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Papers by Ronaldo Mansano

Resumos, 1993

O objetivo deste trabalho e o desenvolvimento de um processo de litografia de tres camadas, para ... more O objetivo deste trabalho e o desenvolvimento de um processo de litografia de tres camadas, para ser utilizado nos processos de corrosao por plasma de materiais usados em microeletronica. Ao mesmo tempo e apresentado um estudo sobre as influencias dos parâmetros do plasma (pressao, potencia e vazao) nas taxas de corrosao, nos perfis obtidos e nas taxas de corrosao do fotorresiste utilizado (AZ 1350J). Os perfis obtidos nesse trabalho foram verticais (aproximadamente 90o), com taxas de corrosao suficientemente altas para uso em producao comercial de circuitos integrados (400 nm/min).

The measurement of vibration shape modes in micromechanical devices is a task restricted to expen... more The measurement of vibration shape modes in micromechanical devices is a task restricted to expensive and complex equipment like scanning laser doppler vibrometers or white light interferometers. At this work we show that using an optical pick-up extracted from a commercial CD-ROM drive, is possible with off-the-shelf equipment, measure the vibration modes of microcantilevers in one dimension, taking advantage of the built-in movable lens present in CD-ROM laser pick-up assembly. The focus lens scans the device in one dimension, measuring the vibration at various point of the structure with velocities in the range of$150~\mu \text{m}$/s while the device is excited with a piezo driven by composed frequency signal. The first 3 shape modes flexural vibration of a cantilever with micrometer dimensions were measured and compared to the theoretical shape. We also measured the noise density of the pick-up, comparing with the theoretical Brownian motion resulting in 3 pm/Hz1/2 noise floor.

IEEE Transactions on Instrumentation and Measurement, 2021

This article presents a method to obtain a enhanced frequency resolution two-phase lock-in amplif... more This article presents a method to obtain a enhanced frequency resolution two-phase lock-in amplifier (LIA) with two channels in a microcontroller using minimum external circuitry. The timer peripheral of the microcontroller was used to generate the square wave signals for both the excitation and the quadrant demodulation, simplifying the waveform synthesis when compared to the use of digital-to-analog converters (DACs). To improve the frequency resolution of the generated signals, the timer signal was dithered to achieve fractional frequency values, while demodulation was executed in real time with signal acquisition. The real and imaginary parts of the signal are then transmitted to the computer by the universal serial bus (USB) interface while the computer sends commands to change the frequency, phase, or control other features. As proof of work, quartz tuning fork (QTF) sensors were measured due to its high QQQ -factor. The bandwidth of the lock-in was limited by the acquisition and demodulation sample rate of 300 Ks/s, while we showed 1000 times frequency resolution enhancement when compared to the not dithered signal generation. This approach can be applied in embedded design to measure frequency-dependent sensors with high QQQ , in scientific instrumentation such as scanning probe microscopes (SPMs), or even for educational purposes to teach the working principle of the LIAs.

Neste trabalho, foi utilizada a tecnica de litografia holografica aliada a litografia por ion rea... more Neste trabalho, foi utilizada a tecnica de litografia holografica aliada a litografia por ion reativo (RIE) para fabricacao de cristais fotonicos bidimensionais em dois tipos diferentes de materiais: Si cristalino(100) e filmes de carbono amorfo hidrogenado(a-C:H).

Latin American Journal of Pharmacy, 2010

In the present work the microbial decontamination of some medicinal plants by plasma treatment us... more In the present work the microbial decontamination of some medicinal plants by plasma treatment using oxygen gas or a mixture of oxygen and hydrogen peroxide was investigated. The efficiency of the decontamination process was analyzed by the count of heterotropic microorganisms and pathogenic research. The results showed a reduction in the microorganism number such as 3 and 4 logarithmic cycles for ginkgo and artichoke, while it was not efficient for samples containing hard and thick cells, and mucilage, such as guarana and chamomile.

Proceedings of SPIE, Jan 25, 2003

Proceedings of SPIE, Apr 12, 2004

Optical implementation of cubic-phase distribution lenses for passive infrared motion sensors. [P... more Optical implementation of cubic-phase distribution lenses for passive infrared motion sensors. [Proceedings of SPIE 5405, 189 (2004)]. Giuseppe A. Cirino, Luiz G. Neto, Ronaldo D. Mansano. Abstract. A cubic-phase distribution ...

Diamond and Related Materials, Feb 1, 2004

This work was based on the studies of the influence of the plasma process on the characteristics ... more This work was based on the studies of the influence of the plasma process on the characteristics of diamond-like carbon (DLC) films deposited by high density plasma chemical vapor deposition (HDP-CVD). DLC is a material that shows several good characteristics like high electrical resistivity, lower dielectric constant, high breakdown field, lower stress, high density, and hardness and chemical inertness. This material is important actually in mechanic, optic, and chemistry and mainly in microelectronic areas. For microelectronic process the best results were obtained by plasma of pure methane: low dielectric constant (1.7) and high resistivity 5 £ 10 13 V cm.

Resumos, 1993

O objetivo deste trabalho e o desenvolvimento de um processo de litografia de tres camadas, para ... more O objetivo deste trabalho e o desenvolvimento de um processo de litografia de tres camadas, para ser utilizado nos processos de corrosao por plasma de materiais usados em microeletronica. Ao mesmo tempo e apresentado um estudo sobre as influencias dos parâmetros do plasma (pressao, potencia e vazao) nas taxas de corrosao, nos perfis obtidos e nas taxas de corrosao do fotorresiste utilizado (AZ 1350J). Os perfis obtidos nesse trabalho foram verticais (aproximadamente 90o), com taxas de corrosao suficientemente altas para uso em producao comercial de circuitos integrados (400 nm/min).

The measurement of vibration shape modes in micromechanical devices is a task restricted to expen... more The measurement of vibration shape modes in micromechanical devices is a task restricted to expensive and complex equipment like scanning laser doppler vibrometers or white light interferometers. At this work we show that using an optical pick-up extracted from a commercial CD-ROM drive, is possible with off-the-shelf equipment, measure the vibration modes of microcantilevers in one dimension, taking advantage of the built-in movable lens present in CD-ROM laser pick-up assembly. The focus lens scans the device in one dimension, measuring the vibration at various point of the structure with velocities in the range of$150~\mu \text{m}$/s while the device is excited with a piezo driven by composed frequency signal. The first 3 shape modes flexural vibration of a cantilever with micrometer dimensions were measured and compared to the theoretical shape. We also measured the noise density of the pick-up, comparing with the theoretical Brownian motion resulting in 3 pm/Hz1/2 noise floor.

IEEE Transactions on Instrumentation and Measurement, 2021

This article presents a method to obtain a enhanced frequency resolution two-phase lock-in amplif... more This article presents a method to obtain a enhanced frequency resolution two-phase lock-in amplifier (LIA) with two channels in a microcontroller using minimum external circuitry. The timer peripheral of the microcontroller was used to generate the square wave signals for both the excitation and the quadrant demodulation, simplifying the waveform synthesis when compared to the use of digital-to-analog converters (DACs). To improve the frequency resolution of the generated signals, the timer signal was dithered to achieve fractional frequency values, while demodulation was executed in real time with signal acquisition. The real and imaginary parts of the signal are then transmitted to the computer by the universal serial bus (USB) interface while the computer sends commands to change the frequency, phase, or control other features. As proof of work, quartz tuning fork (QTF) sensors were measured due to its high QQQ -factor. The bandwidth of the lock-in was limited by the acquisition and demodulation sample rate of 300 Ks/s, while we showed 1000 times frequency resolution enhancement when compared to the not dithered signal generation. This approach can be applied in embedded design to measure frequency-dependent sensors with high QQQ , in scientific instrumentation such as scanning probe microscopes (SPMs), or even for educational purposes to teach the working principle of the LIAs.

Neste trabalho, foi utilizada a tecnica de litografia holografica aliada a litografia por ion rea... more Neste trabalho, foi utilizada a tecnica de litografia holografica aliada a litografia por ion reativo (RIE) para fabricacao de cristais fotonicos bidimensionais em dois tipos diferentes de materiais: Si cristalino(100) e filmes de carbono amorfo hidrogenado(a-C:H).

Latin American Journal of Pharmacy, 2010

In the present work the microbial decontamination of some medicinal plants by plasma treatment us... more In the present work the microbial decontamination of some medicinal plants by plasma treatment using oxygen gas or a mixture of oxygen and hydrogen peroxide was investigated. The efficiency of the decontamination process was analyzed by the count of heterotropic microorganisms and pathogenic research. The results showed a reduction in the microorganism number such as 3 and 4 logarithmic cycles for ginkgo and artichoke, while it was not efficient for samples containing hard and thick cells, and mucilage, such as guarana and chamomile.

Proceedings of SPIE, Jan 25, 2003

Proceedings of SPIE, Apr 12, 2004

Optical implementation of cubic-phase distribution lenses for passive infrared motion sensors. [P... more Optical implementation of cubic-phase distribution lenses for passive infrared motion sensors. [Proceedings of SPIE 5405, 189 (2004)]. Giuseppe A. Cirino, Luiz G. Neto, Ronaldo D. Mansano. Abstract. A cubic-phase distribution ...

Diamond and Related Materials, Feb 1, 2004

This work was based on the studies of the influence of the plasma process on the characteristics ... more This work was based on the studies of the influence of the plasma process on the characteristics of diamond-like carbon (DLC) films deposited by high density plasma chemical vapor deposition (HDP-CVD). DLC is a material that shows several good characteristics like high electrical resistivity, lower dielectric constant, high breakdown field, lower stress, high density, and hardness and chemical inertness. This material is important actually in mechanic, optic, and chemistry and mainly in microelectronic areas. For microelectronic process the best results were obtained by plasma of pure methane: low dielectric constant (1.7) and high resistivity 5 £ 10 13 V cm.