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An experimental and theoretical investigation of low Reynolds number, high subsonic Mach number, ... more An experimental and theoretical investigation of low Reynolds number, high subsonic Mach number, compressible gas flow in channels is presented. Nitrogen, helium, and argon gases were used. The channels were microfabricated on silicon wafers and were typically 100 μm wide, 104 μm long, and ranged in depth from 0.5 to 20 μm. The Knudsen number ranged from 10-3 to 0.4. The measured friction factor was in good agreement with theoretical predictions assuming isothermal, locally fully developed, first-order, slip flow. Disciplines Engineering | Mechanical Engineering Comments Suggested Citation: Harley, John C., Yufend Huang, Haim H. Bau and Jay N. Zemel. (1994) Gas flow in micro-channels. Journal of Fluid Mechanics. Vol 284. p. 257-274. Copyright 1994 Cambridge University Press. http://dx.doi.org/10.1017/S0022112095000358 This journal article is available at ScholarlyCommons: http://repository.upenn.edu/meam_papers/196 J. Fluid Mech. (1995), vol. 284, pp. 251-274 Copyright
Thin Solid Films, 1978
ABSTRACT
Our project is part of an effort to network an array of sensors to monitor the flow distribution ... more Our project is part of an effort to network an array of sensors to monitor the flow distribution in a duct. It involves the fusion of several powerful software-based information extraction instruments (nodes) with a set of pyroelectric sensors. The pyroelectric anemometer sensors function by responding to local changes in the flow of gas. The program, which will be later installed into the microcontroller to carry out the computations for the system is referred to as the lock-in amplifier. Our project specifically focuses on the development of the lock-in amplifier for one of these independent nodes.
Handbook of Chemical and Biological Sensors, 1996
Sensors and Actuators A: Physical, 1989
Sensors and Actuators A: Physical, 1989
Handbook of Chemical and Biological Sensors, 1996
Sensors and Actuators A: Physical, 1989
Handbook of Chemical and Biological Sensors, 1996
Sensors and Actuators A: Physical, 1989
An experimental and theoretical investigation of low Reynolds number, high subsonic Mach number, ... more An experimental and theoretical investigation of low Reynolds number, high subsonic Mach number, compressible gas flow in channels is presented. Nitrogen, helium, and argon gases were used. The channels were microfabricated on silicon wafers and were typically 100 μm wide, 104 μm long, and ranged in depth from 0.5 to 20 μm. The Knudsen number ranged from 10-3 to 0.4. The measured friction factor was in good agreement with theoretical predictions assuming isothermal, locally fully developed, first-order, slip flow. Disciplines Engineering | Mechanical Engineering Comments Suggested Citation: Harley, John C., Yufend Huang, Haim H. Bau and Jay N. Zemel. (1994) Gas flow in micro-channels. Journal of Fluid Mechanics. Vol 284. p. 257-274. Copyright 1994 Cambridge University Press. http://dx.doi.org/10.1017/S0022112095000358 This journal article is available at ScholarlyCommons: http://repository.upenn.edu/meam_papers/196 J. Fluid Mech. (1995), vol. 284, pp. 251-274 Copyright
Thin Solid Films, 1978
ABSTRACT
Our project is part of an effort to network an array of sensors to monitor the flow distribution ... more Our project is part of an effort to network an array of sensors to monitor the flow distribution in a duct. It involves the fusion of several powerful software-based information extraction instruments (nodes) with a set of pyroelectric sensors. The pyroelectric anemometer sensors function by responding to local changes in the flow of gas. The program, which will be later installed into the microcontroller to carry out the computations for the system is referred to as the lock-in amplifier. Our project specifically focuses on the development of the lock-in amplifier for one of these independent nodes.
Handbook of Chemical and Biological Sensors, 1996
Sensors and Actuators A: Physical, 1989
Sensors and Actuators A: Physical, 1989
Handbook of Chemical and Biological Sensors, 1996
Sensors and Actuators A: Physical, 1989
Handbook of Chemical and Biological Sensors, 1996
Sensors and Actuators A: Physical, 1989