Ronald Otten - Academia.edu (original) (raw)
Papers by Ronald Otten
The Journal of Chemical Physics, 2012
DOI to the publisher's website. • The final author version and the galley proof are versions of t... more DOI to the publisher's website. • The final author version and the galley proof are versions of the publication after peer review. • The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights. • Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal. If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement:
Langmuir, 2011
We studied, by means of polarized light microscopy, the shape and director field of nematic tacto... more We studied, by means of polarized light microscopy, the shape and director field of nematic tactoids as a function of their size in dispersions of colloidal gibbsite platelets in polar and apolar solvents. Because of the homeotropic anchoring of the platelets to the interface, we found large tactoids to be spherical with a radial director field, whereas small tactoids turn out to have an oblate shape and a homogeneous director field, in accordance with theoretical predictions. The transition from a radial to a homogeneous director field seems to proceed via two different routes depending in our case on the solvent. In one route, the what presumably is a hedgehog point defect in the center of the tactoid transforms into a ring defect with a radius that presumably goes to infinity with decreasing drop size. In the other route, the hedgehog defect is displaced from the center to the edge of the tactoid, where it becomes virtual again going to infinity with decreasing drop size. Furthermore, quantitative analysis of the tactoid properties provides us with useful information on the ratio of the splay elastic constant and the anchoring strength and the ratio of the anchoring strength and the surface tension.
a Department of Polymer Chemistry, Technische Universiteit Eindhoven, P.O.Box 513, 5600 MB Eindho... more a Department of Polymer Chemistry, Technische Universiteit Eindhoven, P.O.Box 513, 5600 MB Eindhoven, The Netherlands. b Laboratory of Materials and Interface Chemistry, Technische Universiteit Eindhoven, P.O. Box 513, 5600 MB Eindhoven, The Netherlands. c Theory of Polymers and Soft Matter and Eindhoven Polymer Laboratories, Technische Universiteit Eindhoven, P.O. Box 513, 5600 MB Eindhoven, The Netherlands. d School of Physics, Centre for Research on Adaptive Nanostructures & Nanodevices (CRANN), Trinity College Dublin, Dublin 2, Ireland.
The number of masks required to produce an integrated circuit has increased tremendously over the... more The number of masks required to produce an integrated circuit has increased tremendously over the past years. The main reason for this is that a single layer mask exposure and etch was no longer sufficient to meet the required pattern density. A solution was found in the application of multi-patterning steps, including multiple masks, before the final pattern is transferred into the underlying substrate. Consequently, the mask-to-mask contribution as part of the overall on-product (intra-layer) overlay budget could not be neglected anymore. While the tight on-product overlay specifications (< 3-nm) were initially only requested for the intra-layer (e.g. multi Litho Etch Litho Etch) overlay performance, recently these tight requirements are also imposed for the layer-to-layer overlay. Recently, we reported on an extensive study in which the mask-to-mask overlay contribution as determined by the PROVE mask registration tool was correlated with actual on-wafer measurements. Two ASML...
A theoretical study is presented on the dynamics of two-dimensional nonautonomous velocity fields... more A theoretical study is presented on the dynamics of two-dimensional nonautonomous velocity fields, with an application to point vortex flows. Flows induced by mutually advected points vortices with negligible viscosity are examined, and transport barriers and chaotic regions are determined. An arbitrary number of point vortices of equal strength placed on a circle, with equal distances between neighbouring vortices, induce a stationary velocity field in a frame that rotates with the system. In such a setup, there are two hyperbolic critical points for every vortex. The corresponding separatrices are independent of the vortex strength and scale invariant. The hyperbolic critical points have an analogue in time dependent flows: hyperbolic trajectories, the associated invariant manifolds of which form the transport barriers. A path of a hyperbolic critical point and a hyperbolic trajectory coincide in stationary flows, and in the case of small time dependence, they remain close togethe...
Metrology, Inspection, and Process Control for Microlithography XXXIII
35th European Mask and Lithography Conference (EMLC 2019)
Langmuir, Feb 1, 2009
A theoretical study is presented on the shape of the interface between coexisting isotropic and n... more A theoretical study is presented on the shape of the interface between coexisting isotropic and nematic phases in contact with a solid vertical wall. The interface profile is determined by a competition between three surface tensions, two anchoring strengths, gravity, and the Frank elastic constants of the director field. In the weak-anchoring limit, the director field is rigid and uniform, and we find the capillary rise height to depend nontrivially on the orientation of the director field relative to the solid-fluid interface. For strong surface anchoring, the director field adjusts to the preferred homeotropic or planar anchoring at the solid-liquid and liquid-liquid interfaces. The shape of the interfacial profile is now a function of the balance between the surface energy and the splay and bend elastic deformation energies. Interestingly, for both weak and strong anchoring the profile decays nonmonotonically albeit only very weakly so. We compare our theory with recent capillary rise experiments on coexisting isotropic and nematic phases of colloidal platelets [van der Beek et al. Phys. ReV. Lett. 2006, 97, 087801] and are able to extract from the experimental data the surface tension and the anchoring strength.
Physical Review Letters, 2012
DOI to the publisher's website. • The final author version and the galley proof are versions of t... more DOI to the publisher's website. • The final author version and the galley proof are versions of the publication after peer review. • The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights. • Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal. If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement:
Physical Review Letters, 2009
We show that a generalized connectedness percolation theory can be made tractable for a large cla... more We show that a generalized connectedness percolation theory can be made tractable for a large class of anisotropic particle mixtures that potentially contain an infinite number of components. By applying our methodology to carbon-nanotube composites, we explain the huge variations found in the onset of electrical conduction in terms of a percolation threshold that turns out to be sensitive to polydispersity in particle length and diameter. The theory also allows us to model the influence of the presence of nonconductive species in the mixture, such as is the case for single-walled nanotubes, showing that these raise the percolation threshold proportionally to their abundance.
Physical Review E, 2012
We present a generalized approach to compute the shape and internal structure of two-dimensional ... more We present a generalized approach to compute the shape and internal structure of two-dimensional nematic domains. By using conformal mappings, we are able to compute the director field for a given domain shape that we choose from a rich class, which includes drops with large and small aspect ratios, and sharp domain tips as well as smooth ones. Results are assembled in a phase diagram that for given domain size, surface tension, anchoring strength, and elastic constant shows the transitions from a homogeneous to a bipolar director field, from circular to elongated droplets, and from sharp to smooth domain tips. We find a previously unaccounted regime, where the drop is nearly circular, the director field bipolar and the tip rounded. We also find that bicircular director fields, with foci that lie outside the domain, provide a remarkably accurate description of the optimal director field for a large range of values of the various shape parameters.
Langmuir, 2009
A theoretical study is presented on the shape of the interface between coexisting isotropic and n... more A theoretical study is presented on the shape of the interface between coexisting isotropic and nematic phases in contact with a solid vertical wall. The interface profile is determined by a competition between three surface tensions, two anchoring strengths, gravity, and the Frank elastic constants of the director field. In the weak-anchoring limit, the director field is rigid and uniform, and we find the capillary rise height to depend nontrivially on the orientation of the director field relative to the solid-fluid interface. For strong surface anchoring, the director field adjusts to the preferred homeotropic or planar anchoring at the solid-liquid and liquid-liquid interfaces. The shape of the interfacial profile is now a function of the balance between the surface energy and the splay and bend elastic deformation energies. Interestingly, for both weak and strong anchoring the profile decays nonmonotonically albeit only very weakly so. We compare our theory with recent capillary rise experiments on coexisting isotropic and nematic phases of colloidal platelets [van der Beek et al. Phys. ReV. Lett. 2006, 97, 087801] and are able to extract from the experimental data the surface tension and the anchoring strength.
The Journal of Chemical Physics, 2011
DOI to the publisher's website. • The final author version and the galley proof are versions of t... more DOI to the publisher's website. • The final author version and the galley proof are versions of the publication after peer review. • The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights. • Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal. If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement:
The Journal of Chemical Physics, 2011
DOI to the publisher's website. • The final author version and the galley proof are versions of t... more DOI to the publisher's website. • The final author version and the galley proof are versions of the publication after peer review. • The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights. • Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal. If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement:
The Journal of Chemical Physics, 2012
DOI to the publisher's website. • The final author version and the galley proof are versions of t... more DOI to the publisher's website. • The final author version and the galley proof are versions of the publication after peer review. • The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights. • Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal. If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement:
Journal of Physical Chemistry B, 2009
We investigated by means of polarization microscopy the influence of a magnetic field on the shap... more We investigated by means of polarization microscopy the influence of a magnetic field on the shape and director field of nematic droplets in dispersions of plate-like colloidal particles. To interpret the experimental observations, we put forward a simple theory in which we presume strong anchoring and a sphero-cylindrical droplet shape. This model allows us to extract values for the interfacial tension and the splay elastic constant from the experimental data.
The Journal of Chemical Physics, 2012
DOI to the publisher's website. • The final author version and the galley proof are versions of t... more DOI to the publisher's website. • The final author version and the galley proof are versions of the publication after peer review. • The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights. • Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal. If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement:
Langmuir, 2011
We studied, by means of polarized light microscopy, the shape and director field of nematic tacto... more We studied, by means of polarized light microscopy, the shape and director field of nematic tactoids as a function of their size in dispersions of colloidal gibbsite platelets in polar and apolar solvents. Because of the homeotropic anchoring of the platelets to the interface, we found large tactoids to be spherical with a radial director field, whereas small tactoids turn out to have an oblate shape and a homogeneous director field, in accordance with theoretical predictions. The transition from a radial to a homogeneous director field seems to proceed via two different routes depending in our case on the solvent. In one route, the what presumably is a hedgehog point defect in the center of the tactoid transforms into a ring defect with a radius that presumably goes to infinity with decreasing drop size. In the other route, the hedgehog defect is displaced from the center to the edge of the tactoid, where it becomes virtual again going to infinity with decreasing drop size. Furthermore, quantitative analysis of the tactoid properties provides us with useful information on the ratio of the splay elastic constant and the anchoring strength and the ratio of the anchoring strength and the surface tension.
a Department of Polymer Chemistry, Technische Universiteit Eindhoven, P.O.Box 513, 5600 MB Eindho... more a Department of Polymer Chemistry, Technische Universiteit Eindhoven, P.O.Box 513, 5600 MB Eindhoven, The Netherlands. b Laboratory of Materials and Interface Chemistry, Technische Universiteit Eindhoven, P.O. Box 513, 5600 MB Eindhoven, The Netherlands. c Theory of Polymers and Soft Matter and Eindhoven Polymer Laboratories, Technische Universiteit Eindhoven, P.O. Box 513, 5600 MB Eindhoven, The Netherlands. d School of Physics, Centre for Research on Adaptive Nanostructures & Nanodevices (CRANN), Trinity College Dublin, Dublin 2, Ireland.
The number of masks required to produce an integrated circuit has increased tremendously over the... more The number of masks required to produce an integrated circuit has increased tremendously over the past years. The main reason for this is that a single layer mask exposure and etch was no longer sufficient to meet the required pattern density. A solution was found in the application of multi-patterning steps, including multiple masks, before the final pattern is transferred into the underlying substrate. Consequently, the mask-to-mask contribution as part of the overall on-product (intra-layer) overlay budget could not be neglected anymore. While the tight on-product overlay specifications (< 3-nm) were initially only requested for the intra-layer (e.g. multi Litho Etch Litho Etch) overlay performance, recently these tight requirements are also imposed for the layer-to-layer overlay. Recently, we reported on an extensive study in which the mask-to-mask overlay contribution as determined by the PROVE mask registration tool was correlated with actual on-wafer measurements. Two ASML...
A theoretical study is presented on the dynamics of two-dimensional nonautonomous velocity fields... more A theoretical study is presented on the dynamics of two-dimensional nonautonomous velocity fields, with an application to point vortex flows. Flows induced by mutually advected points vortices with negligible viscosity are examined, and transport barriers and chaotic regions are determined. An arbitrary number of point vortices of equal strength placed on a circle, with equal distances between neighbouring vortices, induce a stationary velocity field in a frame that rotates with the system. In such a setup, there are two hyperbolic critical points for every vortex. The corresponding separatrices are independent of the vortex strength and scale invariant. The hyperbolic critical points have an analogue in time dependent flows: hyperbolic trajectories, the associated invariant manifolds of which form the transport barriers. A path of a hyperbolic critical point and a hyperbolic trajectory coincide in stationary flows, and in the case of small time dependence, they remain close togethe...
Metrology, Inspection, and Process Control for Microlithography XXXIII
35th European Mask and Lithography Conference (EMLC 2019)
Langmuir, Feb 1, 2009
A theoretical study is presented on the shape of the interface between coexisting isotropic and n... more A theoretical study is presented on the shape of the interface between coexisting isotropic and nematic phases in contact with a solid vertical wall. The interface profile is determined by a competition between three surface tensions, two anchoring strengths, gravity, and the Frank elastic constants of the director field. In the weak-anchoring limit, the director field is rigid and uniform, and we find the capillary rise height to depend nontrivially on the orientation of the director field relative to the solid-fluid interface. For strong surface anchoring, the director field adjusts to the preferred homeotropic or planar anchoring at the solid-liquid and liquid-liquid interfaces. The shape of the interfacial profile is now a function of the balance between the surface energy and the splay and bend elastic deformation energies. Interestingly, for both weak and strong anchoring the profile decays nonmonotonically albeit only very weakly so. We compare our theory with recent capillary rise experiments on coexisting isotropic and nematic phases of colloidal platelets [van der Beek et al. Phys. ReV. Lett. 2006, 97, 087801] and are able to extract from the experimental data the surface tension and the anchoring strength.
Physical Review Letters, 2012
DOI to the publisher's website. • The final author version and the galley proof are versions of t... more DOI to the publisher's website. • The final author version and the galley proof are versions of the publication after peer review. • The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights. • Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal. If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement:
Physical Review Letters, 2009
We show that a generalized connectedness percolation theory can be made tractable for a large cla... more We show that a generalized connectedness percolation theory can be made tractable for a large class of anisotropic particle mixtures that potentially contain an infinite number of components. By applying our methodology to carbon-nanotube composites, we explain the huge variations found in the onset of electrical conduction in terms of a percolation threshold that turns out to be sensitive to polydispersity in particle length and diameter. The theory also allows us to model the influence of the presence of nonconductive species in the mixture, such as is the case for single-walled nanotubes, showing that these raise the percolation threshold proportionally to their abundance.
Physical Review E, 2012
We present a generalized approach to compute the shape and internal structure of two-dimensional ... more We present a generalized approach to compute the shape and internal structure of two-dimensional nematic domains. By using conformal mappings, we are able to compute the director field for a given domain shape that we choose from a rich class, which includes drops with large and small aspect ratios, and sharp domain tips as well as smooth ones. Results are assembled in a phase diagram that for given domain size, surface tension, anchoring strength, and elastic constant shows the transitions from a homogeneous to a bipolar director field, from circular to elongated droplets, and from sharp to smooth domain tips. We find a previously unaccounted regime, where the drop is nearly circular, the director field bipolar and the tip rounded. We also find that bicircular director fields, with foci that lie outside the domain, provide a remarkably accurate description of the optimal director field for a large range of values of the various shape parameters.
Langmuir, 2009
A theoretical study is presented on the shape of the interface between coexisting isotropic and n... more A theoretical study is presented on the shape of the interface between coexisting isotropic and nematic phases in contact with a solid vertical wall. The interface profile is determined by a competition between three surface tensions, two anchoring strengths, gravity, and the Frank elastic constants of the director field. In the weak-anchoring limit, the director field is rigid and uniform, and we find the capillary rise height to depend nontrivially on the orientation of the director field relative to the solid-fluid interface. For strong surface anchoring, the director field adjusts to the preferred homeotropic or planar anchoring at the solid-liquid and liquid-liquid interfaces. The shape of the interfacial profile is now a function of the balance between the surface energy and the splay and bend elastic deformation energies. Interestingly, for both weak and strong anchoring the profile decays nonmonotonically albeit only very weakly so. We compare our theory with recent capillary rise experiments on coexisting isotropic and nematic phases of colloidal platelets [van der Beek et al. Phys. ReV. Lett. 2006, 97, 087801] and are able to extract from the experimental data the surface tension and the anchoring strength.
The Journal of Chemical Physics, 2011
DOI to the publisher's website. • The final author version and the galley proof are versions of t... more DOI to the publisher's website. • The final author version and the galley proof are versions of the publication after peer review. • The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights. • Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal. If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement:
The Journal of Chemical Physics, 2011
DOI to the publisher's website. • The final author version and the galley proof are versions of t... more DOI to the publisher's website. • The final author version and the galley proof are versions of the publication after peer review. • The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights. • Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal. If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement:
The Journal of Chemical Physics, 2012
DOI to the publisher's website. • The final author version and the galley proof are versions of t... more DOI to the publisher's website. • The final author version and the galley proof are versions of the publication after peer review. • The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights. • Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal. If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement:
Journal of Physical Chemistry B, 2009
We investigated by means of polarization microscopy the influence of a magnetic field on the shap... more We investigated by means of polarization microscopy the influence of a magnetic field on the shape and director field of nematic droplets in dispersions of plate-like colloidal particles. To interpret the experimental observations, we put forward a simple theory in which we presume strong anchoring and a sphero-cylindrical droplet shape. This model allows us to extract values for the interfacial tension and the splay elastic constant from the experimental data.