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Papers by Jacqueline Hines

OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information), Apr 14, 2020

$Research paper thumbnail of A new method for broadband surface acoustic wave diffraction analysis$

A device has been developed that can be used for the real-time monitoring of ultrathin (2 or more... more A device has been developed that can be used for the real-time monitoring of ultrathin (2 or more) conductive films. The device responds in less than two microseconds, and can be used to monitor film depositions up to about 60 thick. Actual thickness monitoring capability will vary based on properties of the film being deposited. This is a single-use device, which, due to the very low device cost, can be disposable. Conventional quartz/crystal microbalance devices have proven inadequate to monitor the thickness of Pd films during deposition of ultrathin films for hydrogen sensor devices. When the deposited film is less than 100 , the QCM measurements are inadequate to allow monitoring of the ultrathin films being developed. Thus, an improved, high-sensitivity, real-time deposition monitor was needed to continue Pd film deposition development. The new deposition monitor utilizes a surface acoustic wave (SAW) device in a differential delay-line configuration to produce both a referenc...

CANEUS Fly by Wireless Workshop 2010, 2010

ASR&D has developed a patented surface acoustic wave (SAW) temperature sensor with individual... more ASR&D has developed a patented surface acoustic wave (SAW) temperature sensor with individual sensor identification codes and design-controlled temperature sensitivity. Temperature sensitivities demonstrated during this work range from -165ppm/°C to +680 ppm/°C, all on YZ lithium niobate, a piezoelectric substrate with an inherent temperature sensitivity of magnitude 94ppm/°C. A set of 32 individually identifiable coded SAW temperature sensor devices were developed. Wireless measurements confirmed the ability to selectively detect any single sensor out of the combined response of multiple sensors. The wireless electronic reader system currently being developed at ASR&D is a single-channel reader that can be manually adjusted to select any one sensor out of a group of up to 32 sensors simultaneously operating in the field of view (FOV) of the reader. This system avoids code collision problems typical of prior coded SAW wireless sensor systems, and can be extended to read 32 or more sensors operating in the FOV of one reader, at ranges of up to 100 feet, with sampling times of 1-10 msec.

2011 4th Annual Caneus Fly by Wireless Workshop, 2011

During the past several years, work has been ongoing at corporate, goverment laboratory, and univ... more During the past several years, work has been ongoing at corporate, goverment laboratory, and university research group to develop passive wireless surface acoustic wave (SAW) sensors and sensor-tags. These efforts have led to SAW sensors that operate wirelessly in enviroments coosiderably more extreme than those in which silicon-based sensors can operate. Advances have also been made in sensor coding, allowing production of small sets of sensors that can be individually read. The use of SAW devices as wireless interfaces to external impedance varying and voltage producing sensors and devices has also been demonstrated. This article provides a brief overview of recent advances made in this technology by several companies.

ACS applied materials & interfaces, Jan 18, 2015

Palladium (Pd) nanoparticles (5-20 nm) are used as the sensing layer on surface acoustic wave (SA... more Palladium (Pd) nanoparticles (5-20 nm) are used as the sensing layer on surface acoustic wave (SAW) devices for detecting H2. The interaction with hydrogen modifies the conductivity of the Pd nanoparticle film, producing measurable changes in acoustic wave propagation, which allows for the detection of this explosive gas. The nanoparticle-based SAW sensor responds rapidly and reversibly at room temperature.

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1995

Page 1. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, VOL. 42, NO. 3, ... more Page 1. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, VOL. 42, NO. 3, MAY 1995 397 Deposition Parameter Studies and Surface Acoustic Wave Characterization of PECVD Silicon Nitride Films on Lithium Niobate ...

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2006

Surface acoustic wave (SAW)-based sensors can offer wireless, passive operation in numerous envir... more Surface acoustic wave (SAW)-based sensors can offer wireless, passive operation in numerous environments, and various device embodiments are used for retrieval of the sensed data information. Single sensor systems typically can use a single carrier frequency and a simple device embodiment because tagging is not required. In a multisensor environment, it is necessary to both identify the sensor and retrieve the sensed information. This paper presents the concept of orthogonal frequency coding (OFC) for applications to SAW sensor technology. The OFC offers all advantages inherent to spread spectrum communications, including enhanced processing gain and lower interrogation power spectral density (PSD). It is shown that the time ambiguity in the OFC compressed pulse is significantly reduced as compared with a single frequency tag having the same code length, and additional coding can be added using a pseudo-noise (PN) sequence. The OFC approach is general and should be applicable to many differing SAW sensors for temperature, pressure, liquid, gases, etc. Device embodiments are shown, and a potential transceiver is described. Measured device results are presented and compared with coupling of modes (COM) model predictions to demonstrate performance. Devices then are used in computer simulations of the proposed transceiver design, and the results of an OFC sensor system are discussed.

ACS Applied Materials & Interfaces, 2011

A simple and straightforward method of depositing nanostructured thin films, based on LiCl-doped ... more A simple and straightforward method of depositing nanostructured thin films, based on LiCl-doped TiO 2 , on glass and LiNbO 3 sensor substrates is demonstrated. A spin-coating technique is employed to transfer a polymer-assisted precursor solution onto substrate surfaces, followed by annealing at 520°C to remove organic components and drive nanostructure formation. The sensor material obtained consists of coin-shaped nanoparticles several hundred nanometers in diameter and less than 50 nm thick. The average thickness of the film was estimated by atomic force microscopy (AFM) to be 140 nm. Humidity sensing properties of the nanostructured material and sensor response times were studied using conductometric and surface acoustic wave (SAW) sensor techniques, revealing reversible signals with good reproducibility and fast response times of about 0.75 s. The applicability of this nanostructured film for construction of rapid humidity sensors was demonstrated. Compared with known complex and expensive methods of synthesizing sophisticated nanostructures for sensor applications, such as physical vapor deposition (PVD) and chemical vapor deposition (CVD), this work presents a relatively simple and inexpensive technique to produce SAW humidity sensor devices with competitive performance characteristics.