P. Steeneken - Academia.edu (original) (raw)
Papers by P. Steeneken
IEEE Sensors, 2005., 2005
We present a test structure for the on-line extraction of the Young's modulus of materials used f... more We present a test structure for the on-line extraction of the Young's modulus of materials used for Micro-Electro-Mechanical Systems (MEMS) applications. This non-contact method is simple and non-destructive and allows for a fully electronic probing and readout. A single test structure is configured to respond to a change in voltage through a change in capacitance and the change in capacitance is then related to the Young's Modulus and the device geometry. The device can also be used for simultaneous resonant frequency tests and measurement of pull-in voltage, thereby allowing for a multipoint orthogonal measurement. Experimental verification of the concept is presented in this paper. The test structure is fabricated in a silicon-on-insulator MEMS process allowing the extraction of the Young Modulus of [110] single-crystal silicon.
2006 IEEE International Frequency Control Symposium and Exposition, 2006
A novel bulk mode MEMS resonator is presented where mechanical motion is detected using the piezo... more A novel bulk mode MEMS resonator is presented where mechanical motion is detected using the piezoresistive properties of Si. The piezoresistive readout allows for a high transduction efficiency. The transconductance g m obtained in this manner can be many times higher than the admittance Y m obtained in MEMS resonators that use capacitive read-out. By means of a small signal model it is shown that the transconductance is insensitive to geometric scaling, which allows for the realization of miniature high frequency MEMS resonators and oscillators without performance reduction. The piezoresistive detection method is experimentally validated using a 10MHz bulk acoustic mode resonator processed on SOI. Even for a transduction gap as large as 1.3 µm, it is shown that the transconductance can be as high as 90 µS combined with a Q-factor of 125.000.
Physica B: Condensed Matter, 2002
Using spin-resolved resonant photoemission we have probed the singlet vs. triplet character of th... more Using spin-resolved resonant photoemission we have probed the singlet vs. triplet character of the two-hole state in the layered cuprates Bi 2 Sr 2 CaCu 2 O 8þd ; La 2Àx Sr x CuO 4 and Sr 2 CuO 2 Cl 2 : The combination of the photon circular polarization with the photoelectron spin detection gives access to the character of the photoemission final states, which correspond to the two-hole configurations localized at a ðCuO 4 Þ site. In particular, the lowest energy state is found to have a very high singlet character in all the measured compounds. This can be considered as a strong indication of the existence and stability of the so-called Zhang-Rice singlets in the layered cuprates. r
Physical Review Letters, 2002
High quality thin films of the ferromagnetic semiconductor EuO have been prepared and were studie... more High quality thin films of the ferromagnetic semiconductor EuO have been prepared and were studied using a new form of spin-resolved spectroscopy. We observed large changes in the electronic structure across the Curie and metal-insulator transition temperature. We found that these are caused by the exchange splitting of the conduction band in the ferromagnetic state, which is as large as 0.6 eV. We also present strong evidence that the bottom of the conduction band consists mainly of majority spins. This implies that doped charge carriers in EuO are practically fully spin polarized.
Journal of Micromechanics and Microengineering, 2005
... of a capacitive RF MEMS switch PG Steeneken1, Th GSM Rijks1, JTM van Beek1, MJE Ulenaers1, J ... more ... of a capacitive RF MEMS switch PG Steeneken1, Th GSM Rijks1, JTM van Beek1, MJE Ulenaers1, J De Coster2 and R Puers2 ... In many applications, such as GSM mobile phones, RF MEMS switches with low actuation voltages and high switching speeds are preferred. ...
Applied Physics A: Materials Science & Processing, 2001
. A theoretical description of the Fano-effect in the angle-integrated valence-band photoemissi... more . A theoretical description of the Fano-effect in the angle-integrated valence-band photoemission (VB XPS) of paramagnetic solids is presented that is based on the one-step model of photoemission and relativistic multiple scattering theory. Applications to fcc-Cu and fcc-Ag led to a very satisfying agreement with recent experimental data that show the Fano-effect, i.e., a finite spin polarisation of the photoelectrons
Physical Review Letters, 2003
Physical Review B, 2003
The spin nature of the states at the top of the valence band in Nd 2 CuO 4 and Nd 1.85 Ce 0.15 Cu... more The spin nature of the states at the top of the valence band in Nd 2 CuO 4 and Nd 1.85 Ce 0.15 CuO 4Ϫ␦ has been investigated with spin polarized resonant photoemission. A clear Zhang-Rice singlet state is observed at the top of the valence band in the undoped compound showing that the parent compound of this electron doped superconductor is similar to the parent compounds of hole doped cuprate superconductors. Upon doping, the stability of the singlet is destroyed and the optimum doped compound Nd 1.85 Ce 0.15 CuO 4Ϫ␦ does not display any well-separated singlet state. These results indicate that hole contribution to the superconductivity in this system is not important in contrast to what has previously been suggested on the bases of transport measurements.
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, 2011
We report on small, low-ohmic RF MEMS switches with a circular membrane actuator design.
2015 IEEE 27th International Symposium on Power Semiconductor Devices & IC's (ISPSD), 2015
2015 IEEE 27th International Symposium on Power Semiconductor Devices & IC's (ISPSD), 2015
IEEE Sensors, 2005., 2005
We present a test structure for the on-line extraction of the Young's modulus of materials used f... more We present a test structure for the on-line extraction of the Young's modulus of materials used for Micro-Electro-Mechanical Systems (MEMS) applications. This non-contact method is simple and non-destructive and allows for a fully electronic probing and readout. A single test structure is configured to respond to a change in voltage through a change in capacitance and the change in capacitance is then related to the Young's Modulus and the device geometry. The device can also be used for simultaneous resonant frequency tests and measurement of pull-in voltage, thereby allowing for a multipoint orthogonal measurement. Experimental verification of the concept is presented in this paper. The test structure is fabricated in a silicon-on-insulator MEMS process allowing the extraction of the Young Modulus of [110] single-crystal silicon.
2006 IEEE International Frequency Control Symposium and Exposition, 2006
A novel bulk mode MEMS resonator is presented where mechanical motion is detected using the piezo... more A novel bulk mode MEMS resonator is presented where mechanical motion is detected using the piezoresistive properties of Si. The piezoresistive readout allows for a high transduction efficiency. The transconductance g m obtained in this manner can be many times higher than the admittance Y m obtained in MEMS resonators that use capacitive read-out. By means of a small signal model it is shown that the transconductance is insensitive to geometric scaling, which allows for the realization of miniature high frequency MEMS resonators and oscillators without performance reduction. The piezoresistive detection method is experimentally validated using a 10MHz bulk acoustic mode resonator processed on SOI. Even for a transduction gap as large as 1.3 µm, it is shown that the transconductance can be as high as 90 µS combined with a Q-factor of 125.000.
Physica B: Condensed Matter, 2002
Using spin-resolved resonant photoemission we have probed the singlet vs. triplet character of th... more Using spin-resolved resonant photoemission we have probed the singlet vs. triplet character of the two-hole state in the layered cuprates Bi 2 Sr 2 CaCu 2 O 8þd ; La 2Àx Sr x CuO 4 and Sr 2 CuO 2 Cl 2 : The combination of the photon circular polarization with the photoelectron spin detection gives access to the character of the photoemission final states, which correspond to the two-hole configurations localized at a ðCuO 4 Þ site. In particular, the lowest energy state is found to have a very high singlet character in all the measured compounds. This can be considered as a strong indication of the existence and stability of the so-called Zhang-Rice singlets in the layered cuprates. r
Physical Review Letters, 2002
High quality thin films of the ferromagnetic semiconductor EuO have been prepared and were studie... more High quality thin films of the ferromagnetic semiconductor EuO have been prepared and were studied using a new form of spin-resolved spectroscopy. We observed large changes in the electronic structure across the Curie and metal-insulator transition temperature. We found that these are caused by the exchange splitting of the conduction band in the ferromagnetic state, which is as large as 0.6 eV. We also present strong evidence that the bottom of the conduction band consists mainly of majority spins. This implies that doped charge carriers in EuO are practically fully spin polarized.
Journal of Micromechanics and Microengineering, 2005
... of a capacitive RF MEMS switch PG Steeneken1, Th GSM Rijks1, JTM van Beek1, MJE Ulenaers1, J ... more ... of a capacitive RF MEMS switch PG Steeneken1, Th GSM Rijks1, JTM van Beek1, MJE Ulenaers1, J De Coster2 and R Puers2 ... In many applications, such as GSM mobile phones, RF MEMS switches with low actuation voltages and high switching speeds are preferred. ...
Applied Physics A: Materials Science & Processing, 2001
. A theoretical description of the Fano-effect in the angle-integrated valence-band photoemissi... more . A theoretical description of the Fano-effect in the angle-integrated valence-band photoemission (VB XPS) of paramagnetic solids is presented that is based on the one-step model of photoemission and relativistic multiple scattering theory. Applications to fcc-Cu and fcc-Ag led to a very satisfying agreement with recent experimental data that show the Fano-effect, i.e., a finite spin polarisation of the photoelectrons
Physical Review Letters, 2003
Physical Review B, 2003
The spin nature of the states at the top of the valence band in Nd 2 CuO 4 and Nd 1.85 Ce 0.15 Cu... more The spin nature of the states at the top of the valence band in Nd 2 CuO 4 and Nd 1.85 Ce 0.15 CuO 4Ϫ␦ has been investigated with spin polarized resonant photoemission. A clear Zhang-Rice singlet state is observed at the top of the valence band in the undoped compound showing that the parent compound of this electron doped superconductor is similar to the parent compounds of hole doped cuprate superconductors. Upon doping, the stability of the singlet is destroyed and the optimum doped compound Nd 1.85 Ce 0.15 CuO 4Ϫ␦ does not display any well-separated singlet state. These results indicate that hole contribution to the superconductivity in this system is not important in contrast to what has previously been suggested on the bases of transport measurements.
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, 2011
We report on small, low-ohmic RF MEMS switches with a circular membrane actuator design.
2015 IEEE 27th International Symposium on Power Semiconductor Devices & IC's (ISPSD), 2015
2015 IEEE 27th International Symposium on Power Semiconductor Devices & IC's (ISPSD), 2015