J. Dijon - Academia.edu (original) (raw)
Papers by J. Dijon
Proceedings of SPIE - The International Society for Optical Engineering
ABSTRACT
Proceedings of SPIE - The International Society for Optical Engineering
ABSTRACT
2011 IEEE International Interconnect Technology Conference, 2011
ABSTRACT This paper presents the integration of dense (2.5 1012 CNTs/cm2) Carbon Nanotubes in via... more ABSTRACT This paper presents the integration of dense (2.5 1012 CNTs/cm2) Carbon Nanotubes in via structures for future microelectronic interconnects generations. Process steps performed after CNT growth in vias are studied. Two different CNT encapsulation layers are evaluated (ALD Al2O3 and spin on resist). After polishing, well planarized CNTs vias structures are obtained in both cases. Post CMP clean is performed to improve CNT/top metal contact. Top metal realisation is on-going and electrical results will help to select which encapsulation is the best.
Proceedings of SPIE - The International Society for Optical Engineering
The possibilities of very high damage threshold optics at the Nd:YAG third harmonic are discussed... more The possibilities of very high damage threshold optics at the Nd:YAG third harmonic are discussed for Megajoule applications. Only two possibilities which are either electron beam oxides materials like Al2O3/SiO2 or IBS fluorides like YF3/LiF seem to be able to meet the specifications. Current state of the art of the two solutions is given as well as their possible improvements.
Proceedings of SPIE - The International Society for Optical Engineering
A study was performed to rank the influence of the parameters that can determine the resistance t... more A study was performed to rank the influence of the parameters that can determine the resistance to laser-induced damage of polished synthetic fused silica at 355 nm. These parameters include the type of fused silica, the polishing process, the cleaning method, ...
We developed a number of active devices for use in the regenerative amplifier, which is one of th... more We developed a number of active devices for use in the regenerative amplifier, which is one of the specific sub- assemblies of the preamplifying section in the french L.M.J. design. The first one is a modular-square-diode pumped laser head, which provides 0.65 Joules pumping energy at 800 nm into a 4 mm side Nd3+:phosphate glass, in the form of a close coupling-uniform-configuration. Our original side pumping scheme makes use of symmetric diode stacks and optimized rod holders with a thermal conductivity. Some heat is waste in the volume of glass, as a result of the pumping process, and it is efficiently--since very closely--removed by the latter holders. A (pi) /2 rotation of one pumping section with respect to the next one allows uniform pumping and thermal conduction together with birefringence reduction. No water is required. A complete 3D thermal model is developed, in order to describe temperature and stress distributions, inside the laser head and glass rod. Peak stress value...
2011 5th International IEEE/EMBS Conference on Neural Engineering, 2011
In order to assess the signal to noise ratio and spatial selectivity of nanostructured microelect... more In order to assess the signal to noise ratio and spatial selectivity of nanostructured microelectrodes, our consortium built an original assembly of surface macroelectrodes and deep microelectrode arrays. Acute and chronic assessments were achieved based on rodent and non human primate model. Eventually, we used this device to monitor by association of the surface and deep microelectrodes nominal behavior of the animals and induced epileptic seizure.
Microelectronic Engineering, 2011
Thanks to their outstanding electrical properties , carbon nanotubes (CNTs) are promising candida... more Thanks to their outstanding electrical properties , carbon nanotubes (CNTs) are promising candidate to replace Cu in advanced interconnects . In damascene based CNT via integration scheme, CNTs growth occurs on the whole surface of the wafers: in vias, but also on top surfaces . CNTs on top are subsequently removed by polishing. In this paper, an alternative integration scheme is proposed which avoids CNTs on top. Thanks to careful choice of top surface (TiN) and bottom electrode (doped silicon) materials, CNT growth occurs only in vias. Dense growth (6 Â 10 11 CNTs/cm 2 ) of small multi wall CNTs is achieved in vias over doped poly-silicon lines. Good encapsulation of CNTs is obtained with SAC-VD SiO 2 or ALD Al 2 O 3 materials. Thanks to polishing of emerging CNTs, planarized CNT vias are obtained. Initial electrical measurements by conductive AFM show the conductivity of these CNT vias.
Laser-Induced Damage in Optical Materials: 1998, 1999
ABSTRACT
Laser-Induced Damage in Optical Materials: 2000, 2001
ABSTRACT An international round robin study was conducted on the absorption measurement of laser-... more ABSTRACT An international round robin study was conducted on the absorption measurement of laser-quality coatings. Sets of optically coated samples were made by a reactive DC magnetron sputtering and an ion beam sputtering deposition process. The sample set included a high reflector at 514 nm and a high reflector for the near infrared (1030 to 1318 nm), single layers of silicon dioxide, tantalum pentoxide, and hafnium dioxide. For calibration purposes, a sample metalized with hafnium and an uncoated, superpolished fused silica substrate were also included. The set was sent to laboratory groups for absorptance measurement of these coatings. Whenever possible, each group was to measure a common, central area and another area specifically assigned to the respective group. Specific test protocols were also suggested in regards to the laser exposure time, power density, and surface preparation.
ABSTRACT The origin of optical damage in potassium titanyl phosphate (KTP) crystals has been vigo... more ABSTRACT The origin of optical damage in potassium titanyl phosphate (KTP) crystals has been vigorously investigated since its introduction as a nonlinear optical material in 1976. It is well known that this material exhibits a laser damage threshold that limits its use in many high average-power applications, especially frequency doubling of Nd-doped lasers. Both photochromic and electrochromic damage can be induced in KTP. Until recently, it was thought that these two types of damage were distinctly different, possibly involving different mechanisms; however, new data show that electrochromic-like damage can be induced in KTP by laser irradiation only, implying the existence of an internal electric field.We have recently observed bursts of light when heating KTP crystals at 0.1-1.0 K/s in the temperature range 8-675 K. The scintillations correspond to molecular nitrogen emission occurring during the electrical breakdown of air near the crystal surface, and imply the existence of pyroelectric fields in KTP exceeding 30 kV/cm. These fields wee induced by 10.6 micrometers laser irradiation. The observation of pyroelectric effects, heretofore not considered in KTP damage models, provides an important new insight into the possible cause of the recently observed 'electrochromic- like' photochromic damage in KTP.© (1997) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
ABSTRACT NASA's Goddard Space Flight Center is developing the Geoscience Laser Altimeter ... more ABSTRACT NASA's Goddard Space Flight Center is developing the Geoscience Laser Altimeter System (GLAS) employing a diode pumped, Q-switched, Nd:YAG laser operating at 40 Hz repetition rate. To meet the five-year mission lifetime goal, a single transmitter would accumulate over 6.3 billion shots. Cr4+:YAG is a promising candidate material for passively Q- switching the laser. Historically, the performance of saturable absorbers has degraded over long-duration usage. To measure the multi-billion shot performance of Cr4+:YAG, passively Q-switched GLAS-like oscillator was tested at an accelerated repetition rate of 500 Hz. The intracavity fluence was calculated to be approximately 2.5 J/cm2. The laser was monitored autonomously for 165 days. There was no evidence of change in the material optical properties during the 7.2 billion shot test. All observed changes in laser operation could be attributed to pump laser diode aging. This is the first demonstration of multi-billion shot exposure testing of Cr4+:YAG in this pulse energy regime.© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
MRS Proceedings, 1994
ABSTRACT
Laser-Induced Damage in Optical Materials: 1998, 1999
ABSTRACT
Proceedings of SPIE - The International Society for Optical Engineering
ABSTRACT
Proceedings of SPIE - The International Society for Optical Engineering
ABSTRACT
2011 IEEE International Interconnect Technology Conference, 2011
ABSTRACT This paper presents the integration of dense (2.5 1012 CNTs/cm2) Carbon Nanotubes in via... more ABSTRACT This paper presents the integration of dense (2.5 1012 CNTs/cm2) Carbon Nanotubes in via structures for future microelectronic interconnects generations. Process steps performed after CNT growth in vias are studied. Two different CNT encapsulation layers are evaluated (ALD Al2O3 and spin on resist). After polishing, well planarized CNTs vias structures are obtained in both cases. Post CMP clean is performed to improve CNT/top metal contact. Top metal realisation is on-going and electrical results will help to select which encapsulation is the best.
Proceedings of SPIE - The International Society for Optical Engineering
The possibilities of very high damage threshold optics at the Nd:YAG third harmonic are discussed... more The possibilities of very high damage threshold optics at the Nd:YAG third harmonic are discussed for Megajoule applications. Only two possibilities which are either electron beam oxides materials like Al2O3/SiO2 or IBS fluorides like YF3/LiF seem to be able to meet the specifications. Current state of the art of the two solutions is given as well as their possible improvements.
Proceedings of SPIE - The International Society for Optical Engineering
A study was performed to rank the influence of the parameters that can determine the resistance t... more A study was performed to rank the influence of the parameters that can determine the resistance to laser-induced damage of polished synthetic fused silica at 355 nm. These parameters include the type of fused silica, the polishing process, the cleaning method, ...
We developed a number of active devices for use in the regenerative amplifier, which is one of th... more We developed a number of active devices for use in the regenerative amplifier, which is one of the specific sub- assemblies of the preamplifying section in the french L.M.J. design. The first one is a modular-square-diode pumped laser head, which provides 0.65 Joules pumping energy at 800 nm into a 4 mm side Nd3+:phosphate glass, in the form of a close coupling-uniform-configuration. Our original side pumping scheme makes use of symmetric diode stacks and optimized rod holders with a thermal conductivity. Some heat is waste in the volume of glass, as a result of the pumping process, and it is efficiently--since very closely--removed by the latter holders. A (pi) /2 rotation of one pumping section with respect to the next one allows uniform pumping and thermal conduction together with birefringence reduction. No water is required. A complete 3D thermal model is developed, in order to describe temperature and stress distributions, inside the laser head and glass rod. Peak stress value...
2011 5th International IEEE/EMBS Conference on Neural Engineering, 2011
In order to assess the signal to noise ratio and spatial selectivity of nanostructured microelect... more In order to assess the signal to noise ratio and spatial selectivity of nanostructured microelectrodes, our consortium built an original assembly of surface macroelectrodes and deep microelectrode arrays. Acute and chronic assessments were achieved based on rodent and non human primate model. Eventually, we used this device to monitor by association of the surface and deep microelectrodes nominal behavior of the animals and induced epileptic seizure.
Microelectronic Engineering, 2011
Thanks to their outstanding electrical properties , carbon nanotubes (CNTs) are promising candida... more Thanks to their outstanding electrical properties , carbon nanotubes (CNTs) are promising candidate to replace Cu in advanced interconnects . In damascene based CNT via integration scheme, CNTs growth occurs on the whole surface of the wafers: in vias, but also on top surfaces . CNTs on top are subsequently removed by polishing. In this paper, an alternative integration scheme is proposed which avoids CNTs on top. Thanks to careful choice of top surface (TiN) and bottom electrode (doped silicon) materials, CNT growth occurs only in vias. Dense growth (6 Â 10 11 CNTs/cm 2 ) of small multi wall CNTs is achieved in vias over doped poly-silicon lines. Good encapsulation of CNTs is obtained with SAC-VD SiO 2 or ALD Al 2 O 3 materials. Thanks to polishing of emerging CNTs, planarized CNT vias are obtained. Initial electrical measurements by conductive AFM show the conductivity of these CNT vias.
Laser-Induced Damage in Optical Materials: 1998, 1999
ABSTRACT
Laser-Induced Damage in Optical Materials: 2000, 2001
ABSTRACT An international round robin study was conducted on the absorption measurement of laser-... more ABSTRACT An international round robin study was conducted on the absorption measurement of laser-quality coatings. Sets of optically coated samples were made by a reactive DC magnetron sputtering and an ion beam sputtering deposition process. The sample set included a high reflector at 514 nm and a high reflector for the near infrared (1030 to 1318 nm), single layers of silicon dioxide, tantalum pentoxide, and hafnium dioxide. For calibration purposes, a sample metalized with hafnium and an uncoated, superpolished fused silica substrate were also included. The set was sent to laboratory groups for absorptance measurement of these coatings. Whenever possible, each group was to measure a common, central area and another area specifically assigned to the respective group. Specific test protocols were also suggested in regards to the laser exposure time, power density, and surface preparation.
ABSTRACT The origin of optical damage in potassium titanyl phosphate (KTP) crystals has been vigo... more ABSTRACT The origin of optical damage in potassium titanyl phosphate (KTP) crystals has been vigorously investigated since its introduction as a nonlinear optical material in 1976. It is well known that this material exhibits a laser damage threshold that limits its use in many high average-power applications, especially frequency doubling of Nd-doped lasers. Both photochromic and electrochromic damage can be induced in KTP. Until recently, it was thought that these two types of damage were distinctly different, possibly involving different mechanisms; however, new data show that electrochromic-like damage can be induced in KTP by laser irradiation only, implying the existence of an internal electric field.We have recently observed bursts of light when heating KTP crystals at 0.1-1.0 K/s in the temperature range 8-675 K. The scintillations correspond to molecular nitrogen emission occurring during the electrical breakdown of air near the crystal surface, and imply the existence of pyroelectric fields in KTP exceeding 30 kV/cm. These fields wee induced by 10.6 micrometers laser irradiation. The observation of pyroelectric effects, heretofore not considered in KTP damage models, provides an important new insight into the possible cause of the recently observed 'electrochromic- like' photochromic damage in KTP.© (1997) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
ABSTRACT NASA's Goddard Space Flight Center is developing the Geoscience Laser Altimeter ... more ABSTRACT NASA's Goddard Space Flight Center is developing the Geoscience Laser Altimeter System (GLAS) employing a diode pumped, Q-switched, Nd:YAG laser operating at 40 Hz repetition rate. To meet the five-year mission lifetime goal, a single transmitter would accumulate over 6.3 billion shots. Cr4+:YAG is a promising candidate material for passively Q- switching the laser. Historically, the performance of saturable absorbers has degraded over long-duration usage. To measure the multi-billion shot performance of Cr4+:YAG, passively Q-switched GLAS-like oscillator was tested at an accelerated repetition rate of 500 Hz. The intracavity fluence was calculated to be approximately 2.5 J/cm2. The laser was monitored autonomously for 165 days. There was no evidence of change in the material optical properties during the 7.2 billion shot test. All observed changes in laser operation could be attributed to pump laser diode aging. This is the first demonstration of multi-billion shot exposure testing of Cr4+:YAG in this pulse energy regime.© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
MRS Proceedings, 1994
ABSTRACT
Laser-Induced Damage in Optical Materials: 1998, 1999
ABSTRACT