Jennefer Sen | University of Waterloo, Canada (original) (raw)
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Micro-electro-mechanical system or MEMS simply can be understood as a miniaturized mechanical and... more Micro-electro-mechanical system or MEMS simply can be understood as a miniaturized mechanical and electromechanical elements i.e sensors, actuators, and microelectronics, that are made using methods of fabrication. Capacitive accelerometers are devices that measure the acceleration on a surface using capacitive sensing techniques. It can sense both static and dynamic acceleration. After this, it converts this acceleration into voltage or current. Whereas, in the capacitive pressure sensors, the pressure is sensed by mechanical elements such as plates, shells, and tubes that are designed and constructed to deflect when pressure is applied. These Capacitive pressure sensors have an edge over the piezoresistive ones since they consume less power. They are usually less temperature sensitive and have a lower fundamental noise floor. This model performs an analysis of a hypothetical sensor design using the electromechanical interface of COMSOL. The sensor is part of a silicon that has bee...
Micro-electro-mechanical system or MEMS simply can be understood as a miniaturized mechanical and... more Micro-electro-mechanical system or MEMS simply can be understood as a miniaturized mechanical and electromechanical elements i.e sensors, actuators, and microelectronics, that are made using methods of fabrication. Capacitive accelerometers are devices that measure the acceleration on a surface using capacitive sensing techniques. It can sense both static and dynamic acceleration. After this, it converts this acceleration into voltage or current. Whereas, in the capacitive pressure sensors, the pressure is sensed by mechanical elements such as plates, shells, and tubes that are designed and constructed to deflect when pressure is applied. These Capacitive pressure sensors have an edge over the piezoresistive ones since they consume less power. They are usually less temperature sensitive and have a lower fundamental noise floor. This model performs an analysis of a hypothetical sensor design using the electromechanical interface of COMSOL. The sensor is part of a silicon that has bee...