M. Ekwińska - Academia.edu (original) (raw)

Papers by M. Ekwińska

Research paper thumbnail of Application of multi-criteria optimization algorithms to numerical material extraction of thin layers through nanoindentaion technique

3rd Electronics System Integration Technology Conference ESTC, 2010

Current developments and trends in microelectronics are focused on thin layers and novel material... more Current developments and trends in microelectronics are focused on thin layers and novel materials. This leads to application of different test and measurement methods, which are capable to measure basic mechanical properties of such materials on micro-scale and nano-scale. The presented paper focuses on application of the nanoindentation technique in order to extract the basic elastic and elasto-plastic mechanical properties

Research paper thumbnail of The determination of the spring constant of T-shaped cantilevers using calibration structures

Measurement Science and Technology, 2014

ABSTRACT One of the most important diagnostic features of atomic force microscopy is the measurem... more ABSTRACT One of the most important diagnostic features of atomic force microscopy is the measurement of mechanical properties of the surface. Among a wide spectra of measuring techniques, the methods utilizing torsional oscillations of the cantilever provide high speed mapping of properties such as the stiffness, adhesion, snap-in force and energy dissipation. In order to perform quantitative measurements, one must determine the spring constant of the cantilever. In this paper, we present the utilization of high-accuracy normal force calibration structures, allowing the procedure to be carried out easily and quickly. Additionally, the results of tests confirming the efficiency of the method are presented.

Research paper thumbnail of Calibration of normal force in atomic force microscope

Recent Advances in Mechatronics, 2007

ABSTRACT Investigation with the use of the atomic force microscope enables to estimate material p... more ABSTRACT Investigation with the use of the atomic force microscope enables to estimate material properties in micro/nanometer scale. During such investigation load applied by the sensor (in this case cantilever) on the investigated surface is a crucial parameter. Under that circumstances there were elaborated several methods of normal force calibration. In this work a new calibration method with calibration gratings is proposed as well as advantages of this method are discussed. On the basis of this method also method for stiffness measurements of MEMS structures was proposed.

Research paper thumbnail of Comparison of mechanical properties of thin films of SiNx deposited on silicon

Recent Advances in Mechatronics, 2007

Nanoindentation studies of SiNx layers deposited on silicon substrate with PECVD, PECVD LF and PE... more Nanoindentation studies of SiNx layers deposited on silicon substrate with PECVD, PECVD LF and PECVD LF + HF methods were performed. During investigation Young’s modulus, hardness and energy needed to make plastic deformation of the material were established.

Research paper thumbnail of Nanomechanical and nanotribological properties of polymeric ultrathin films for nanoimprint lithography

Zeitschrift für Metallkunde, 2005

Alkali-heat treatment (AHT) is a simple and practical method to make titanium surfaces bioactive.... more Alkali-heat treatment (AHT) is a simple and practical method to make titanium surfaces bioactive. Hydroxyapatite nucleates on Ti when in contact with body fluids due to the presence of a thin sodium titanate film produced by the AHT. This method was proposed more than a decade ago and it has been widely investigated at varied scopes. However, there is still little information about the mechanical properties of this film. In this work, the tribo-mechanical behavior of films produced by alkali treatment (AT) and AHT on Ti is investigated using instrumented indentation technique. The films were also characterized by TF-XRD, SEM, EDS and in vitro bioactivity tests. Analytical methods were employed to obtain the mechanical properties of the film from instrumented indentation data. The heat treatment subsequent to the alkaline processing increased the film elastic modulus from 1.7 GPa to 2.8 GPa, the hardness from 12 MPa to 20 MPa and the critical load for scratch test from 1.5 mN to 5.5 mN. Despite the overall improvement in the film bioactivity and tribo-mechanical behavior, the AHT elastic modulus is only 2% of the pristine Ti whereas hardness is less than 1%. This information must be considered for implant design purposes.

Research paper thumbnail of Deposition of silicon oxide film from tetraethoxysilane using a pulsed dielectric barrier discharge

Czechoslovak Journal of Physics, 2006

ABSTRACT Thin silicon oxide films were deposited on polycarbonate (PC) plates in a pulsed dielect... more ABSTRACT Thin silicon oxide films were deposited on polycarbonate (PC) plates in a pulsed dielectric barrier discharge (PDBD) at atmospheric pressure and ambient temperature. The films were deposited from gas mixtures of tetraethoxysilane (TEOS), helium, and oxygen. The effects of gas composition on the deposition rate and on the surface roughness were investigated. It was shown that the oxygen concentration was the only parameter influencing the deposition rate and the roughness of the films.

Research paper thumbnail of Transcutaneous Blood Capnometry Sensor Head Based on a Back-Side Contacted ISFET

Research paper thumbnail of Application of multi-criteria optimization algorithms to numerical material extraction of thin layers through nanoindentaion technique

3rd Electronics System Integration Technology Conference ESTC, 2010

Current developments and trends in microelectronics are focused on thin layers and novel material... more Current developments and trends in microelectronics are focused on thin layers and novel materials. This leads to application of different test and measurement methods, which are capable to measure basic mechanical properties of such materials on micro-scale and nano-scale. The presented paper focuses on application of the nanoindentation technique in order to extract the basic elastic and elasto-plastic mechanical properties

Research paper thumbnail of The determination of the spring constant of T-shaped cantilevers using calibration structures

Measurement Science and Technology, 2014

ABSTRACT One of the most important diagnostic features of atomic force microscopy is the measurem... more ABSTRACT One of the most important diagnostic features of atomic force microscopy is the measurement of mechanical properties of the surface. Among a wide spectra of measuring techniques, the methods utilizing torsional oscillations of the cantilever provide high speed mapping of properties such as the stiffness, adhesion, snap-in force and energy dissipation. In order to perform quantitative measurements, one must determine the spring constant of the cantilever. In this paper, we present the utilization of high-accuracy normal force calibration structures, allowing the procedure to be carried out easily and quickly. Additionally, the results of tests confirming the efficiency of the method are presented.

Research paper thumbnail of Calibration of normal force in atomic force microscope

Recent Advances in Mechatronics, 2007

ABSTRACT Investigation with the use of the atomic force microscope enables to estimate material p... more ABSTRACT Investigation with the use of the atomic force microscope enables to estimate material properties in micro/nanometer scale. During such investigation load applied by the sensor (in this case cantilever) on the investigated surface is a crucial parameter. Under that circumstances there were elaborated several methods of normal force calibration. In this work a new calibration method with calibration gratings is proposed as well as advantages of this method are discussed. On the basis of this method also method for stiffness measurements of MEMS structures was proposed.

Research paper thumbnail of Comparison of mechanical properties of thin films of SiNx deposited on silicon

Recent Advances in Mechatronics, 2007

Nanoindentation studies of SiNx layers deposited on silicon substrate with PECVD, PECVD LF and PE... more Nanoindentation studies of SiNx layers deposited on silicon substrate with PECVD, PECVD LF and PECVD LF + HF methods were performed. During investigation Young’s modulus, hardness and energy needed to make plastic deformation of the material were established.

Research paper thumbnail of Nanomechanical and nanotribological properties of polymeric ultrathin films for nanoimprint lithography

Zeitschrift für Metallkunde, 2005

Alkali-heat treatment (AHT) is a simple and practical method to make titanium surfaces bioactive.... more Alkali-heat treatment (AHT) is a simple and practical method to make titanium surfaces bioactive. Hydroxyapatite nucleates on Ti when in contact with body fluids due to the presence of a thin sodium titanate film produced by the AHT. This method was proposed more than a decade ago and it has been widely investigated at varied scopes. However, there is still little information about the mechanical properties of this film. In this work, the tribo-mechanical behavior of films produced by alkali treatment (AT) and AHT on Ti is investigated using instrumented indentation technique. The films were also characterized by TF-XRD, SEM, EDS and in vitro bioactivity tests. Analytical methods were employed to obtain the mechanical properties of the film from instrumented indentation data. The heat treatment subsequent to the alkaline processing increased the film elastic modulus from 1.7 GPa to 2.8 GPa, the hardness from 12 MPa to 20 MPa and the critical load for scratch test from 1.5 mN to 5.5 mN. Despite the overall improvement in the film bioactivity and tribo-mechanical behavior, the AHT elastic modulus is only 2% of the pristine Ti whereas hardness is less than 1%. This information must be considered for implant design purposes.

Research paper thumbnail of Deposition of silicon oxide film from tetraethoxysilane using a pulsed dielectric barrier discharge

Czechoslovak Journal of Physics, 2006

ABSTRACT Thin silicon oxide films were deposited on polycarbonate (PC) plates in a pulsed dielect... more ABSTRACT Thin silicon oxide films were deposited on polycarbonate (PC) plates in a pulsed dielectric barrier discharge (PDBD) at atmospheric pressure and ambient temperature. The films were deposited from gas mixtures of tetraethoxysilane (TEOS), helium, and oxygen. The effects of gas composition on the deposition rate and on the surface roughness were investigated. It was shown that the oxygen concentration was the only parameter influencing the deposition rate and the roughness of the films.

Research paper thumbnail of Transcutaneous Blood Capnometry Sensor Head Based on a Back-Side Contacted ISFET