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Papers by Pavol Gaspierik

Research paper thumbnail of Design of Non-Invasive Setup for Car Driver Biomonitoring

Research paper thumbnail of Preparation of Transparent Conductive AZO Thin Films for Solar Cells

Semiconductor Technologies, 2010

Research paper thumbnail of Micro / nano- structuralized interfaces of conductive and transparent thin-film microelectrodes for biomedical application

International Symposium on Applied Sciences on Biomedical and Communication Technologies, 2009

Planar thin-film microelectrodes have been developed based on conductive and transparent thin fil... more Planar thin-film microelectrodes have been developed based on conductive and transparent thin films of ZnO:Al which are applicable in biomedicine as well as in the thin film solar cells. Nano-structuralization of their interfaces (surfaces) was carried out by the ion-sputter etching and by the photo-assisted electrodeless chemical etching. Interdigital array of microelectrodes was verified as a very useful tool for

Research paper thumbnail of Micro / nano- structuralized interfaces of conductive and transparent thin-film microelectrodes for biomedical application

International Symposium on Applied Sciences on Biomedical and Communication Technologies, 2009

Planar thin-film microelectrodes have been developed based on conductive and transparent thin fil... more Planar thin-film microelectrodes have been developed based on conductive and transparent thin films of ZnO:Al which are applicable in biomedicine as well as in the thin film solar cells. Nano-structuralization of their interfaces (surfaces) was carried out by the ion-sputter etching and by the photo-assisted electrodeless chemical etching. Interdigital array of microelectrodes was verified as a very useful tool for

Research paper thumbnail of Synthesis and doping of zinc-oxide thin films by RF sputtering and ion implantation

The Eighth International Conference on Advanced Semiconductor Devices and Microsystems, 2010

ABSTRACT Structural and electrical properties of ZnO:Ga thin films synthesized by RF sputtering a... more ABSTRACT Structural and electrical properties of ZnO:Ga thin films synthesized by RF sputtering and N-doped by ion implantation were studied. The ZnO films with an addition of 2 at% of Ga were deposited on Corning glass substrates to a thickness of 0.5 μm. Nitrogen ions were implanted at 180 keV, to 1015 - 1016 at/cm2, at room temperature. It was found that the as-deposited ZnO films have a polycrystalline columnar structure. Incorporation of Ga resulted in their electrical resistivity of the order of 1 Ωcm, electron concentration of 1019 cm-3 and Hall mobility in the range of 1 cm2 V-1 s-1. After implantation with nitrogen the polycristalline structure was preserved, though individual columns appeared as discontinued. On the other hand, incorporation of N species into the ZnO lattice can result in both acceptor and donor states, which at this stage of experiments could not be fully clarified.

Research paper thumbnail of Analysis of single junction a-Si:H solar cells grown on different TCO’s

Research paper thumbnail of Effects of sputtering power and pressure on properties of ZnO:Ga thin films prepared by oblique-angle deposition

Research paper thumbnail of Ion sputter etching of ZnO:Ga thin film surfaces

Vacuum, 2012

In this article the modification of surface morphology of ZnO:Ga (GZO) thin films by ion sputter ... more In this article the modification of surface morphology of ZnO:Ga (GZO) thin films by ion sputter etching is presented. GZO thin films were prepared at room temperature on Corning glass substrates by both normal and oblique angle RF diode sputtering from ZnO:2%Ga ceramic target in Ar gas. Ion sputter etching was performed by RF re-sputtering of GZO thin films on

Research paper thumbnail of Influence of the broken symmetry of defect state distribution at the a-Si:H/c-Si interface on the performance of hetero-junction solar cells

Applied Surface Science, 2010

Research paper thumbnail of Micro- / nano- structuralized interfaces of conductive and transparent thin-film microelectrodes for biomedical application

2009 2nd International Symposium on Applied Sciences in Biomedical and Communication Technologies, 2009

Planar thin-film microelectrodes have been developed based on conductive and transparent thin fil... more Planar thin-film microelectrodes have been developed based on conductive and transparent thin films of ZnO:Al which are applicable in biomedicine as well as in the thin film solar cells. Nano-structuralization of their interfaces (surfaces) was carried out by the ion-sputter etching and by the photo-assisted electrodeless chemical etching. Interdigital array of microelectrodes was verified as a very useful tool for biomedical application: the monitoring of blood state or psychogalvanic reflex.

Research paper thumbnail of Preparation of Transparent Conductive AZO Thin Films for Solar Cells

Semiconductor Technologies, 2010

Research paper thumbnail of Zinc Oxide — A Unique Material for Advanced Photovoltaic Solar Cells

Journal of Electrical Engineering, 2000

A novel approach to the preparation of thin films by using RF diode sputtering was developed. In ... more A novel approach to the preparation of thin films by using RF diode sputtering was developed. In one deposition run, thin films of doped ZnO:(Al, Ga) were obtained with different structural, optical and electrical properties. ZnO: Al films of low resistivities in order of 10-3Omegacm and high optical transmittances about 93% have appeared the most suitable for photovoltaic applications.

Research paper thumbnail of Design of Non-Invasive Setup for Car Driver Biomonitoring

Procedia Chemistry, 2012

The design of the car driver monitoring system is presented with a novel IDAT microsensor applied... more The design of the car driver monitoring system is presented with a novel IDAT microsensor applied. We have developed new thin film multipurpose microsensors (IDAT) consisting of an impedance sensor based on the interdigital array of microelectrodes which is integrated together with temperature resistive sensor on single chip. The developed microsensor allows monitoring of psychogalvanic reflex, heart pulse and skin temperature using depth impedance analysis of different skin layers by choosing the appropriate size of microelectrodes.

Research paper thumbnail of Design of Non-Invasive Setup for Car Driver Biomonitoring

Research paper thumbnail of Preparation of Transparent Conductive AZO Thin Films for Solar Cells

Semiconductor Technologies, 2010

Research paper thumbnail of Micro / nano- structuralized interfaces of conductive and transparent thin-film microelectrodes for biomedical application

International Symposium on Applied Sciences on Biomedical and Communication Technologies, 2009

Planar thin-film microelectrodes have been developed based on conductive and transparent thin fil... more Planar thin-film microelectrodes have been developed based on conductive and transparent thin films of ZnO:Al which are applicable in biomedicine as well as in the thin film solar cells. Nano-structuralization of their interfaces (surfaces) was carried out by the ion-sputter etching and by the photo-assisted electrodeless chemical etching. Interdigital array of microelectrodes was verified as a very useful tool for

Research paper thumbnail of Micro / nano- structuralized interfaces of conductive and transparent thin-film microelectrodes for biomedical application

International Symposium on Applied Sciences on Biomedical and Communication Technologies, 2009

Planar thin-film microelectrodes have been developed based on conductive and transparent thin fil... more Planar thin-film microelectrodes have been developed based on conductive and transparent thin films of ZnO:Al which are applicable in biomedicine as well as in the thin film solar cells. Nano-structuralization of their interfaces (surfaces) was carried out by the ion-sputter etching and by the photo-assisted electrodeless chemical etching. Interdigital array of microelectrodes was verified as a very useful tool for

Research paper thumbnail of Synthesis and doping of zinc-oxide thin films by RF sputtering and ion implantation

The Eighth International Conference on Advanced Semiconductor Devices and Microsystems, 2010

ABSTRACT Structural and electrical properties of ZnO:Ga thin films synthesized by RF sputtering a... more ABSTRACT Structural and electrical properties of ZnO:Ga thin films synthesized by RF sputtering and N-doped by ion implantation were studied. The ZnO films with an addition of 2 at% of Ga were deposited on Corning glass substrates to a thickness of 0.5 μm. Nitrogen ions were implanted at 180 keV, to 1015 - 1016 at/cm2, at room temperature. It was found that the as-deposited ZnO films have a polycrystalline columnar structure. Incorporation of Ga resulted in their electrical resistivity of the order of 1 Ωcm, electron concentration of 1019 cm-3 and Hall mobility in the range of 1 cm2 V-1 s-1. After implantation with nitrogen the polycristalline structure was preserved, though individual columns appeared as discontinued. On the other hand, incorporation of N species into the ZnO lattice can result in both acceptor and donor states, which at this stage of experiments could not be fully clarified.

Research paper thumbnail of Analysis of single junction a-Si:H solar cells grown on different TCO’s

Research paper thumbnail of Effects of sputtering power and pressure on properties of ZnO:Ga thin films prepared by oblique-angle deposition

Research paper thumbnail of Ion sputter etching of ZnO:Ga thin film surfaces

Vacuum, 2012

In this article the modification of surface morphology of ZnO:Ga (GZO) thin films by ion sputter ... more In this article the modification of surface morphology of ZnO:Ga (GZO) thin films by ion sputter etching is presented. GZO thin films were prepared at room temperature on Corning glass substrates by both normal and oblique angle RF diode sputtering from ZnO:2%Ga ceramic target in Ar gas. Ion sputter etching was performed by RF re-sputtering of GZO thin films on

Research paper thumbnail of Influence of the broken symmetry of defect state distribution at the a-Si:H/c-Si interface on the performance of hetero-junction solar cells

Applied Surface Science, 2010

Research paper thumbnail of Micro- / nano- structuralized interfaces of conductive and transparent thin-film microelectrodes for biomedical application

2009 2nd International Symposium on Applied Sciences in Biomedical and Communication Technologies, 2009

Planar thin-film microelectrodes have been developed based on conductive and transparent thin fil... more Planar thin-film microelectrodes have been developed based on conductive and transparent thin films of ZnO:Al which are applicable in biomedicine as well as in the thin film solar cells. Nano-structuralization of their interfaces (surfaces) was carried out by the ion-sputter etching and by the photo-assisted electrodeless chemical etching. Interdigital array of microelectrodes was verified as a very useful tool for biomedical application: the monitoring of blood state or psychogalvanic reflex.

Research paper thumbnail of Preparation of Transparent Conductive AZO Thin Films for Solar Cells

Semiconductor Technologies, 2010

Research paper thumbnail of Zinc Oxide — A Unique Material for Advanced Photovoltaic Solar Cells

Journal of Electrical Engineering, 2000

A novel approach to the preparation of thin films by using RF diode sputtering was developed. In ... more A novel approach to the preparation of thin films by using RF diode sputtering was developed. In one deposition run, thin films of doped ZnO:(Al, Ga) were obtained with different structural, optical and electrical properties. ZnO: Al films of low resistivities in order of 10-3Omegacm and high optical transmittances about 93% have appeared the most suitable for photovoltaic applications.

Research paper thumbnail of Design of Non-Invasive Setup for Car Driver Biomonitoring

Procedia Chemistry, 2012

The design of the car driver monitoring system is presented with a novel IDAT microsensor applied... more The design of the car driver monitoring system is presented with a novel IDAT microsensor applied. We have developed new thin film multipurpose microsensors (IDAT) consisting of an impedance sensor based on the interdigital array of microelectrodes which is integrated together with temperature resistive sensor on single chip. The developed microsensor allows monitoring of psychogalvanic reflex, heart pulse and skin temperature using depth impedance analysis of different skin layers by choosing the appropriate size of microelectrodes.