Shinya Morita - Academia.edu (original) (raw)

Papers by Shinya Morita

The Proceedings of The Manufacturing & Machine Tool Conference, 2006

UltrapredisLon optical components require ultra 一 丘ne smcoth surfaoe qUality of sub −nanometer or... more UltrapredisLon optical components require ultra 一 丘ne smcoth surfaoe qUality of sub −nanometer or sub −angstrx) m 血 Ra． 1b achieve these 【 reqUirementS ， Ultapredsion on −machine measuring system in very important ， by which the pm 飢 e 皿 easurement and evaluation iS conducted on the macl 血 e ，

The Proceedings of Ibaraki District Conference, 2004

International Journal of High Technology Ceramics, 1987

Initiatives of Precision Engineering at the Beginning of a Millennium

ABSTRACT In this study, we attempted to develop a desk-top 4-axes machine “TRIDER-X” mounting a E... more ABSTRACT In this study, we attempted to develop a desk-top 4-axes machine “TRIDER-X” mounting a ELID system. This paper describes concepts and history of the machine, and detailed investigations on the performance of the machine. A concave mirror was ground using the desk-top 4-axes machine “TRIDER-X” mounting an ELID system. Good form accuracy was achieved.

International Conference on Space Optics — ICSO 2004

Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2021

In recent years, aspherical optics have been widely used because of their high image quality, com... more In recent years, aspherical optics have been widely used because of their high image quality, compact volume, and low weight (Fang et al., 2013). General consumer goods, such as mobile phones, cameras, and head-worn displays (Bauer et al., 2013), as well as state-of-the-art technologies, such as neutron-focusing mirrors (Hosobata et al., 2019) and aerospace applications, have employed them. However, cutting a high-precision non-axisymmetric optical surface is a significant challenge in the manufacturing industry. Current multiple-axis ultra-precision machine tools are capable of precisely machining complex free-form surfaces. However, form errors still remain due to machine motion errors and the conditions of the machining process. The factors that lead to a decrease in shape accuracy include axis straightness, scale interpolation errors, thermal deformations, and vibrations. Although it is possible to control or avoid some error factors, residual errors still need to be reduced or removed using a compensation method (Zhang et al., 2019, Liu, 1999). One type of form error that is relatively difficult to measure and compensate for is waviness or ripples with a spatial frequency ranging from 0.1 millimeters to several millimeters. Such errors are called mid-spatial frequency (MSF) profile errors, and they can affect the performance of various high-precision optical systems (Aikens et al., 2008). Thus, their removal has been a major focus in optics manufacturing. An essential step in compensating for these MSF form errors is obtaining the surface profile of the machined

Micro-aspheric lenses molded by micro-aspheric ceramic molds are increasing in the optical system... more Micro-aspheric lenses molded by micro-aspheric ceramic molds are increasing in the optical systems such as digital cameras and blu-ray players. To finish the molds with high accuracy and low surface roughness, in this paper, the micro-aspheric polishing experiments are conducted by using the developed 5-axis magnetostrictive vibration-assisted polishing machine. The magnetostrictive vibrating polisher can generate a lateral vibration at 9.2 kHz with the amplitude of 30 μm and the polishing pressure is controlled by a balance adjustment mechanism. The motion resolution of the X-Y-Z table is 0.1 μm in each direction. The C-axis rotary table is mounted on a B-axis tilting table and the workpiece is mounted on the C-axis rotary table with a vacuum chuck. According to the polishing experiments, the form accuracy was improved to 200 nm P-V and the surface roughness to 10 nm Rz (1 nm Ra).

Microscopy and Microanalysis, 2020

The Proceedings of The Manufacturing & Machine Tool Conference, 2014

The Proceedings of The Manufacturing & Machine Tool Conference, 2014

Neutron analysis technique using ncutron fecus 血g mirrers are highly demanded for basic researche... more Neutron analysis technique using ncutron fecus 血g mirrers are highly demanded for basic researches efhigh tensile streng 血 steel sheets ， proteins and polymer materials ． Although we pnDposed a new £abricating method of multi − segmented ne 吐 ロm fbcusing m 血 ors using metal substrates ， it was difficult tO measure su 曲 cc pm 丘le preoisely ． This paper reports a development of non ・ contaCt fast speed on − machine measurement probe in order ω measure the fabricated mirror profile and results ofthe profile measurement of super mirrors deposited on polished substrates ．

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2005

This paper introduces a schnidt lens manufacturing process, focusing on its axis-aymrnetr{c asphe... more This paper introduces a schnidt lens manufacturing process, focusing on its axis-aymrnetr{c aspherical surface manufacturing by synthesizing ELID grinding and arc-enveloped grinding method. For test experiment, an offaxis spherical surface was ground to obtain suitable grinding and ELID conditions. [then, the large axis-aymmetric aspherical concave and convex were ground on the developed grinding system using #325, #1200 diarnond cast-iron bond wheels, Grinding characteristics such as attainable form accuracy, surface rougliness were investigated.

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2005

The designed fbrm and surface quality of focusing neutron mirror is a main factor affecting the p... more The designed fbrm and surface quality of focusing neutron mirror is a main factor affecting the perfbrmance of the neutron optical devices. In order to improve the situation, one ofthe authors designed a new type ofmirror for focusing neutron beams, Its form is an inside deep rotary paraboloid and the material used is quartz. Ib test the optical perfbrmances of the designed parameters and simplify the fabrication process, the first fabrication was to grind the lf4 ef the mirror, cut along the symmetric axis by two perpendicular planes, thus the surface to be ground is an outside symmetric paraboloid. The fabrication process was investigated in this experiment. [Ihe workpiece was first ground applying the ELID method with #325 and #1200 cast iron bonding diamond abrasiye wheels. Then the ground surface was polished with Ce02 slurry. The finished surface roughness was Ra2.0nm and rms2.4nm and the fomi error was about 2pm. After a coating process, its properties of focusing neutron beams were investigated. [[1ie optical properties obtained included a refiecting rate of42%, gain 1.9 and 2.3mmx1O.Imm beam focused to 1.6mmx2.1mm.

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2005

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2005

ELID (Electrolytic In-process Dressing) grinding method is possible to achieve ultraprecision smo... more ELID (Electrolytic In-process Dressing) grinding method is possible to achieve ultraprecision smooth surface of hard and brittle materials. To obtain ultra smooth surface required such as micro lens and its metal mold, fina] polish process which required long time after conventional grinding process was necessary. ELID grinding method using an ultraprecision grinding machine tool will be yery effective in reducing the time required for finial polishing process. ln this paper, a fabrication experiment using this ELID grinding process was studied fbr Gradient Index (6RIN) lens. Especially, as a nano-precision rnicro-ELID grinding machining for GRIN lens, we studies on conditions ofELID grinding using a desk-top type 4 axes machine fbr development ofGRIN aspherical lens with paraboloidal form, and GRIN prism.

The Proceedings of Conference of Kanto Branch, 2001

The Proceedings of Ibaraki District Conference, 2013

Yutaka YAMAGATA ， RIKEN (The lnstitute ofPhysica1 and Chemical Research) ， Hirosawa2 − 1， Wakou −... more Yutaka YAMAGATA ， RIKEN (The lnstitute ofPhysica1 and Chemical Research) ， Hirosawa2 − 1， Wakou − shi， Saitama Recently ， it is portant tG car ワ out optica 貰control ofthe neutron beam ． There is a neutron mirror in the method and electro −1ess plated NiP surface is ralsed as a material candidate ． This report describes the result of an

IEEJ Transactions on Sensors and Micromachines, 1997

Journal of the Japan Society for Precision Engineering, 2013

Key Engineering Materials, 2005

This paper describes an ultra precision polishing method of aspherical mirrors, and the fundament... more This paper describes an ultra precision polishing method of aspherical mirrors, and the fundamental research on polishing characteristics. The aspherical mirrors with a diameter of about 30mm made by fused silica glass and CVD-SiC were ELID (electrolytic in-process dressing)-ground to high form accuracy with #4000 cast iron bonded diamond wheel, and then polished with a small polishing tool. As the result, final surface roughness of 1.4nmRa and form accuracy of 1.2 μm was obtained.

The Proceedings of The Manufacturing & Machine Tool Conference, 2006

UltrapredisLon optical components require ultra 一 丘ne smcoth surfaoe qUality of sub −nanometer or... more UltrapredisLon optical components require ultra 一 丘ne smcoth surfaoe qUality of sub −nanometer or sub −angstrx) m 血 Ra． 1b achieve these 【 reqUirementS ， Ultapredsion on −machine measuring system in very important ， by which the pm 飢 e 皿 easurement and evaluation iS conducted on the macl 血 e ，

The Proceedings of Ibaraki District Conference, 2004

International Journal of High Technology Ceramics, 1987

Initiatives of Precision Engineering at the Beginning of a Millennium

ABSTRACT In this study, we attempted to develop a desk-top 4-axes machine “TRIDER-X” mounting a E... more ABSTRACT In this study, we attempted to develop a desk-top 4-axes machine “TRIDER-X” mounting a ELID system. This paper describes concepts and history of the machine, and detailed investigations on the performance of the machine. A concave mirror was ground using the desk-top 4-axes machine “TRIDER-X” mounting an ELID system. Good form accuracy was achieved.

International Conference on Space Optics — ICSO 2004

Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2021

In recent years, aspherical optics have been widely used because of their high image quality, com... more In recent years, aspherical optics have been widely used because of their high image quality, compact volume, and low weight (Fang et al., 2013). General consumer goods, such as mobile phones, cameras, and head-worn displays (Bauer et al., 2013), as well as state-of-the-art technologies, such as neutron-focusing mirrors (Hosobata et al., 2019) and aerospace applications, have employed them. However, cutting a high-precision non-axisymmetric optical surface is a significant challenge in the manufacturing industry. Current multiple-axis ultra-precision machine tools are capable of precisely machining complex free-form surfaces. However, form errors still remain due to machine motion errors and the conditions of the machining process. The factors that lead to a decrease in shape accuracy include axis straightness, scale interpolation errors, thermal deformations, and vibrations. Although it is possible to control or avoid some error factors, residual errors still need to be reduced or removed using a compensation method (Zhang et al., 2019, Liu, 1999). One type of form error that is relatively difficult to measure and compensate for is waviness or ripples with a spatial frequency ranging from 0.1 millimeters to several millimeters. Such errors are called mid-spatial frequency (MSF) profile errors, and they can affect the performance of various high-precision optical systems (Aikens et al., 2008). Thus, their removal has been a major focus in optics manufacturing. An essential step in compensating for these MSF form errors is obtaining the surface profile of the machined

Micro-aspheric lenses molded by micro-aspheric ceramic molds are increasing in the optical system... more Micro-aspheric lenses molded by micro-aspheric ceramic molds are increasing in the optical systems such as digital cameras and blu-ray players. To finish the molds with high accuracy and low surface roughness, in this paper, the micro-aspheric polishing experiments are conducted by using the developed 5-axis magnetostrictive vibration-assisted polishing machine. The magnetostrictive vibrating polisher can generate a lateral vibration at 9.2 kHz with the amplitude of 30 μm and the polishing pressure is controlled by a balance adjustment mechanism. The motion resolution of the X-Y-Z table is 0.1 μm in each direction. The C-axis rotary table is mounted on a B-axis tilting table and the workpiece is mounted on the C-axis rotary table with a vacuum chuck. According to the polishing experiments, the form accuracy was improved to 200 nm P-V and the surface roughness to 10 nm Rz (1 nm Ra).

Microscopy and Microanalysis, 2020

The Proceedings of The Manufacturing & Machine Tool Conference, 2014

The Proceedings of The Manufacturing & Machine Tool Conference, 2014

Neutron analysis technique using ncutron fecus 血g mirrers are highly demanded for basic researche... more Neutron analysis technique using ncutron fecus 血g mirrers are highly demanded for basic researches efhigh tensile streng 血 steel sheets ， proteins and polymer materials ． Although we pnDposed a new £abricating method of multi − segmented ne 吐 ロm fbcusing m 血 ors using metal substrates ， it was difficult tO measure su 曲 cc pm 丘le preoisely ． This paper reports a development of non ・ contaCt fast speed on − machine measurement probe in order ω measure the fabricated mirror profile and results ofthe profile measurement of super mirrors deposited on polished substrates ．

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2005

This paper introduces a schnidt lens manufacturing process, focusing on its axis-aymrnetr{c asphe... more This paper introduces a schnidt lens manufacturing process, focusing on its axis-aymrnetr{c aspherical surface manufacturing by synthesizing ELID grinding and arc-enveloped grinding method. For test experiment, an offaxis spherical surface was ground to obtain suitable grinding and ELID conditions. [then, the large axis-aymmetric aspherical concave and convex were ground on the developed grinding system using #325, #1200 diarnond cast-iron bond wheels, Grinding characteristics such as attainable form accuracy, surface rougliness were investigated.

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2005

The designed fbrm and surface quality of focusing neutron mirror is a main factor affecting the p... more The designed fbrm and surface quality of focusing neutron mirror is a main factor affecting the perfbrmance of the neutron optical devices. In order to improve the situation, one ofthe authors designed a new type ofmirror for focusing neutron beams, Its form is an inside deep rotary paraboloid and the material used is quartz. Ib test the optical perfbrmances of the designed parameters and simplify the fabrication process, the first fabrication was to grind the lf4 ef the mirror, cut along the symmetric axis by two perpendicular planes, thus the surface to be ground is an outside symmetric paraboloid. The fabrication process was investigated in this experiment. [Ihe workpiece was first ground applying the ELID method with #325 and #1200 cast iron bonding diamond abrasiye wheels. Then the ground surface was polished with Ce02 slurry. The finished surface roughness was Ra2.0nm and rms2.4nm and the fomi error was about 2pm. After a coating process, its properties of focusing neutron beams were investigated. [[1ie optical properties obtained included a refiecting rate of42%, gain 1.9 and 2.3mmx1O.Imm beam focused to 1.6mmx2.1mm.

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2005

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2005

ELID (Electrolytic In-process Dressing) grinding method is possible to achieve ultraprecision smo... more ELID (Electrolytic In-process Dressing) grinding method is possible to achieve ultraprecision smooth surface of hard and brittle materials. To obtain ultra smooth surface required such as micro lens and its metal mold, fina] polish process which required long time after conventional grinding process was necessary. ELID grinding method using an ultraprecision grinding machine tool will be yery effective in reducing the time required for finial polishing process. ln this paper, a fabrication experiment using this ELID grinding process was studied fbr Gradient Index (6RIN) lens. Especially, as a nano-precision rnicro-ELID grinding machining for GRIN lens, we studies on conditions ofELID grinding using a desk-top type 4 axes machine fbr development ofGRIN aspherical lens with paraboloidal form, and GRIN prism.

The Proceedings of Conference of Kanto Branch, 2001

The Proceedings of Ibaraki District Conference, 2013

Yutaka YAMAGATA ， RIKEN (The lnstitute ofPhysica1 and Chemical Research) ， Hirosawa2 − 1， Wakou −... more Yutaka YAMAGATA ， RIKEN (The lnstitute ofPhysica1 and Chemical Research) ， Hirosawa2 − 1， Wakou − shi， Saitama Recently ， it is portant tG car ワ out optica 貰control ofthe neutron beam ． There is a neutron mirror in the method and electro −1ess plated NiP surface is ralsed as a material candidate ． This report describes the result of an

IEEJ Transactions on Sensors and Micromachines, 1997

Journal of the Japan Society for Precision Engineering, 2013

Key Engineering Materials, 2005

This paper describes an ultra precision polishing method of aspherical mirrors, and the fundament... more This paper describes an ultra precision polishing method of aspherical mirrors, and the fundamental research on polishing characteristics. The aspherical mirrors with a diameter of about 30mm made by fused silica glass and CVD-SiC were ELID (electrolytic in-process dressing)-ground to high form accuracy with #4000 cast iron bonded diamond wheel, and then polished with a small polishing tool. As the result, final surface roughness of 1.4nmRa and form accuracy of 1.2 μm was obtained.