James Biegen - Academia.edu (original) (raw)
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Papers by James Biegen
Optical Engineering, 2016
Optical Measurement Systems for Industrial Inspection IX, 2015
We propose a new type of interference objective that makes use of two partially-reflective beamsp... more We propose a new type of interference objective that makes use of two partially-reflective beamsplitter plates arranged coaxially with the objective lens system, in an assembly that is better suited to large fields of view than the traditional Michelson design. The coaxial plates are slightly tilted to direct unwanted reflections outside of the imaging pupil aperture, providing high fringe contrast with spectrally-broadband, spatially extended white light illumination. Examples include a turret-mountable 1.4 magnification objective parfocal with high-magnification objectives up to 100, and a dovetail mount 0.5 objective with a 3434mm field for wide-field measurements of surface form.
We propose a new type of interference objective that makes use of two partially-reflective beamsp... more We propose a new type of interference objective that makes use of two partially-reflective beamsplitter plates arranged coaxially with the objective lens system, in an assembly that is better suited to large fields of view than the traditional Michelson design. The coaxial plates are slightly tilted to direct unwanted reflections outside of the imaging pupil aperture, providing high fringe contrast with spectrally-broadband, spatially extended white light illumination. Examples include a turret-mountable 1.4 magnification objective parfocal with high-magnification objectives up to 100, and a dovetail mount 0.5 objective with a 3434mm field for wide-field measurements of surface form.
Optics Letters, 1994
Light reflected by a nondielectric material experiences a phase change on reflection that differs... more Light reflected by a nondielectric material experiences a phase change on reflection that differs from light reflected by a dielectric material and other nondielectric materials. The complex degree of coherence for small optical path differences is derived for two-beam interference when the illumination source is extended, incoherent, and quasi-monochromatic. An analysis of the two-beam interference pattern reveals a simple relationship between the phase of the interference pattern at the point of maximum fringe visibility and the material-dependent phase change on reflection.
Analytical Chemistry, 1990
... Christopher P. Smith, Heidi L. Kennedy, Harlan J. Kragt, and Henry S. White* Department of Ch... more ... Christopher P. Smith, Heidi L. Kennedy, Harlan J. Kragt, and Henry S. White* Department of Chemical Engineering and Material Science, University of ... The photoresist was exposed through a photolithographic mask to a Hg arc lamp (320 nm) for 10 s using a Karl Suss MJB3 ...
Applied Optics, 2002
We describe an instrument for the measurement of surface flatness, parallelism, and size ͑thickne... more We describe an instrument for the measurement of surface flatness, parallelism, and size ͑thickness͒ of plane-parallel parts in a single measurement to 1 gauge capability of 0.02, 0.03, and 0.06 m, respectively. A low-coherence IR profiler viewing both sides of the part simultaneously, believed to be novel, accommodates a wide variety of industrial surface finishes, including machined, ground, or lapped parts, with a 75-mm field of view and 15,000 pixels per side. A heterodyne laser displacement gauge together with an integrated zeroing system allows for a range of part sizes from 0 to 100 mm.
Optics Letters, 1996
Traditional optical f lying-height testers use only the normal-incidence ref lectivity of the int... more Traditional optical f lying-height testers use only the normal-incidence ref lectivity of the interface between the read -write slider and a glass disk surrogate. We propose a tester that fully analyzes the complex amplitude ref lectivity of the interface, including the polarization-dependent complex phase. The new approach is more accurate and repeatable and has no loss of precision at zero f lying height. Further, the same instrument directly measures the complex index of refraction for the slider material in situ, obviating the need for a separate metrology step with an ellipsometer.
Optical Engineering, 2016
Optical Measurement Systems for Industrial Inspection IX, 2015
We propose a new type of interference objective that makes use of two partially-reflective beamsp... more We propose a new type of interference objective that makes use of two partially-reflective beamsplitter plates arranged coaxially with the objective lens system, in an assembly that is better suited to large fields of view than the traditional Michelson design. The coaxial plates are slightly tilted to direct unwanted reflections outside of the imaging pupil aperture, providing high fringe contrast with spectrally-broadband, spatially extended white light illumination. Examples include a turret-mountable 1.4 magnification objective parfocal with high-magnification objectives up to 100, and a dovetail mount 0.5 objective with a 3434mm field for wide-field measurements of surface form.
We propose a new type of interference objective that makes use of two partially-reflective beamsp... more We propose a new type of interference objective that makes use of two partially-reflective beamsplitter plates arranged coaxially with the objective lens system, in an assembly that is better suited to large fields of view than the traditional Michelson design. The coaxial plates are slightly tilted to direct unwanted reflections outside of the imaging pupil aperture, providing high fringe contrast with spectrally-broadband, spatially extended white light illumination. Examples include a turret-mountable 1.4 magnification objective parfocal with high-magnification objectives up to 100, and a dovetail mount 0.5 objective with a 3434mm field for wide-field measurements of surface form.
Optics Letters, 1994
Light reflected by a nondielectric material experiences a phase change on reflection that differs... more Light reflected by a nondielectric material experiences a phase change on reflection that differs from light reflected by a dielectric material and other nondielectric materials. The complex degree of coherence for small optical path differences is derived for two-beam interference when the illumination source is extended, incoherent, and quasi-monochromatic. An analysis of the two-beam interference pattern reveals a simple relationship between the phase of the interference pattern at the point of maximum fringe visibility and the material-dependent phase change on reflection.
Analytical Chemistry, 1990
... Christopher P. Smith, Heidi L. Kennedy, Harlan J. Kragt, and Henry S. White* Department of Ch... more ... Christopher P. Smith, Heidi L. Kennedy, Harlan J. Kragt, and Henry S. White* Department of Chemical Engineering and Material Science, University of ... The photoresist was exposed through a photolithographic mask to a Hg arc lamp (320 nm) for 10 s using a Karl Suss MJB3 ...
Applied Optics, 2002
We describe an instrument for the measurement of surface flatness, parallelism, and size ͑thickne... more We describe an instrument for the measurement of surface flatness, parallelism, and size ͑thickness͒ of plane-parallel parts in a single measurement to 1 gauge capability of 0.02, 0.03, and 0.06 m, respectively. A low-coherence IR profiler viewing both sides of the part simultaneously, believed to be novel, accommodates a wide variety of industrial surface finishes, including machined, ground, or lapped parts, with a 75-mm field of view and 15,000 pixels per side. A heterodyne laser displacement gauge together with an integrated zeroing system allows for a range of part sizes from 0 to 100 mm.
Optics Letters, 1996
Traditional optical f lying-height testers use only the normal-incidence ref lectivity of the int... more Traditional optical f lying-height testers use only the normal-incidence ref lectivity of the interface between the read -write slider and a glass disk surrogate. We propose a tester that fully analyzes the complex amplitude ref lectivity of the interface, including the polarization-dependent complex phase. The new approach is more accurate and repeatable and has no loss of precision at zero f lying height. Further, the same instrument directly measures the complex index of refraction for the slider material in situ, obviating the need for a separate metrology step with an ellipsometer.