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Papers by M. Liehr

Research paper thumbnail of IDENTIFYING THE MECHANISM OF STRESS-ASSISTED VOID GROWTH IN THROUGH SILICON VIA (TSV) BY X-RAY MICROSCOPY AND FINITE ELEMENT MODELING

Research paper thumbnail of Visualizing and identifying the mechanism of stress-assisted void growth in through silicon vias (TSV) by X-ray microscopy and finite element modeling

Research paper thumbnail of Electrical properties of vacuum annealed Si surfaces

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1987

ABSTRACT

Research paper thumbnail of Chemical reactions at Pt/oxide/Si and Ti/oxide/Si interfaces

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1985

ABSTRACT

Research paper thumbnail of Kinetics of high-temperature thermal decomposition of SiO2 on Si(100)

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1987

Research paper thumbnail of Schottky barrier heights of epitaxial Ni–silicides on Si(111)

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1986

ABSTRACT

Research paper thumbnail of Applying x-ray microscopy and finite element modeling to identify the mechanism of stress-assisted void growth in through-silicon vias

Journal of Applied Physics, 2011

... Visualization of extrusion and voids induced in copper-filled through-silicon vias (TSVs) at ... more ... Visualization of extrusion and voids induced in copper-filled through-silicon vias (TSVs) at various temperatures using x-ray microscopy,” J ... C. Okoro, G. Eneman, M. Gonzalez, B. Vandevelde, B. Swinnen, B. Stoukatch, P. Verheyen, E. Beyne, and D. Vandepitte, Electronic ...

Research paper thumbnail of High Resolution DC MCG Measurements of U Wave Activity in Healthy Volunteers

Biomedizinische Technik/Biomedical Engineering, 2000

Research paper thumbnail of High Frequency Intra-QRS Signals in Idiopathic Dilated Cardiomyopathy / Hochfrequente Intra-QRS-Signale bei idiopathischer dilatativer Kardiomyopathie

Biomedizinische Technik/Biomedical Engineering, 2000

Research paper thumbnail of Veränderte Interaktion von Blutdruck und Herzfrequenz bei idiopathischer dilatativer Kardiomyopathie. Pattern Analysis of Blood Pressure and Heart Rate in Idiopathic Dilated Cardiomyopathy

Biomedizinische Technik/Biomedical Engineering, 2000

Research paper thumbnail of Hydrocarbon reaction with HF-cleaned Si(100) and effects on metal-oxide-semiconductor device quality

Applied Physics Letters, 1991

Integrated processing of wafers and use of chemical passivation layers illustrate two approaches ... more Integrated processing of wafers and use of chemical passivation layers illustrate two approaches to control of reactive contaminants in future semiconductor manufac-turing. Even in an integrated-processing sequence, an im-perfect processing ambient would necessitate ...

Research paper thumbnail of Low pressure chemical vapor deposition of oxide from SiH4/O2: Chemistry and effects on electrical properties

Applied Physics Letters, 1992

ABSTRACT

Research paper thumbnail of COMPARATIVE-STUDY OF NB AND TIW BARRIER LAYERS BETWEEN AU AND A-SIO2

The performance ofTi.3W.7 and Nb thin films as diffusion barriers for Au was investigated by Ruth... more The performance ofTi.3W.7 and Nb thin films as diffusion barriers for Au was investigated by Rutherford backscattering spectrometry (RBS) and Auger electron spectroscopy (AES). The films were sputter deposited in Ar:N2 (70:30 vol%) or pure Ar on amorphous Si02. They were annealed in air at temperatures ranging from 250·C up to 750·C for several hours. In-depth profiles revealed an onset of oxidation of the barriers at 520·C for Nb and 600·C for TiW. Barrier oxidation and extensive diffusion could be correlated. Distinct diffusion behavior as a function of temperature was established between TiW and Nb. A Nb multilayer structure was found to provide the best reliability as the barrier and as the adhesion layer.

Research paper thumbnail of IDENTIFYING THE MECHANISM OF STRESS-ASSISTED VOID GROWTH IN THROUGH SILICON VIA (TSV) BY X-RAY MICROSCOPY AND FINITE ELEMENT MODELING

Research paper thumbnail of Visualizing and identifying the mechanism of stress-assisted void growth in through silicon vias (TSV) by X-ray microscopy and finite element modeling

Research paper thumbnail of Electrical properties of vacuum annealed Si surfaces

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1987

ABSTRACT

Research paper thumbnail of Chemical reactions at Pt/oxide/Si and Ti/oxide/Si interfaces

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1985

ABSTRACT

Research paper thumbnail of Kinetics of high-temperature thermal decomposition of SiO2 on Si(100)

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1987

Research paper thumbnail of Schottky barrier heights of epitaxial Ni–silicides on Si(111)

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1986

ABSTRACT

Research paper thumbnail of Applying x-ray microscopy and finite element modeling to identify the mechanism of stress-assisted void growth in through-silicon vias

Journal of Applied Physics, 2011

... Visualization of extrusion and voids induced in copper-filled through-silicon vias (TSVs) at ... more ... Visualization of extrusion and voids induced in copper-filled through-silicon vias (TSVs) at various temperatures using x-ray microscopy,” J ... C. Okoro, G. Eneman, M. Gonzalez, B. Vandevelde, B. Swinnen, B. Stoukatch, P. Verheyen, E. Beyne, and D. Vandepitte, Electronic ...

Research paper thumbnail of High Resolution DC MCG Measurements of U Wave Activity in Healthy Volunteers

Biomedizinische Technik/Biomedical Engineering, 2000

Research paper thumbnail of High Frequency Intra-QRS Signals in Idiopathic Dilated Cardiomyopathy / Hochfrequente Intra-QRS-Signale bei idiopathischer dilatativer Kardiomyopathie

Biomedizinische Technik/Biomedical Engineering, 2000

Research paper thumbnail of Veränderte Interaktion von Blutdruck und Herzfrequenz bei idiopathischer dilatativer Kardiomyopathie. Pattern Analysis of Blood Pressure and Heart Rate in Idiopathic Dilated Cardiomyopathy

Biomedizinische Technik/Biomedical Engineering, 2000

Research paper thumbnail of Hydrocarbon reaction with HF-cleaned Si(100) and effects on metal-oxide-semiconductor device quality

Applied Physics Letters, 1991

Integrated processing of wafers and use of chemical passivation layers illustrate two approaches ... more Integrated processing of wafers and use of chemical passivation layers illustrate two approaches to control of reactive contaminants in future semiconductor manufac-turing. Even in an integrated-processing sequence, an im-perfect processing ambient would necessitate ...

Research paper thumbnail of Low pressure chemical vapor deposition of oxide from SiH4/O2: Chemistry and effects on electrical properties

Applied Physics Letters, 1992

ABSTRACT

Research paper thumbnail of COMPARATIVE-STUDY OF NB AND TIW BARRIER LAYERS BETWEEN AU AND A-SIO2

The performance ofTi.3W.7 and Nb thin films as diffusion barriers for Au was investigated by Ruth... more The performance ofTi.3W.7 and Nb thin films as diffusion barriers for Au was investigated by Rutherford backscattering spectrometry (RBS) and Auger electron spectroscopy (AES). The films were sputter deposited in Ar:N2 (70:30 vol%) or pure Ar on amorphous Si02. They were annealed in air at temperatures ranging from 250·C up to 750·C for several hours. In-depth profiles revealed an onset of oxidation of the barriers at 520·C for Nb and 600·C for TiW. Barrier oxidation and extensive diffusion could be correlated. Distinct diffusion behavior as a function of temperature was established between TiW and Nb. A Nb multilayer structure was found to provide the best reliability as the barrier and as the adhesion layer.

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