aisyah zawawi - Academia.edu (original) (raw)

Papers by aisyah zawawi

2018 IEEE International Conference on Semiconductor Electronics (ICSE)

Micromachines

In this study, 550 nm thick cubic silicon carbide square diaphragms were back etched from Si subs... more In this study, 550 nm thick cubic silicon carbide square diaphragms were back etched from Si substrate. Then, indentation was carried out to samples with varying dimensions, indentation locations, and loads. The influence of three parameters is documented by analyzing load-displacement curves. It was found that diaphragms with bigger area, indented at the edge, and low load demonstrated almost elastic behaviour. Furthermore, two samples burst and one of them displayed pop-in behaviour, which we determine is due to plastic deformation. Based on optimum dimension and load, we calculate maximum pressure for elastic diaphragms. This pressure is sufficient for cubic silicon carbide diaphragms to be used as acoustic sensors to detect poisonous gasses.

2012 IEEE Colloquium on Humanities, Science and Engineering (CHUSER), 2012

We report on the investigation of zinc oxide (ZnO) thin films grown on p-type silicon (111) subst... more We report on the investigation of zinc oxide (ZnO) thin films grown on p-type silicon (111) substrate by radio frequency (RF) magnetron sputtering tool. The structural and optical characteristics of the sample have been investigated by using scanning electron microscope (SEM), atomic force microscope (AFM), high resolution X-ray diffraction (HR-XRD), Raman spectroscopy, photoluminescence (PL) and Fourier transform infra-red (FTIR), respectively. The FTIR measurement reveals that ZnO retains its wurtzite structure due to the presence of vibrations in the Zn-O bonds. XRD analysis shows that there exists a slight impurity occurring in the sample with the presence of Al2O3 and the high and sharp peak of ZnO shows the good quality of crystallinity of ZnO. Raman spectroscopy measurements reveal that the ZnO film is a single crystal and has wurtzite structure and the presence of impurities such as oxygen deficiencies and interstitial defects. The PL spectra clearly prove that the Zn has hi...

2016 IEEE International Conference on Semiconductor Electronics (ICSE), 2016

A new design of microelectromechanical systems (MEMS) condenser microphone employing silicon carb... more A new design of microelectromechanical systems (MEMS) condenser microphone employing silicon carbide (SiC) diaphragm is proposed for the sonic detection. The sensing structure consists of SiC thin film as the top plate and perforated Si as the back plate. The numerical analysis and simulation studies compare the mechanical performances of the square-shape SiC diaphragm. Four parameters are considered i.e. resonance frequency, cutoff frequency, maximum deflection and maximum stress. The theoretical and simulated results match closely. Overall, the 680 μm × 680 μm SiC diaphragm with the thickness of 1.00 μm gives the optimized mechanical performances for the sonic detection.

The efficiency of inverted organic solar cells become interested among researchers. The various p... more The efficiency of inverted organic solar cells become interested among researchers. The various parameters changed to improve the efficiency of cell. This study were conducted to investigate the effect of dye coating duration on the performance of inverted organic solar cell. The characterization of the sample was done by Scanning Electron Microscope test (SEM) for morphology characterization, UV - Vis-NIR test for optical properties and current voltage test (IV) to determine the cell efficiency. The ZnO nanorods-coated FTO substrates were immersed in the eosin Y dye solution with ethanol at 60 °C for 15, 60 and 120 minutes. The power conversion efficiency of the solar cell increased with dye coating duration and reached an optimum value at dye coating duration of 60 minutes. The device with dye coating duration of 60 minutes exhibited the highest power conversion efficiency of 0.0001528 % with short Isc 0.00765 mA/cm2, Voc of 0.192 V and fill factor of 0.104 %.

Japanese Journal of Applied Physics

In this work, mechanical properties of an epitaxial silicon carbide-on-silicon (3C-SiC-on-Si) sam... more In this work, mechanical properties of an epitaxial silicon carbide-on-silicon (3C-SiC-on-Si) sample were extracted using a Micro Materials Nanotest® indentation system. Maximum load, penetration depth and loading rate were set at 25 mN, 550 nm and 5 mN s−1, respectively. We first plot the load-depth curve of 3C-SiC film and Si substrate. Then, we find the maximum values of hardness, tensile modulus, shear strength, shear modulus and tensile stress of 3C-SiC film. The obtained data provide evidence of the suitability of this film to be applied as an electroacoustic transducer.

Micromachines

This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capa... more This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.

2018 IEEE International Conference on Semiconductor Electronics (ICSE)

Micromachines

In this study, 550 nm thick cubic silicon carbide square diaphragms were back etched from Si subs... more In this study, 550 nm thick cubic silicon carbide square diaphragms were back etched from Si substrate. Then, indentation was carried out to samples with varying dimensions, indentation locations, and loads. The influence of three parameters is documented by analyzing load-displacement curves. It was found that diaphragms with bigger area, indented at the edge, and low load demonstrated almost elastic behaviour. Furthermore, two samples burst and one of them displayed pop-in behaviour, which we determine is due to plastic deformation. Based on optimum dimension and load, we calculate maximum pressure for elastic diaphragms. This pressure is sufficient for cubic silicon carbide diaphragms to be used as acoustic sensors to detect poisonous gasses.

2012 IEEE Colloquium on Humanities, Science and Engineering (CHUSER), 2012

We report on the investigation of zinc oxide (ZnO) thin films grown on p-type silicon (111) subst... more We report on the investigation of zinc oxide (ZnO) thin films grown on p-type silicon (111) substrate by radio frequency (RF) magnetron sputtering tool. The structural and optical characteristics of the sample have been investigated by using scanning electron microscope (SEM), atomic force microscope (AFM), high resolution X-ray diffraction (HR-XRD), Raman spectroscopy, photoluminescence (PL) and Fourier transform infra-red (FTIR), respectively. The FTIR measurement reveals that ZnO retains its wurtzite structure due to the presence of vibrations in the Zn-O bonds. XRD analysis shows that there exists a slight impurity occurring in the sample with the presence of Al2O3 and the high and sharp peak of ZnO shows the good quality of crystallinity of ZnO. Raman spectroscopy measurements reveal that the ZnO film is a single crystal and has wurtzite structure and the presence of impurities such as oxygen deficiencies and interstitial defects. The PL spectra clearly prove that the Zn has hi...

2016 IEEE International Conference on Semiconductor Electronics (ICSE), 2016

A new design of microelectromechanical systems (MEMS) condenser microphone employing silicon carb... more A new design of microelectromechanical systems (MEMS) condenser microphone employing silicon carbide (SiC) diaphragm is proposed for the sonic detection. The sensing structure consists of SiC thin film as the top plate and perforated Si as the back plate. The numerical analysis and simulation studies compare the mechanical performances of the square-shape SiC diaphragm. Four parameters are considered i.e. resonance frequency, cutoff frequency, maximum deflection and maximum stress. The theoretical and simulated results match closely. Overall, the 680 μm × 680 μm SiC diaphragm with the thickness of 1.00 μm gives the optimized mechanical performances for the sonic detection.

The efficiency of inverted organic solar cells become interested among researchers. The various p... more The efficiency of inverted organic solar cells become interested among researchers. The various parameters changed to improve the efficiency of cell. This study were conducted to investigate the effect of dye coating duration on the performance of inverted organic solar cell. The characterization of the sample was done by Scanning Electron Microscope test (SEM) for morphology characterization, UV - Vis-NIR test for optical properties and current voltage test (IV) to determine the cell efficiency. The ZnO nanorods-coated FTO substrates were immersed in the eosin Y dye solution with ethanol at 60 °C for 15, 60 and 120 minutes. The power conversion efficiency of the solar cell increased with dye coating duration and reached an optimum value at dye coating duration of 60 minutes. The device with dye coating duration of 60 minutes exhibited the highest power conversion efficiency of 0.0001528 % with short Isc 0.00765 mA/cm2, Voc of 0.192 V and fill factor of 0.104 %.

Japanese Journal of Applied Physics

In this work, mechanical properties of an epitaxial silicon carbide-on-silicon (3C-SiC-on-Si) sam... more In this work, mechanical properties of an epitaxial silicon carbide-on-silicon (3C-SiC-on-Si) sample were extracted using a Micro Materials Nanotest® indentation system. Maximum load, penetration depth and loading rate were set at 25 mN, 550 nm and 5 mN s−1, respectively. We first plot the load-depth curve of 3C-SiC film and Si substrate. Then, we find the maximum values of hardness, tensile modulus, shear strength, shear modulus and tensile stress of 3C-SiC film. The obtained data provide evidence of the suitability of this film to be applied as an electroacoustic transducer.

Micromachines

This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capa... more This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.