Tsuyoshi Horikawa - Academia.edu (original) (raw)

Tsuyoshi Horikawa

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Papers by Tsuyoshi Horikawa

Research paper thumbnail of Estimation of film thickness from the background signal in x-ray photoemission spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

ABSTRACT

Research paper thumbnail of Semiconductor device and manufacturing method thereof

Research paper thumbnail of Formation of Ohmic Contacts with Shallow NiGe/n+ Ge Junction

Research paper thumbnail of Chemical vapor deposition apparatus

Research paper thumbnail of The impacts of ArF Excimer Immersion Lithography on Integrated Silicon Photonics Technology

Research paper thumbnail of Low-αV π L. 25-Gb/s silicon modulator based on forward-biased pin diodes

11Th International Conference on Group Iv Photonics, Aug 1, 2014

Research paper thumbnail of Semiconductor device which includes a capacitor having a lower electrode formed of iridium or ruthenium

Research paper thumbnail of Effects of Post-Annealing on Dielectric Properties of (Ba, Sr)TiO_3 Thin Films Prepared by Liquid Source Chemical Vapor Deposition(Special Issue on Advanced Memory Devices Using High-ε and Ferroelectric Films)

Ieice Transactions on Electronics, Apr 25, 1998

... Effects of Post-Annealing on Dielectric Properties of (Ba, Sr)TiO 3 Thin Films Prepared by Li... more ... Effects of Post-Annealing on Dielectric Properties of (Ba, Sr)TiO 3 Thin Films Prepared by Liquid Source Chemical Vapor Deposition Tsuyoshi HORIKAWA Junji TANIMURA Takaaki KAWAHARA Mikio YAMAMUKA Masayoshi TARUTANI Kouichi ONO Publication IEICE ...

Research paper thumbnail of Vaporizer for chemical vapor deposition apparatus, chemical vapor deposition apparatus, and semiconductor device manufactured thereby

Research paper thumbnail of Semiconductor device with x-ray absorption layer

Research paper thumbnail of A 300mm Si photonics platform for multi-applications

2015 Opto-Electronics and Communications Conference (OECC), 2015

Research paper thumbnail of CVD apparatus for forming thin film having high dielectric constant

Research paper thumbnail of Vaporizing device for CVD apparatus

Research paper thumbnail of Effects of Post-Annealing on Dielectric Properties of (Ba, Sr)TiO 3 Thin Films Prepared by Liquid Source Chemical Vapor Deposition

Ieice Transactions on Electronics, Apr 25, 1998

... Effects of Post-Annealing on Dielectric Properties of (Ba, Sr)TiO 3 Thin Films Prepared by Li... more ... Effects of Post-Annealing on Dielectric Properties of (Ba, Sr)TiO 3 Thin Films Prepared by Liquid Source Chemical Vapor Deposition Tsuyoshi HORIKAWA Junji TANIMURA Takaaki KAWAHARA Mikio YAMAMUKA Masayoshi TARUTANI Kouichi ONO Publication IEICE ...

Research paper thumbnail of Process control and monitoring in device fabrication for optical interconnection using silicon photonics technology

2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), 2015

Research paper thumbnail of High precision Si waveguide devices designed for 1.31μm and 1.55μm wavelengths on 300mm-SOI

11th International Conference on Group IV Photonics (GFP), 2014

ABSTRACT World-record low propagation losses for single-mode silicon waveguides with TE-polarizat... more ABSTRACT World-record low propagation losses for single-mode silicon waveguides with TE-polarization were demonstrated. As the results of precise width control, the deviation of 1.8nm was confirmed for the resonance peaks of a ring-resonator on a 300mm-SOI.

Research paper thumbnail of Impact of Initial Traps on TDDB and NBTI Reliabilities in High-k Gate Dielectrics

Extended Abstracts of the Conference on Solid State Devices and Materials, Sep 13, 2006

Research paper thumbnail of Liquid raw material vaporizer, semiconductor device and method of manufacturing semiconductor device

Research paper thumbnail of Method and apparatus for monitoring CVD liquid source for forming thin film with high dielectric constant

Research paper thumbnail of Athermal silicon optical interposers operating up to 125° C

Next-Generation Optical Networks for Data Centers and Short-Reach Links II, 2015

Research paper thumbnail of Estimation of film thickness from the background signal in x-ray photoemission spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

ABSTRACT

Research paper thumbnail of Semiconductor device and manufacturing method thereof

Research paper thumbnail of Formation of Ohmic Contacts with Shallow NiGe/n+ Ge Junction

Research paper thumbnail of Chemical vapor deposition apparatus

Research paper thumbnail of The impacts of ArF Excimer Immersion Lithography on Integrated Silicon Photonics Technology

Research paper thumbnail of Low-αV π L. 25-Gb/s silicon modulator based on forward-biased pin diodes

11Th International Conference on Group Iv Photonics, Aug 1, 2014

Research paper thumbnail of Semiconductor device which includes a capacitor having a lower electrode formed of iridium or ruthenium

Research paper thumbnail of Effects of Post-Annealing on Dielectric Properties of (Ba, Sr)TiO_3 Thin Films Prepared by Liquid Source Chemical Vapor Deposition(Special Issue on Advanced Memory Devices Using High-ε and Ferroelectric Films)

Ieice Transactions on Electronics, Apr 25, 1998

... Effects of Post-Annealing on Dielectric Properties of (Ba, Sr)TiO 3 Thin Films Prepared by Li... more ... Effects of Post-Annealing on Dielectric Properties of (Ba, Sr)TiO 3 Thin Films Prepared by Liquid Source Chemical Vapor Deposition Tsuyoshi HORIKAWA Junji TANIMURA Takaaki KAWAHARA Mikio YAMAMUKA Masayoshi TARUTANI Kouichi ONO Publication IEICE ...

Research paper thumbnail of Vaporizer for chemical vapor deposition apparatus, chemical vapor deposition apparatus, and semiconductor device manufactured thereby

Research paper thumbnail of Semiconductor device with x-ray absorption layer

Research paper thumbnail of A 300mm Si photonics platform for multi-applications

2015 Opto-Electronics and Communications Conference (OECC), 2015

Research paper thumbnail of CVD apparatus for forming thin film having high dielectric constant

Research paper thumbnail of Vaporizing device for CVD apparatus

Research paper thumbnail of Effects of Post-Annealing on Dielectric Properties of (Ba, Sr)TiO 3 Thin Films Prepared by Liquid Source Chemical Vapor Deposition

Ieice Transactions on Electronics, Apr 25, 1998

... Effects of Post-Annealing on Dielectric Properties of (Ba, Sr)TiO 3 Thin Films Prepared by Li... more ... Effects of Post-Annealing on Dielectric Properties of (Ba, Sr)TiO 3 Thin Films Prepared by Liquid Source Chemical Vapor Deposition Tsuyoshi HORIKAWA Junji TANIMURA Takaaki KAWAHARA Mikio YAMAMUKA Masayoshi TARUTANI Kouichi ONO Publication IEICE ...

Research paper thumbnail of Process control and monitoring in device fabrication for optical interconnection using silicon photonics technology

2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), 2015

Research paper thumbnail of High precision Si waveguide devices designed for 1.31μm and 1.55μm wavelengths on 300mm-SOI

11th International Conference on Group IV Photonics (GFP), 2014

ABSTRACT World-record low propagation losses for single-mode silicon waveguides with TE-polarizat... more ABSTRACT World-record low propagation losses for single-mode silicon waveguides with TE-polarization were demonstrated. As the results of precise width control, the deviation of 1.8nm was confirmed for the resonance peaks of a ring-resonator on a 300mm-SOI.

Research paper thumbnail of Impact of Initial Traps on TDDB and NBTI Reliabilities in High-k Gate Dielectrics

Extended Abstracts of the Conference on Solid State Devices and Materials, Sep 13, 2006

Research paper thumbnail of Liquid raw material vaporizer, semiconductor device and method of manufacturing semiconductor device

Research paper thumbnail of Method and apparatus for monitoring CVD liquid source for forming thin film with high dielectric constant

Research paper thumbnail of Athermal silicon optical interposers operating up to 125° C

Next-Generation Optical Networks for Data Centers and Short-Reach Links II, 2015

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