Per Ohlckers - Academia.edu (original) (raw)
Papers by Per Ohlckers
Journal of Physics: Conference Series, 2016
On-chip supercapacitors hold the potential promise for serving as the energy storage units in int... more On-chip supercapacitors hold the potential promise for serving as the energy storage units in integrated circuit system, due to their much higher energy density in comparison with conventional dielectric capacitors, high power density and long-term cycling stability. In this study, nanoporous Au (NP-Au) film on-chip was employed as the electrode scaffold to help increase the electrolyte-accessible area for active material. Pseudo-capacitive polypyrrole (PPY) with high theoretical capacitance was deposited into the NP-Au scaffold, to construct the tailored NP-Au/PPY hybrid on-chip electrode with improved areal capacitance. Half cell test in threeelectrode system revealed the improved capacitor performance of nanoporous Au supported PPY electrode, compared to the densely packed PPY nanowire film electrode on planer Au substrate (Au/PPY). The areal capacitance of 37 mF/cm 2~1 0 mV/s, 32 mF/cm 2~5 0 mV/s, 28 mF/cm 2~1 00 mV/s, 16 mF/cm 2~5 00 mV/s, were offered by NP-Au/PPY. Also, the cycling performance was enhanced via using NP-Au scaffold. The developed NP-Au/PPY on-chip electrode demonstrated herein paves a feasible pathway to employ dealloying derived porous metal as the scaffold for improving both the energy density and cycling performance for supercapacitor electrodes.
Journal of Bioinformatics And Diabetes, 2016
Diabetes is a metabolic disorder that results in human body due to insulin deficiency, insulin re... more Diabetes is a metabolic disorder that results in human body due to insulin deficiency, insulin resistance or both. In the management of diabetes, glucose monitoring technology has been used for the last three decades. The aim of this review article is to describe concise and organized information about different techniques of non-invasive continuous blood glucose monitoring. Many research groups have been working to develop wearable sensors for continuous blood glucose monitoring, but at present, there are to our knowledge no commercially successful non-invasive glucose monitors on the market. To achieve an acceptable sensor system, a glucose sensor should have accuracy better than 15mg/dl (0.8 mmol/l). In future development, continuous glucose sensor systems may become predictable, selective, reliable and acceptable for patient use.
The usual way of calibrating detectors or devices is to treat them as black boxes. We measure the... more The usual way of calibrating detectors or devices is to treat them as black boxes. We measure the response when the device is excited with a well known signal. With this approach we throw away a lot of information that can be used to develop new calibration techniques. In the common European project chipS∙CALe (running from June 2019 – May 2022) we aim to develop self-induced silicon photodiodes capable of calibrating themselves in possibly remote operation. The trick is to exploit the intrinsic quantum properties of photodiodes that each photon generates exactly one electron-hole pair. This is a valid assumption to about 99.9% of common calibration standard photodiodes used in laboratories today when correcting for reflectance.
<jats:title>Abstract</jats:title> <jats:p>Pressure control have been going thro... more <jats:title>Abstract</jats:title> <jats:p>Pressure control have been going through steps of evolution. In the highlight of safety, reliability and control, the systems have been sturdy withstanding massive pressure and environmental impact to last the time of estimated life of well. Design have been emphasizing on sturdiness rather than intelligence and autonomy. Time moves on, sophistication levels rise in all parts of our industry. Sustainability and lower environmental impact of solutions grow from the young into business planning and democratic policies. Control lines of hydraulic systems posed risks to the environment as well as being costly in structure and maintenance. Condition monitoring helped ensure better maintenance planning and lowered the risk of breakdown, but still left a lot to be desired reaching for self-contained, self learning systems with low installation and maintenance costs, yet the safest approach.</jats:p> <jats:p>The next steps were taken towards electrification and digitization of pressure control systems, making short and undetermined strides over almost two decades. Still, the standards are not following the pace of technological progress. And when someone dares to pilot or demonstrate modern technology applied, the installations and operational procedures of the systems still need expensive distributed lines of power, of signals and control systems to ensure a swift and safe operation. The fly-by-wire principle applied in oil & gas is the operate-by-costly-technology-and-environmental-impact-lines.</jats:p> <jats:p>With the introduction of new and breaking technology in energy harvesting and storage, the playing field opens up towards fully automated systems with no need for expensive power lines or hydraulic control lines. The safety will be taken care of also off-grid, fully digitized. Should cabling of instrument signals be damaged, the system of tomorrow will still be up to par with the Safety Integrity Levels needed. New super-capacitors with an extra dense storage capacity being developed in partnership between the industry and the University of southeast Norway combined with an extremely low energy consuming actuation system with the fastest failsafe mechanism ever will ensure safety in all modes of operation, even with all lines down or consumed by flames. The paper aims to show how the technology works and underline why it will take a place in the future of well control and production.</jats:p>
Sensors
We performed a systematic study involving simulation and experimental techniques to develop induc... more We performed a systematic study involving simulation and experimental techniques to develop induced-junction silicon photodetectors passivated with thermally grown SiO2 and plasma-enhanced chemical vapor deposited (PECVD) SiNx thin films that show a record high quantum efficiency. We investigated PECVD SiNx passivation and optimized the film deposition conditions to minimize the recombination losses at the silicon–dielectric interface as well as optical losses. Depositions with varied process parameters were carried out on test samples, followed by measurements of minority carrier lifetime, fixed charge density, and optical absorbance and reflectance. Subsequently, the surface recombination velocity, which is the limiting factor for internal quantum deficiency (IQD), was obtained for different film depositions via 2D simulations where the measured effective lifetime, fixed charge density, and substrate parameters were used as input. The quantum deficiency of induced-junction photodi...
2017 16th International Superconductive Electronics Conference (ISEC), 2017
Faced with the challenges associated with sustainably feeding the world's growing population, the... more Faced with the challenges associated with sustainably feeding the world's growing population, the food industry is increasingly relying on operations research (OR) techniques to achieve economic, environmental, and social sustainability. It is therefore important to understand the context-specific model-oriented applications of OR techniques in the sustainable food supply chain (SFSC) domain. While existing food supply chain (FSC) reviews provide an excellent basis for this process, the explicit consideration of sustainability from a model-oriented perspective along with a structured outline of relevant SFSC research techniques are missing in extant literature. We attempt to fill this gap by reviewing 83 related scientific journal publications that utilize mathematical modeling techniques to address issues in SFSC. To this end, we first identify the salient dimensions that include economic, environmental, and social issues in SFSC. We then review the models and methods that use these dimensions to solve issues that arise in SFSC. We identify some of the main challenges in analytical modeling of SFSC as well as future research directions.
Applied Physics Letters, 2021
Strong magnon-photon coupling with chip-integrated YIG in the zero-temperature limit Applied Phys... more Strong magnon-photon coupling with chip-integrated YIG in the zero-temperature limit Applied Physics Letters 119, 033502 (2021);
2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC)
We have constructed a finite element simulation where we investigate the effects of wet-etchinduc... more We have constructed a finite element simulation where we investigate the effects of wet-etchinduced surface roughness on transmission and reflection of infrared light in the 8-12um band. A silicon wafer was wet-etched for 2 hours in a 10% KOH solution at 80°C, scanned in an atomic force microscope, and the surface profile was recreated in COMSOL. Simulated plane waves of light and varying angles of incidence were then allowed to pass through this surface and the resulting effects on the reflection and transmission were investigated. Roughness was then amplified to investigate the effects of increased surface roughness. For the wavelengths investigated, an increase in transmission of 8% could be seen up to an RMS surface roughness of 800nm followed by a decrease, while the angles investigated showed an RMS dependent increase in transmission between 20° and 40° for RMS surface roughness' above 1000nm.
Journal of Micromechanics and Microengineering, 2010
Low cost CO2 gas sensors for demand-controlled ventilation can lower the energy consumption and i... more Low cost CO2 gas sensors for demand-controlled ventilation can lower the energy consumption and increase comfort and hence productivity in office buildings and schools. The photo aoustic principle offers very high sensitivity and selectivity when used for gas trace analysis. Current systems are too expensive and large for in-duct mounting. Here, the design, modeling, fabrication and characterization of two micromachined
Sensors
In this article, we present our research achievements regarding the development of a remote sensi... more In this article, we present our research achievements regarding the development of a remote sensing system for motor pulse acquisition, as a first step towards a complete neuroprosthetic arm. We present the fabrication process of an implantable electrode for nerve impulse acquisition, together with an innovative wirelessly controlled system. In our study, these were combined into an implantable device for attachment to peripheral nerves. Mechanical and biocompatibility tests were performed, as well as in vivo testing on pigs using the developed system. This testing and the experimental results are presented in a comprehensive manner, demonstrating that the system is capable of accomplishing the requirements of its designed application. Most significantly, neural electrical signals were acquired and transmitted out of the body during animal experiments, which were conducted according to ethical regulations in the field.
Day 2 Tue, November 16, 2021, 2021
E&P companies are increasingly challenged with cost-effective development or upgrade of remote fi... more E&P companies are increasingly challenged with cost-effective development or upgrade of remote fields, ensuring crew safety and regulatory requirements for reducing environmental impact. Remote operations and unmanned platforms have significantly lower CO2 emissions and lowerCAPEX and OPEX in areas of sparse infrastructure. Complete electrification of safety critical control systems is key to maintain safe production while digitization, automation and condition based maintenance reduce required on-site personnel. An all-electric wellhead- and production tree valve actuator for handling emergency situations has been developed under a Joint Industry Project by Equinor, Baker Hughes and TECHNI. PACT utilize a completely new, patent pending failsafe mechanism that is inherently safe without requirement for redundancy. PACT contains an embedded controller and sensors with extremely low power consumption rendering it well suited for solar/alternate power sources. A new super-capacitor is ...
Sensors and Actuators, 1986
... D CAPACITIVE PRESSURE SENSOR WITH FREQUENCY-MODULATED OUTPUT* A HANNEBORG, T - E HANSEN, PA O... more ... D CAPACITIVE PRESSURE SENSOR WITH FREQUENCY-MODULATED OUTPUT* A HANNEBORG, T - E HANSEN, PA OHLCKERS, E CARLSON, B DAHL ... the middle is the spring element chip with a pressure-sensitive di-aphragm which contains a centre boss structure The ...
An ongoing research and development program in the field of silicon radiation sensor systems for ... more An ongoing research and development program in the field of silicon radiation sensor systems for gamma and X-ray detection is presented. In particular, the activities on double sided/single sided silicon radiation sensors and in front end electronics ASIC's (Application Specific Integrated Circuits) are described.
Transducers ’01 Eurosensors XV, 2001
A miniature photoacoustic (PA) gas sensing module has been made using silicon microsystem technol... more A miniature photoacoustic (PA) gas sensing module has been made using silicon microsystem technology to make two key components: 1) A high-speed infrared emitter (IRE) with a diamond-like carbon thin film resistor on a silicon micromachined diaphragm as support structure. 2) A silicon micromachined microphone to sense the photoacoustic signal. The IRE is manufactured by Patinor Coating by a proprietary process, while the silicon microphone is manufactured in a multi-project wafer (MPW) foundry service called NORMIC, with SensoNor as the foundry. The silicon microphone was designed by SINTEF. The complete module also consists of analog and digital system with control logic, signal conditioning and interface electronics. A patented scheme with the target gas as a selective filter is giving high selectivity. Preliminary test and evaluation of a prototype for carbon dioxide monitoring show that the principle to achieve high selectivity is working. A resolution better than 0.5 ppm and an accuracy around 10 ppm have be achieved, with a potential towards better than 5 ppm, provided the relative high thermal drifts are compensated.
2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC), 2020
We have constructed a finite element simulation where we investigate the effects of wet-etch-indu... more We have constructed a finite element simulation where we investigate the effects of wet-etch-induced surface roughness on transmission and reflection of infrared light in the 8-12um band. A silicon wafer was wet-etched for 2 hours in a 10% KOH solution at 80°C, scanned in an atomic force microscope, and the surface profile was recreated in COMSOL. Simulated plane waves of light and varying angles of incidence were then allowed to pass through this surface and the resulting effects on the reflection and transmission were investigated. Roughness was then amplified to investigate the effects of increased surface roughness. For the wavelengths investigated, an increase in transmission of 8% could be seen up to an RMS surface roughness of 800nm followed by a decrease, while the angles investigated showed an RMS dependent increase in transmission between 20° and 40° for RMS surface roughness’ above 1000nm.
Hermetic packaging is a critical requirement for microbolometers to maintain long-term reliabilit... more Hermetic packaging is a critical requirement for microbolometers to maintain long-term reliability. A thinner diaphragm is desirable for vacuum packaging of microbolometers to obtain higher infrared light transmission. However, a thinner diaphragm results in a larger deflection due to the pressure difference from atmosphere, which may influence the IR signal focus and possibly cause mechanical failure. In this paper, the trade-offs of using thin single crystal silicon diaphragms as encapsulation for hermetic packaging of microbolometer arrays have been investigated in terms of the mechanical stability and optical performance using COMSOL and Zemax. The optical simulations show that the bending of the thin diaphragm has negligible effect on the infrared light focus with wavelengths from 8 to 14 µm. The mechanical simulations reveal that a thin diaphragm (thickness < 70 µm) with 10×10 mm2 area and a diaphragm (thickness < 90 µm) with 12×12 mm2 area will cause mechanical failure,...
IEEE Transactions on Components, Packaging and Manufacturing Technology
Combining Bulk Silicon Micromachining (BSM) with Diamond-Like Carbon (DLC) thin film technology c... more Combining Bulk Silicon Micromachining (BSM) with Diamond-Like Carbon (DLC) thin film technology can be favourable used to make high performance MEMS devices. We highlight the versatility of BSM combined with the unique features of our proprietary DLC thin film technology to make high performance MEMS devices at favourable cost. A high performance infrared emitter has been designed and commercialised, with the most distinctive features being high speed with a modulation depth of more than 100 HZ, broadband IR emission from 1 to 20 micrometers, more than 10% power efficiency, and a lifetime beyond 100,000 hours. These emitters are already in use in system applications like non-dispersive infrared gas sensors.
In this paper we present Finite Element (FEM) models for two different piezoresistive microphones... more In this paper we present Finite Element (FEM) models for two different piezoresistive microphones, fabricated using the MultiMEMS process at SensoNor Technologies in Norway with an additional Deep Reactive Ion Etching step done at Sintef. We simulated the membrane displacement and the Eigen frequencies of the systems. Furthermore, we evaluated the stresses in the suspending beams in order to estimate the changes in resistances of the fours piezoresistors. The relative sensitivity of the Wheatstone bridge has also been found to be 0.44 mV/(VPa) for the thin membrane microphone and 1.4 mV/(VPa) for the thick membrane microphone.
2017 16th International Superconductive Electronics Conference (ISEC), 2017
Quantum-accurate arbitrary voltage waveforms have been generated using electrical pulse driven Jo... more Quantum-accurate arbitrary voltage waveforms have been generated using electrical pulse driven Josephson junction arrays (JJAs) by several groups [1, 2]. An alternative method is to use optoelectronic components to convert the electrical pulse drive into an optical signal which is subsequently converted by a photodiode into an electrical drive signal connected directly to the JJA. This optoelectronic pulse drive system has several advantages. Due to the electrical isolation between electrical pulse drive and JJA, it is possible to connect several arrays in series without the requirement for complex electrical compensation circuits. This allows larger output voltages to be realized. An optoelectronic drive also offers the ability to easily tune pulse height, via continuous optical attenuation, allowing the drive signal to be tuned to the middle of the JJA constant voltage step giving optimum operation margins. We here present an optoelectronic pulse drive which forms part of a system...
Journal of Physics: Conference Series, 2016
On-chip supercapacitors hold the potential promise for serving as the energy storage units in int... more On-chip supercapacitors hold the potential promise for serving as the energy storage units in integrated circuit system, due to their much higher energy density in comparison with conventional dielectric capacitors, high power density and long-term cycling stability. In this study, nanoporous Au (NP-Au) film on-chip was employed as the electrode scaffold to help increase the electrolyte-accessible area for active material. Pseudo-capacitive polypyrrole (PPY) with high theoretical capacitance was deposited into the NP-Au scaffold, to construct the tailored NP-Au/PPY hybrid on-chip electrode with improved areal capacitance. Half cell test in threeelectrode system revealed the improved capacitor performance of nanoporous Au supported PPY electrode, compared to the densely packed PPY nanowire film electrode on planer Au substrate (Au/PPY). The areal capacitance of 37 mF/cm 2~1 0 mV/s, 32 mF/cm 2~5 0 mV/s, 28 mF/cm 2~1 00 mV/s, 16 mF/cm 2~5 00 mV/s, were offered by NP-Au/PPY. Also, the cycling performance was enhanced via using NP-Au scaffold. The developed NP-Au/PPY on-chip electrode demonstrated herein paves a feasible pathway to employ dealloying derived porous metal as the scaffold for improving both the energy density and cycling performance for supercapacitor electrodes.
Journal of Bioinformatics And Diabetes, 2016
Diabetes is a metabolic disorder that results in human body due to insulin deficiency, insulin re... more Diabetes is a metabolic disorder that results in human body due to insulin deficiency, insulin resistance or both. In the management of diabetes, glucose monitoring technology has been used for the last three decades. The aim of this review article is to describe concise and organized information about different techniques of non-invasive continuous blood glucose monitoring. Many research groups have been working to develop wearable sensors for continuous blood glucose monitoring, but at present, there are to our knowledge no commercially successful non-invasive glucose monitors on the market. To achieve an acceptable sensor system, a glucose sensor should have accuracy better than 15mg/dl (0.8 mmol/l). In future development, continuous glucose sensor systems may become predictable, selective, reliable and acceptable for patient use.
The usual way of calibrating detectors or devices is to treat them as black boxes. We measure the... more The usual way of calibrating detectors or devices is to treat them as black boxes. We measure the response when the device is excited with a well known signal. With this approach we throw away a lot of information that can be used to develop new calibration techniques. In the common European project chipS∙CALe (running from June 2019 – May 2022) we aim to develop self-induced silicon photodiodes capable of calibrating themselves in possibly remote operation. The trick is to exploit the intrinsic quantum properties of photodiodes that each photon generates exactly one electron-hole pair. This is a valid assumption to about 99.9% of common calibration standard photodiodes used in laboratories today when correcting for reflectance.
<jats:title>Abstract</jats:title> <jats:p>Pressure control have been going thro... more <jats:title>Abstract</jats:title> <jats:p>Pressure control have been going through steps of evolution. In the highlight of safety, reliability and control, the systems have been sturdy withstanding massive pressure and environmental impact to last the time of estimated life of well. Design have been emphasizing on sturdiness rather than intelligence and autonomy. Time moves on, sophistication levels rise in all parts of our industry. Sustainability and lower environmental impact of solutions grow from the young into business planning and democratic policies. Control lines of hydraulic systems posed risks to the environment as well as being costly in structure and maintenance. Condition monitoring helped ensure better maintenance planning and lowered the risk of breakdown, but still left a lot to be desired reaching for self-contained, self learning systems with low installation and maintenance costs, yet the safest approach.</jats:p> <jats:p>The next steps were taken towards electrification and digitization of pressure control systems, making short and undetermined strides over almost two decades. Still, the standards are not following the pace of technological progress. And when someone dares to pilot or demonstrate modern technology applied, the installations and operational procedures of the systems still need expensive distributed lines of power, of signals and control systems to ensure a swift and safe operation. The fly-by-wire principle applied in oil & gas is the operate-by-costly-technology-and-environmental-impact-lines.</jats:p> <jats:p>With the introduction of new and breaking technology in energy harvesting and storage, the playing field opens up towards fully automated systems with no need for expensive power lines or hydraulic control lines. The safety will be taken care of also off-grid, fully digitized. Should cabling of instrument signals be damaged, the system of tomorrow will still be up to par with the Safety Integrity Levels needed. New super-capacitors with an extra dense storage capacity being developed in partnership between the industry and the University of southeast Norway combined with an extremely low energy consuming actuation system with the fastest failsafe mechanism ever will ensure safety in all modes of operation, even with all lines down or consumed by flames. The paper aims to show how the technology works and underline why it will take a place in the future of well control and production.</jats:p>
Sensors
We performed a systematic study involving simulation and experimental techniques to develop induc... more We performed a systematic study involving simulation and experimental techniques to develop induced-junction silicon photodetectors passivated with thermally grown SiO2 and plasma-enhanced chemical vapor deposited (PECVD) SiNx thin films that show a record high quantum efficiency. We investigated PECVD SiNx passivation and optimized the film deposition conditions to minimize the recombination losses at the silicon–dielectric interface as well as optical losses. Depositions with varied process parameters were carried out on test samples, followed by measurements of minority carrier lifetime, fixed charge density, and optical absorbance and reflectance. Subsequently, the surface recombination velocity, which is the limiting factor for internal quantum deficiency (IQD), was obtained for different film depositions via 2D simulations where the measured effective lifetime, fixed charge density, and substrate parameters were used as input. The quantum deficiency of induced-junction photodi...
2017 16th International Superconductive Electronics Conference (ISEC), 2017
Faced with the challenges associated with sustainably feeding the world's growing population, the... more Faced with the challenges associated with sustainably feeding the world's growing population, the food industry is increasingly relying on operations research (OR) techniques to achieve economic, environmental, and social sustainability. It is therefore important to understand the context-specific model-oriented applications of OR techniques in the sustainable food supply chain (SFSC) domain. While existing food supply chain (FSC) reviews provide an excellent basis for this process, the explicit consideration of sustainability from a model-oriented perspective along with a structured outline of relevant SFSC research techniques are missing in extant literature. We attempt to fill this gap by reviewing 83 related scientific journal publications that utilize mathematical modeling techniques to address issues in SFSC. To this end, we first identify the salient dimensions that include economic, environmental, and social issues in SFSC. We then review the models and methods that use these dimensions to solve issues that arise in SFSC. We identify some of the main challenges in analytical modeling of SFSC as well as future research directions.
Applied Physics Letters, 2021
Strong magnon-photon coupling with chip-integrated YIG in the zero-temperature limit Applied Phys... more Strong magnon-photon coupling with chip-integrated YIG in the zero-temperature limit Applied Physics Letters 119, 033502 (2021);
2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC)
We have constructed a finite element simulation where we investigate the effects of wet-etchinduc... more We have constructed a finite element simulation where we investigate the effects of wet-etchinduced surface roughness on transmission and reflection of infrared light in the 8-12um band. A silicon wafer was wet-etched for 2 hours in a 10% KOH solution at 80°C, scanned in an atomic force microscope, and the surface profile was recreated in COMSOL. Simulated plane waves of light and varying angles of incidence were then allowed to pass through this surface and the resulting effects on the reflection and transmission were investigated. Roughness was then amplified to investigate the effects of increased surface roughness. For the wavelengths investigated, an increase in transmission of 8% could be seen up to an RMS surface roughness of 800nm followed by a decrease, while the angles investigated showed an RMS dependent increase in transmission between 20° and 40° for RMS surface roughness' above 1000nm.
Journal of Micromechanics and Microengineering, 2010
Low cost CO2 gas sensors for demand-controlled ventilation can lower the energy consumption and i... more Low cost CO2 gas sensors for demand-controlled ventilation can lower the energy consumption and increase comfort and hence productivity in office buildings and schools. The photo aoustic principle offers very high sensitivity and selectivity when used for gas trace analysis. Current systems are too expensive and large for in-duct mounting. Here, the design, modeling, fabrication and characterization of two micromachined
Sensors
In this article, we present our research achievements regarding the development of a remote sensi... more In this article, we present our research achievements regarding the development of a remote sensing system for motor pulse acquisition, as a first step towards a complete neuroprosthetic arm. We present the fabrication process of an implantable electrode for nerve impulse acquisition, together with an innovative wirelessly controlled system. In our study, these were combined into an implantable device for attachment to peripheral nerves. Mechanical and biocompatibility tests were performed, as well as in vivo testing on pigs using the developed system. This testing and the experimental results are presented in a comprehensive manner, demonstrating that the system is capable of accomplishing the requirements of its designed application. Most significantly, neural electrical signals were acquired and transmitted out of the body during animal experiments, which were conducted according to ethical regulations in the field.
Day 2 Tue, November 16, 2021, 2021
E&P companies are increasingly challenged with cost-effective development or upgrade of remote fi... more E&P companies are increasingly challenged with cost-effective development or upgrade of remote fields, ensuring crew safety and regulatory requirements for reducing environmental impact. Remote operations and unmanned platforms have significantly lower CO2 emissions and lowerCAPEX and OPEX in areas of sparse infrastructure. Complete electrification of safety critical control systems is key to maintain safe production while digitization, automation and condition based maintenance reduce required on-site personnel. An all-electric wellhead- and production tree valve actuator for handling emergency situations has been developed under a Joint Industry Project by Equinor, Baker Hughes and TECHNI. PACT utilize a completely new, patent pending failsafe mechanism that is inherently safe without requirement for redundancy. PACT contains an embedded controller and sensors with extremely low power consumption rendering it well suited for solar/alternate power sources. A new super-capacitor is ...
Sensors and Actuators, 1986
... D CAPACITIVE PRESSURE SENSOR WITH FREQUENCY-MODULATED OUTPUT* A HANNEBORG, T - E HANSEN, PA O... more ... D CAPACITIVE PRESSURE SENSOR WITH FREQUENCY-MODULATED OUTPUT* A HANNEBORG, T - E HANSEN, PA OHLCKERS, E CARLSON, B DAHL ... the middle is the spring element chip with a pressure-sensitive di-aphragm which contains a centre boss structure The ...
An ongoing research and development program in the field of silicon radiation sensor systems for ... more An ongoing research and development program in the field of silicon radiation sensor systems for gamma and X-ray detection is presented. In particular, the activities on double sided/single sided silicon radiation sensors and in front end electronics ASIC's (Application Specific Integrated Circuits) are described.
Transducers ’01 Eurosensors XV, 2001
A miniature photoacoustic (PA) gas sensing module has been made using silicon microsystem technol... more A miniature photoacoustic (PA) gas sensing module has been made using silicon microsystem technology to make two key components: 1) A high-speed infrared emitter (IRE) with a diamond-like carbon thin film resistor on a silicon micromachined diaphragm as support structure. 2) A silicon micromachined microphone to sense the photoacoustic signal. The IRE is manufactured by Patinor Coating by a proprietary process, while the silicon microphone is manufactured in a multi-project wafer (MPW) foundry service called NORMIC, with SensoNor as the foundry. The silicon microphone was designed by SINTEF. The complete module also consists of analog and digital system with control logic, signal conditioning and interface electronics. A patented scheme with the target gas as a selective filter is giving high selectivity. Preliminary test and evaluation of a prototype for carbon dioxide monitoring show that the principle to achieve high selectivity is working. A resolution better than 0.5 ppm and an accuracy around 10 ppm have be achieved, with a potential towards better than 5 ppm, provided the relative high thermal drifts are compensated.
2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC), 2020
We have constructed a finite element simulation where we investigate the effects of wet-etch-indu... more We have constructed a finite element simulation where we investigate the effects of wet-etch-induced surface roughness on transmission and reflection of infrared light in the 8-12um band. A silicon wafer was wet-etched for 2 hours in a 10% KOH solution at 80°C, scanned in an atomic force microscope, and the surface profile was recreated in COMSOL. Simulated plane waves of light and varying angles of incidence were then allowed to pass through this surface and the resulting effects on the reflection and transmission were investigated. Roughness was then amplified to investigate the effects of increased surface roughness. For the wavelengths investigated, an increase in transmission of 8% could be seen up to an RMS surface roughness of 800nm followed by a decrease, while the angles investigated showed an RMS dependent increase in transmission between 20° and 40° for RMS surface roughness’ above 1000nm.
Hermetic packaging is a critical requirement for microbolometers to maintain long-term reliabilit... more Hermetic packaging is a critical requirement for microbolometers to maintain long-term reliability. A thinner diaphragm is desirable for vacuum packaging of microbolometers to obtain higher infrared light transmission. However, a thinner diaphragm results in a larger deflection due to the pressure difference from atmosphere, which may influence the IR signal focus and possibly cause mechanical failure. In this paper, the trade-offs of using thin single crystal silicon diaphragms as encapsulation for hermetic packaging of microbolometer arrays have been investigated in terms of the mechanical stability and optical performance using COMSOL and Zemax. The optical simulations show that the bending of the thin diaphragm has negligible effect on the infrared light focus with wavelengths from 8 to 14 µm. The mechanical simulations reveal that a thin diaphragm (thickness < 70 µm) with 10×10 mm2 area and a diaphragm (thickness < 90 µm) with 12×12 mm2 area will cause mechanical failure,...
IEEE Transactions on Components, Packaging and Manufacturing Technology
Combining Bulk Silicon Micromachining (BSM) with Diamond-Like Carbon (DLC) thin film technology c... more Combining Bulk Silicon Micromachining (BSM) with Diamond-Like Carbon (DLC) thin film technology can be favourable used to make high performance MEMS devices. We highlight the versatility of BSM combined with the unique features of our proprietary DLC thin film technology to make high performance MEMS devices at favourable cost. A high performance infrared emitter has been designed and commercialised, with the most distinctive features being high speed with a modulation depth of more than 100 HZ, broadband IR emission from 1 to 20 micrometers, more than 10% power efficiency, and a lifetime beyond 100,000 hours. These emitters are already in use in system applications like non-dispersive infrared gas sensors.
In this paper we present Finite Element (FEM) models for two different piezoresistive microphones... more In this paper we present Finite Element (FEM) models for two different piezoresistive microphones, fabricated using the MultiMEMS process at SensoNor Technologies in Norway with an additional Deep Reactive Ion Etching step done at Sintef. We simulated the membrane displacement and the Eigen frequencies of the systems. Furthermore, we evaluated the stresses in the suspending beams in order to estimate the changes in resistances of the fours piezoresistors. The relative sensitivity of the Wheatstone bridge has also been found to be 0.44 mV/(VPa) for the thin membrane microphone and 1.4 mV/(VPa) for the thick membrane microphone.
2017 16th International Superconductive Electronics Conference (ISEC), 2017
Quantum-accurate arbitrary voltage waveforms have been generated using electrical pulse driven Jo... more Quantum-accurate arbitrary voltage waveforms have been generated using electrical pulse driven Josephson junction arrays (JJAs) by several groups [1, 2]. An alternative method is to use optoelectronic components to convert the electrical pulse drive into an optical signal which is subsequently converted by a photodiode into an electrical drive signal connected directly to the JJA. This optoelectronic pulse drive system has several advantages. Due to the electrical isolation between electrical pulse drive and JJA, it is possible to connect several arrays in series without the requirement for complex electrical compensation circuits. This allows larger output voltages to be realized. An optoelectronic drive also offers the ability to easily tune pulse height, via continuous optical attenuation, allowing the drive signal to be tuned to the middle of the JJA constant voltage step giving optimum operation margins. We here present an optoelectronic pulse drive which forms part of a system...