Pavol Gaspierik - Academia.edu (original) (raw)
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Papers by Pavol Gaspierik
Semiconductor Technologies, 2010
International Symposium on Applied Sciences on Biomedical and Communication Technologies, 2009
Planar thin-film microelectrodes have been developed based on conductive and transparent thin fil... more Planar thin-film microelectrodes have been developed based on conductive and transparent thin films of ZnO:Al which are applicable in biomedicine as well as in the thin film solar cells. Nano-structuralization of their interfaces (surfaces) was carried out by the ion-sputter etching and by the photo-assisted electrodeless chemical etching. Interdigital array of microelectrodes was verified as a very useful tool for
International Symposium on Applied Sciences on Biomedical and Communication Technologies, 2009
Planar thin-film microelectrodes have been developed based on conductive and transparent thin fil... more Planar thin-film microelectrodes have been developed based on conductive and transparent thin films of ZnO:Al which are applicable in biomedicine as well as in the thin film solar cells. Nano-structuralization of their interfaces (surfaces) was carried out by the ion-sputter etching and by the photo-assisted electrodeless chemical etching. Interdigital array of microelectrodes was verified as a very useful tool for
The Eighth International Conference on Advanced Semiconductor Devices and Microsystems, 2010
ABSTRACT Structural and electrical properties of ZnO:Ga thin films synthesized by RF sputtering a... more ABSTRACT Structural and electrical properties of ZnO:Ga thin films synthesized by RF sputtering and N-doped by ion implantation were studied. The ZnO films with an addition of 2 at% of Ga were deposited on Corning glass substrates to a thickness of 0.5 μm. Nitrogen ions were implanted at 180 keV, to 1015 - 1016 at/cm2, at room temperature. It was found that the as-deposited ZnO films have a polycrystalline columnar structure. Incorporation of Ga resulted in their electrical resistivity of the order of 1 Ωcm, electron concentration of 1019 cm-3 and Hall mobility in the range of 1 cm2 V-1 s-1. After implantation with nitrogen the polycristalline structure was preserved, though individual columns appeared as discontinued. On the other hand, incorporation of N species into the ZnO lattice can result in both acceptor and donor states, which at this stage of experiments could not be fully clarified.
Vacuum, 2012
In this article the modification of surface morphology of ZnO:Ga (GZO) thin films by ion sputter ... more In this article the modification of surface morphology of ZnO:Ga (GZO) thin films by ion sputter etching is presented. GZO thin films were prepared at room temperature on Corning glass substrates by both normal and oblique angle RF diode sputtering from ZnO:2%Ga ceramic target in Ar gas. Ion sputter etching was performed by RF re-sputtering of GZO thin films on
Applied Surface Science, 2010
2009 2nd International Symposium on Applied Sciences in Biomedical and Communication Technologies, 2009
Planar thin-film microelectrodes have been developed based on conductive and transparent thin fil... more Planar thin-film microelectrodes have been developed based on conductive and transparent thin films of ZnO:Al which are applicable in biomedicine as well as in the thin film solar cells. Nano-structuralization of their interfaces (surfaces) was carried out by the ion-sputter etching and by the photo-assisted electrodeless chemical etching. Interdigital array of microelectrodes was verified as a very useful tool for biomedical application: the monitoring of blood state or psychogalvanic reflex.
Semiconductor Technologies, 2010
Journal of Electrical Engineering, 2000
A novel approach to the preparation of thin films by using RF diode sputtering was developed. In ... more A novel approach to the preparation of thin films by using RF diode sputtering was developed. In one deposition run, thin films of doped ZnO:(Al, Ga) were obtained with different structural, optical and electrical properties. ZnO: Al films of low resistivities in order of 10-3Omegacm and high optical transmittances about 93% have appeared the most suitable for photovoltaic applications.
Procedia Chemistry, 2012
The design of the car driver monitoring system is presented with a novel IDAT microsensor applied... more The design of the car driver monitoring system is presented with a novel IDAT microsensor applied. We have developed new thin film multipurpose microsensors (IDAT) consisting of an impedance sensor based on the interdigital array of microelectrodes which is integrated together with temperature resistive sensor on single chip. The developed microsensor allows monitoring of psychogalvanic reflex, heart pulse and skin temperature using depth impedance analysis of different skin layers by choosing the appropriate size of microelectrodes.
Semiconductor Technologies, 2010
International Symposium on Applied Sciences on Biomedical and Communication Technologies, 2009
Planar thin-film microelectrodes have been developed based on conductive and transparent thin fil... more Planar thin-film microelectrodes have been developed based on conductive and transparent thin films of ZnO:Al which are applicable in biomedicine as well as in the thin film solar cells. Nano-structuralization of their interfaces (surfaces) was carried out by the ion-sputter etching and by the photo-assisted electrodeless chemical etching. Interdigital array of microelectrodes was verified as a very useful tool for
International Symposium on Applied Sciences on Biomedical and Communication Technologies, 2009
Planar thin-film microelectrodes have been developed based on conductive and transparent thin fil... more Planar thin-film microelectrodes have been developed based on conductive and transparent thin films of ZnO:Al which are applicable in biomedicine as well as in the thin film solar cells. Nano-structuralization of their interfaces (surfaces) was carried out by the ion-sputter etching and by the photo-assisted electrodeless chemical etching. Interdigital array of microelectrodes was verified as a very useful tool for
The Eighth International Conference on Advanced Semiconductor Devices and Microsystems, 2010
ABSTRACT Structural and electrical properties of ZnO:Ga thin films synthesized by RF sputtering a... more ABSTRACT Structural and electrical properties of ZnO:Ga thin films synthesized by RF sputtering and N-doped by ion implantation were studied. The ZnO films with an addition of 2 at% of Ga were deposited on Corning glass substrates to a thickness of 0.5 μm. Nitrogen ions were implanted at 180 keV, to 1015 - 1016 at/cm2, at room temperature. It was found that the as-deposited ZnO films have a polycrystalline columnar structure. Incorporation of Ga resulted in their electrical resistivity of the order of 1 Ωcm, electron concentration of 1019 cm-3 and Hall mobility in the range of 1 cm2 V-1 s-1. After implantation with nitrogen the polycristalline structure was preserved, though individual columns appeared as discontinued. On the other hand, incorporation of N species into the ZnO lattice can result in both acceptor and donor states, which at this stage of experiments could not be fully clarified.
Vacuum, 2012
In this article the modification of surface morphology of ZnO:Ga (GZO) thin films by ion sputter ... more In this article the modification of surface morphology of ZnO:Ga (GZO) thin films by ion sputter etching is presented. GZO thin films were prepared at room temperature on Corning glass substrates by both normal and oblique angle RF diode sputtering from ZnO:2%Ga ceramic target in Ar gas. Ion sputter etching was performed by RF re-sputtering of GZO thin films on
Applied Surface Science, 2010
2009 2nd International Symposium on Applied Sciences in Biomedical and Communication Technologies, 2009
Planar thin-film microelectrodes have been developed based on conductive and transparent thin fil... more Planar thin-film microelectrodes have been developed based on conductive and transparent thin films of ZnO:Al which are applicable in biomedicine as well as in the thin film solar cells. Nano-structuralization of their interfaces (surfaces) was carried out by the ion-sputter etching and by the photo-assisted electrodeless chemical etching. Interdigital array of microelectrodes was verified as a very useful tool for biomedical application: the monitoring of blood state or psychogalvanic reflex.
Semiconductor Technologies, 2010
Journal of Electrical Engineering, 2000
A novel approach to the preparation of thin films by using RF diode sputtering was developed. In ... more A novel approach to the preparation of thin films by using RF diode sputtering was developed. In one deposition run, thin films of doped ZnO:(Al, Ga) were obtained with different structural, optical and electrical properties. ZnO: Al films of low resistivities in order of 10-3Omegacm and high optical transmittances about 93% have appeared the most suitable for photovoltaic applications.
Procedia Chemistry, 2012
The design of the car driver monitoring system is presented with a novel IDAT microsensor applied... more The design of the car driver monitoring system is presented with a novel IDAT microsensor applied. We have developed new thin film multipurpose microsensors (IDAT) consisting of an impedance sensor based on the interdigital array of microelectrodes which is integrated together with temperature resistive sensor on single chip. The developed microsensor allows monitoring of psychogalvanic reflex, heart pulse and skin temperature using depth impedance analysis of different skin layers by choosing the appropriate size of microelectrodes.