Mario Schlund - Academia.edu (original) (raw)
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Papers by Mario Schlund
Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266), 2000
This paper reports on the technology development and characterization of polyimide-based, microfl... more This paper reports on the technology development and characterization of polyimide-based, microfluidic channels with integrated nanoporous membranes. A layer transfer and lamination technique is used to fabricate flexible microchannels from spin-on polyimide. The microfluidic channels can be operated at high pressures and flow rates without leakage. Nanopores are created in the polyimide channel walls by irradiation with swift heavy ions
Sensors and Actuators B: Chemical, 2007
Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266), 2000
This paper reports on the technology development and characterization of polyimide-based, microfl... more This paper reports on the technology development and characterization of polyimide-based, microfluidic channels with integrated nanoporous membranes. A layer transfer and lamination technique is used to fabricate flexible microchannels from spin-on polyimide. The microfluidic channels can be operated at high pressures and flow rates without leakage. Nanopores are created in the polyimide channel walls by irradiation with swift heavy ions
Sensors and Actuators B: Chemical, 2007