead to the implementation of a multi-information sensor. Results are presented and compared for selected samples with completely reversible sensor signals at room temperature. Based on the measurements, use of metal complexes can improve sensitivity and increase the signal-to-noise ratio.
Sensors and Actuators A: Physical, 1994
... Sei Technol., 15(1978) 1836 1843. [2] PL Konash and GL Bastiaan, Piezoelectric crystals as de... more ... Sei Technol., 15(1978) 1836 1843. [2] PL Konash and GL Bastiaan, Piezoelectric crystals as detectors in liquid chromatography, Anal. ... Lett., 25 (1989) 1446 1447. [14] J. .Andle, J. Vetelino, R. Lec and D. McAllister, An acoustic plate mode immunosensor, Proc. ...
Journal of Applied Physics, 2012
Additional information on J. Appl. Phys.
Journal of Applied Physics, 2009
The equation governing the curvature of a viscoelastic microcantilever beam loaded with a uniform... more The equation governing the curvature of a viscoelastic microcantilever beam loaded with a uniform surface stress is derived. The present model is applicable to static-mode microcantilever sensors made with a rigid polymer, such as SU-8. An analytical solution to the differential equation governing the curvature is given for a specific surface stress representing adsorption of analyte onto the viscoelastic beam's surface. The solution for the bending of the microcantilever shows that, in many cases, the use of Stoney's equation to analyze stress-induced deflection of viscoelastic microcantilevers ͑in the present case due to surface analyte adsorption͒ can lead to poor predictions of the beam's response. It is shown that using a viscoelastic substrate can greatly increase sensitivity ͑due to a lower modulus͒, but at the cost of a longer response time due to viscoelastic creep in the microcantilever. In addition, the effects of a coating on the cantilever are considered. By defining effective moduli for the coated-beam case, the analytical solution for the uncoated case can still be used. It is found that, unlike the case of a silicon microcantilever, the stress in the coating due to bending of a polymer cantilever can be significant, especially for metal coatings. The theoretical results presented here can also be used to extract time-domain viscoelastic properties of the polymer material from beam response data.
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1995
Acoustic plate mode (APM) devices have recently been used as sensing elements, both for the physi... more Acoustic plate mode (APM) devices have recently been used as sensing elements, both for the physical measurement of fluid properties and in biosensor applications. One of the primary interaction mechanisms in these devices is mass loading caused by the added mass bound to the layered crystal surface. However, the material properties of these thin composite layers are not well characterized or known as is required in order to accurately predict the sensor response. In the present work, perturbation theory is used to derive expressions for the sensitivity of the APM sensors to mass loading and viscoelastic stiffening. Mass sensitivity experiment was conducted on ZX-LiNbO 3 in a liquid environment to accurately reflect the sensitivity of an actual biosensor and the results are compared to theory. The measured data show a f 2 dependence for the mass sensitivity for APMs on ZX-LiNbO3 in the measured frequency range, which indicates a SAW-like behavior. This behavior is due to the fact that the acoustic plate modes on ZX-LiNbO3 are pseudo-SAW (PSAW) derived, and the acoustic energy is confined to the sensing surface. As a result, the APMs on ZX-LiNbO3 are referred to as PSAW-APMs. Discussions are given in terms of the added mass which occurs in typical biosensor applications.
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1999
Using periodic gratings etched into the surface of a piezoelectric plate, surface acoustic waves ... more Using periodic gratings etched into the surface of a piezoelectric plate, surface acoustic waves (SAW) can be converted into bulk waves and vice versa with high efficiency. If parallel grating structures are fabricated on opposite surfaces of a piezoelectric plate, a SAW also can be directed from one surface to the other. Using such structures, acoustic wave-based sensors can be designed that utilize SAW for the detection of chemical analytes on an electrode-free surface, i.e., the back surface. As a result, spurious sensor response and electrode aging that may occur when a chemical analyte comes in contact with the transducers are minimized. The design principles of these grating-based SAW sensors are explained, and the mass sensitivity is investigated using chemical vapor deposited thin polymer films, a type of material used in many practical chemical sensor applications. Experimental results are presented for the detection of nitrogen dioxide (NO 2) in subppm concentrations.
IEEE Sensors Journal, 2009
Development of an electrode-modified thickness shear mode (TSM) quartz resonator that is responsi... more Development of an electrode-modified thickness shear mode (TSM) quartz resonator that is responsive to nanogram mass loadings, while exhibiting a mass sensitivity profile that is independent of material placement on the sensor platform, is the aim of this study. The resulting nanogram balance would greatly enhance the field of mass measurement and become useful in applications like droplet gravimetry, the study of non-volatile residue (NVR) contamination in solvents. A ring electrode design predicted by an analytical theory for sensitivity distribution to achieve the desired uniform mass sensitivity distribution is presented in this work. Using a microvalve capable of depositing nanogram droplets of a polymer solution, and a linear stepping stage for radial positioning of these droplets across the sensor platform, measurements of the mass sensitivity distributions were conducted and presented. The measurements agree well with theory. Further improvements are possible and are identified to achieve better uniformity and to reduce the instability of resonant frequency of these devices.
Journal of Microelectromechanical Systems, 2010
Thermally excited and piezoresistively detected bulkmicromachined cantilevers vibrating in their ... more Thermally excited and piezoresistively detected bulkmicromachined cantilevers vibrating in their in-plane flexural resonance mode are presented. By shearing the surrounding fluid rather than exerting normal stress on it, the in-plane mode cantilevers exhibit reduced added fluid mass effects and improved quality factors in a fluid environment. In this paper, different cantilever geometries with in-plane resonance frequencies from 50 kHz to 2.2 MHz have been tested, with quality factors as high as 4200 in air and 67 in water.
Journal of Microelectromechanical Systems, 2007
Electronics Letters, 1989
A theoretical and experimental study of an AT-cut quartz crystal resonator as a sensor for viscou... more A theoretical and experimental study of an AT-cut quartz crystal resonator as a sensor for viscous conductive liquids has been performed. A novel continuous-flow cell system and an 11 MHz quartz crystal were used for the experiments. Results are presented for aqueous dilute solutions of potassium chloride (KCl) and potassium nitrate (KNO3).
ABSTRACT The Allan variance is a well-known estimator of frequency stability and is often used to... more ABSTRACT The Allan variance is a well-known estimator of frequency stability and is often used to classify a time series into one of the standard clock noise types. By identifying the power-law model for clock noise with its long-memory equivalent, the Allan variance can also serve as an estimate for the long-memory parameter. Although the Allan variance is not a maximum likelihood estimator, it can be used with regression techniques that employ minimum variance estimates. This work describes the analytic basis for using the Allan variance to estimate the memory parameter, and performance of several Allan-variance-based estimators is illustrated via simulation study. Maximum likelihood estimation is also discussed, and the performance of maximum-likelihood estimators is contrasted with that of the Allan-variance-based estimators.
IEEE Transactions on Sonics and Ultrasonics, 1984
The effects of a fused silica layer on the velocity, operational frequency, and temperature stabi... more The effects of a fused silica layer on the velocity, operational frequency, and temperature stability of microwave acoustic devices on 90'-propagating rotated Y-cut quartz are investigated. The effective permittivity function at the layer-substrate interface, which contains atl the necessary mechanical and electrical information about the composite structure is derived to analyze the temperature dependence of the velocity, hence the temperature dependence of the center frequency of mter devices. The frequency-temperature characteristics WC) and the turnover temperature (temperature at which the slope of the FTC curve is zero) as a function of film thickness are presented for selected orientations supporting SH-type surface waves or Love waves. The turnover temperature has been found to increase with increasing fdm thickness. As a result, devices having temperature stability comparable to similar devices on ST-cut quartz can be realized. The composite structure device, while maintaining the advantages of higher operational frequencies of SSBW devices, also has a much lower insertion loss. Experimental results are presented on a selected orientation and are in good agreement with theory.
Proceedings of the 2002 IEEE International Frequency Control Symposium and PDA Exhibition (Cat. No.02CH37234)
... Boima Morray, Suiqiong Li, ' Jeanne Hossenlopp,2 Richard Cernosek,' and Fabien Joss... more ... Boima Morray, Suiqiong Li, ' Jeanne Hossenlopp,2 Richard Cernosek,' and Fabien Josse ... 72, pp. 4888-4898,2000. [4] F. Josse, F. Bender and RW Cernosek, “Guided SH-SAW sensors for chemical and bio-chemical detection in liquids,” Analytical Chemistry, vol. 73, pp. ...
The Journal of the Acoustical Society of America, 1985
A theory for the amplification of surface skimming SH waves, commonly known as surface skimming b... more A theory for the amplification of surface skimming SH waves, commonly known as surface skimming bulk waves (SSBW), in 90°‐propagating, rotated Y‐cut quartz is presented. In particular, the structure proposed utilizes a thin, continuous, isotropic dielectric film instead of an air gap as the medium separating the piezoelectric substrate and semiconductor. The effective permittivity function at the crystal surface, which contains all the necessary mechanical and electrical information about the structure, is derived to analyze the amplification coefficient. The results show that the amplification coefficient increases with film thickness. This is in contrast to the air gap separate piezoelectric/semiconductor configuration where the amplification coefficient decreases with increasing gap size. As a result, acoustoelectric devices, having the advantages of higher operational frequencies and better temperature stability characteristics of SSBW devices, might be realized.
Proceedings IMCS 2012, 2012
A need exists for compact sensor systems capable of in-situ monitoring of groundwater for fuel an... more A need exists for compact sensor systems capable of in-situ monitoring of groundwater for fuel and oil contamination. The work reported here addresses this need using shear horizontal surface acoustic wave (SH-SAW) sensors, which function effectively in the liquid phase. To achieve enhanced sensitivity and partial selectivity for hydrocarbons, the devices are coated with thin chemically sensitive polymer films. Various polymer materials are investigated with the goal of identifying a set of coatings suitable for a sensor array. The system is tested with compounds indicative of fuel and oil contamination, in particular, BTEX (benzene, toluene, ethylbenzene and xylenes), at relatively low concentrations. Of particular importance is benzene, a known carcinogen. Using responses of the SH-SAW sensor devices coated with three different polymer materials, benzene was quantified in the aqueous phase in the presence of other aromatic interferents. It is shown that various concentrations of BTEX in water can be identified and quantified by evaluation of both steady-state and transient response information.
IEEE Transactions on Sonics and Ultrasonics, 1982
An analytical solution describing the excitation and detection of both bulk and surface acoustic ... more An analytical solution describing the excitation and detection of both bulk and surface acoustic waves in piezoelectric media is presented. In particular, the theory is capable of treating those orientations in which propagating bulk and surface wave velocities are in close proximity. It is shown that under such conditions, the well-known parameter Au/v is no longer a valid measure of the coupling coefficient for the surface wave. Closed form expressions are derived for the transducer radiation resistance, surface potential, and insertion loss in terms of the transducer geometry and only four substrate parameters, the bulk wave cutoff velocity, the free and metallized surface SAW or pseudo SAW velocities and the off-resonance dielectric constant. The theory is extended to include the effect of an isotropic nonconductive layer over the transducer surface and comparison is made with experimental measurements on rotated Y-cut quartz. 0 The coupling parameter has found widespread acceptance because of its simple form and ease of experimental determination.
Proceedings of the 1998 IEEE International Frequency Control Symposium (Cat. No.98CH36165)
In this study, a series of new soluble dodecylsulfanylphthalocyanines are investigated as sensiti... more In this study, a series of new soluble dodecylsulfanylphthalocyanines are investigated as sensitive coatings for organic vapors by utilizing modified and conventional electrode quartz crystal resonators (QCR) based on changes in dielectric properties (electrical loading) and the well-known mass loading effect. These sensing properties were investigated by measuring both seriesand parallel-resonant frequencies (fs and fp). The results showed that the
Journal of Microelectromechanical Systems, 2015
To overcome the detrimental effects of liquid environments on MEMS resonator performance, the in-... more To overcome the detrimental effects of liquid environments on MEMS resonator performance, the in-fluid vibration of a novel disk resonator supported by two electrothermallydriven legs is investigated through analytical modeling and the effects of the system's geometric/material parameters on the dynamic response are explored. The "all-shear interaction device (ASID)" is based on engaging the surrounding fluid primarily through shearing action. The theory comprises a continuous-system, multi-modal model and a single-degree-offreedom model, the latter yielding simple formulas for the fundamental-mode resonant characteristics that often furnish excellent estimates to the results based on the more general model. Comparisons between theoretical predictions and previously published liquid-phase quality factor (Q) data (silicon devices in heptane) show that the theoretical results capture the observed trends and also give very good quantitative estimates, particularly for the highest-Q devices. Moreover, the highest Q value measured in the earlier study (304) corresponded to a specimen whose disk radius-to-thickness ratio was 2.5, a value that compares well with the optimal value of 2.3 predicted by the present model. The insight furnished by the proposed theory is expected to lead to further improvements in ASID design to achieve unprecedented levels of performance for a wide variety of liquid-phase resonator applications.
Proceedings of IEEE Sensors, 2010
To achieve higher quality factors (Q) for microcantilevers used in liquid-phase sensing applicati... more To achieve higher quality factors (Q) for microcantilevers used in liquid-phase sensing applications, recent studies have explored the use of the lateral (inplane) flexural mode. In particular, we have recently shown that this mode may be excited electrothermally using integrated heating resistors near the micro-cantilever support, and that the resulting increase in Q helps to make low-ppb limits of detection a possibility in liquids. However, because the use of electrothermally excited, liquid-phase, microcantilever-based sensors in lateral flexure is relatively new, theoretical models are lacking. Therefore, we present here a new analytical model for predicting the vibratory response of these devices. The model is also used to successfully confirm the validity of our previously derived Q formula, which was based on a single-degree-offreedom (SDOF) model and a harmonic tip force. Comparisons with experimental data show that the present model and, thus, the analytical formula provide excellent Q estimates for sufficiently thin beams vibrating laterally in water and reasonable upper-bound estimates for thicker beams.
Sensors and Actuators B: Chemical, 1996
A type of chemical sensor based on impedance spectroscopy (IS) measurements utilizing an interdig... more A type of chemical sensor based on impedance spectroscopy (IS) measurements utilizing an interdigital transducer structure on a glass substrate is investigated for the detection of organic solvent molecules, such as chloronated hydrocarbons, in the gas phase. The IDT structures were coated with sensitive materials such as soluble tetrakis-t-butyl phthalocyaninatonickel(il), ethylcellulose, poly(ethyl acrylate), and poly(etherurethane). The target organic solvent molecules are dichloromethane, chloroform, trichloroethene, tetrachloroethene, toluene, and ethanol. The sensor responses were monitored by measuring changes in the transducer/coating composite properties upon exposure to the organic solvent molecules. The sensor parameters of interest include the electrostatic capacitance, the resistance of the composite and the relaxation time, which will lead to the implementation of a multi-information sensor. Results are presented and compared for selected samples with completely reversible sensor signals at room temperature. Based on the measurements, use of metal complexes can improve sensitivity and increase the signal-to-noise ratio.
Sensors and Actuators A: Physical, 1994
... Sei Technol., 15(1978) 1836 1843. [2] PL Konash and GL Bastiaan, Piezoelectric crystals as de... more ... Sei Technol., 15(1978) 1836 1843. [2] PL Konash and GL Bastiaan, Piezoelectric crystals as detectors in liquid chromatography, Anal. ... Lett., 25 (1989) 1446 1447. [14] J. .Andle, J. Vetelino, R. Lec and D. McAllister, An acoustic plate mode immunosensor, Proc. ...
Journal of Applied Physics, 2012
Additional information on J. Appl. Phys.
Journal of Applied Physics, 2009
The equation governing the curvature of a viscoelastic microcantilever beam loaded with a uniform... more The equation governing the curvature of a viscoelastic microcantilever beam loaded with a uniform surface stress is derived. The present model is applicable to static-mode microcantilever sensors made with a rigid polymer, such as SU-8. An analytical solution to the differential equation governing the curvature is given for a specific surface stress representing adsorption of analyte onto the viscoelastic beam's surface. The solution for the bending of the microcantilever shows that, in many cases, the use of Stoney's equation to analyze stress-induced deflection of viscoelastic microcantilevers ͑in the present case due to surface analyte adsorption͒ can lead to poor predictions of the beam's response. It is shown that using a viscoelastic substrate can greatly increase sensitivity ͑due to a lower modulus͒, but at the cost of a longer response time due to viscoelastic creep in the microcantilever. In addition, the effects of a coating on the cantilever are considered. By defining effective moduli for the coated-beam case, the analytical solution for the uncoated case can still be used. It is found that, unlike the case of a silicon microcantilever, the stress in the coating due to bending of a polymer cantilever can be significant, especially for metal coatings. The theoretical results presented here can also be used to extract time-domain viscoelastic properties of the polymer material from beam response data.
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1995
Acoustic plate mode (APM) devices have recently been used as sensing elements, both for the physi... more Acoustic plate mode (APM) devices have recently been used as sensing elements, both for the physical measurement of fluid properties and in biosensor applications. One of the primary interaction mechanisms in these devices is mass loading caused by the added mass bound to the layered crystal surface. However, the material properties of these thin composite layers are not well characterized or known as is required in order to accurately predict the sensor response. In the present work, perturbation theory is used to derive expressions for the sensitivity of the APM sensors to mass loading and viscoelastic stiffening. Mass sensitivity experiment was conducted on ZX-LiNbO 3 in a liquid environment to accurately reflect the sensitivity of an actual biosensor and the results are compared to theory. The measured data show a f 2 dependence for the mass sensitivity for APMs on ZX-LiNbO3 in the measured frequency range, which indicates a SAW-like behavior. This behavior is due to the fact that the acoustic plate modes on ZX-LiNbO3 are pseudo-SAW (PSAW) derived, and the acoustic energy is confined to the sensing surface. As a result, the APMs on ZX-LiNbO3 are referred to as PSAW-APMs. Discussions are given in terms of the added mass which occurs in typical biosensor applications.
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1999
Using periodic gratings etched into the surface of a piezoelectric plate, surface acoustic waves ... more Using periodic gratings etched into the surface of a piezoelectric plate, surface acoustic waves (SAW) can be converted into bulk waves and vice versa with high efficiency. If parallel grating structures are fabricated on opposite surfaces of a piezoelectric plate, a SAW also can be directed from one surface to the other. Using such structures, acoustic wave-based sensors can be designed that utilize SAW for the detection of chemical analytes on an electrode-free surface, i.e., the back surface. As a result, spurious sensor response and electrode aging that may occur when a chemical analyte comes in contact with the transducers are minimized. The design principles of these grating-based SAW sensors are explained, and the mass sensitivity is investigated using chemical vapor deposited thin polymer films, a type of material used in many practical chemical sensor applications. Experimental results are presented for the detection of nitrogen dioxide (NO 2) in subppm concentrations.
IEEE Sensors Journal, 2009
Development of an electrode-modified thickness shear mode (TSM) quartz resonator that is responsi... more Development of an electrode-modified thickness shear mode (TSM) quartz resonator that is responsive to nanogram mass loadings, while exhibiting a mass sensitivity profile that is independent of material placement on the sensor platform, is the aim of this study. The resulting nanogram balance would greatly enhance the field of mass measurement and become useful in applications like droplet gravimetry, the study of non-volatile residue (NVR) contamination in solvents. A ring electrode design predicted by an analytical theory for sensitivity distribution to achieve the desired uniform mass sensitivity distribution is presented in this work. Using a microvalve capable of depositing nanogram droplets of a polymer solution, and a linear stepping stage for radial positioning of these droplets across the sensor platform, measurements of the mass sensitivity distributions were conducted and presented. The measurements agree well with theory. Further improvements are possible and are identified to achieve better uniformity and to reduce the instability of resonant frequency of these devices.
Journal of Microelectromechanical Systems, 2010
Thermally excited and piezoresistively detected bulkmicromachined cantilevers vibrating in their ... more Thermally excited and piezoresistively detected bulkmicromachined cantilevers vibrating in their in-plane flexural resonance mode are presented. By shearing the surrounding fluid rather than exerting normal stress on it, the in-plane mode cantilevers exhibit reduced added fluid mass effects and improved quality factors in a fluid environment. In this paper, different cantilever geometries with in-plane resonance frequencies from 50 kHz to 2.2 MHz have been tested, with quality factors as high as 4200 in air and 67 in water.
Journal of Microelectromechanical Systems, 2007
Electronics Letters, 1989
A theoretical and experimental study of an AT-cut quartz crystal resonator as a sensor for viscou... more A theoretical and experimental study of an AT-cut quartz crystal resonator as a sensor for viscous conductive liquids has been performed. A novel continuous-flow cell system and an 11 MHz quartz crystal were used for the experiments. Results are presented for aqueous dilute solutions of potassium chloride (KCl) and potassium nitrate (KNO3).
ABSTRACT The Allan variance is a well-known estimator of frequency stability and is often used to... more ABSTRACT The Allan variance is a well-known estimator of frequency stability and is often used to classify a time series into one of the standard clock noise types. By identifying the power-law model for clock noise with its long-memory equivalent, the Allan variance can also serve as an estimate for the long-memory parameter. Although the Allan variance is not a maximum likelihood estimator, it can be used with regression techniques that employ minimum variance estimates. This work describes the analytic basis for using the Allan variance to estimate the memory parameter, and performance of several Allan-variance-based estimators is illustrated via simulation study. Maximum likelihood estimation is also discussed, and the performance of maximum-likelihood estimators is contrasted with that of the Allan-variance-based estimators.