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Research paper thumbnail of A Compact X-ray Generator Using a Nanostructured Field Emission Cathode and a Microstructured Transmission Anode

Journal of Physics: Conference Series, 2013

Research paper thumbnail of Low-Bremsstrahlung X-Ray Source Using a Low-Voltage High-Current-Density Nanostructured Field Emission Cathode and a Transmission Anode for Markerless Soft Tissue Imaging

Journal of Microelectromechanical Systems, 2014

We report the design, fabrication, and proof-ofconcept characterization of an X-ray generator for... more We report the design, fabrication, and proof-ofconcept characterization of an X-ray generator for improved X-ray absorption imaging that uses a nanostructured field emission cathode as the electron source and a microstructured transmission anode as the X-ray generating structure. Field emission cathodes consume less power, respond faster, and tolerate lower vacuum than the thermionic cathodes used in conventional X-ray generators. The use of a transmission anode, instead of a conventional reflection anode, allows filtering of the background radiation (bremsstrahlung) while allowing efficient generation of X-ray at lower voltages by exciting atomic shell transitions, resulting in emission of X-ray with narrow spectral linewidth for sharper imaging of biological tissue. The fabricated field emission cathode contains arrays of self-aligned and gated silicon field emitters. The field emission cathodes turn on at bias voltages as low as 25 V, and their gates transmit almost 100% of the electrons to the anode. The cathodes produce per-emitter electron currents in excess of 2 µA (current density >2 A/cm 2 ) at a bias voltage of 80 V. A desktop rig is built to generate X-ray with a field emission cathode and transmission anode. Using the facility, we obtained X-ray absorption images of several objects. The images clearly show details under 500 µm in size, as well as soft tissue and fine bone structures without using contrast agents.

Research paper thumbnail of A Compact X-ray Generator Using a Nanostructured Field Emission Cathode and a Microstructured Transmission Anode

Journal of Physics: Conference Series, 2013

Research paper thumbnail of Low-Bremsstrahlung X-Ray Source Using a Low-Voltage High-Current-Density Nanostructured Field Emission Cathode and a Transmission Anode for Markerless Soft Tissue Imaging

Journal of Microelectromechanical Systems, 2014

We report the design, fabrication, and proof-ofconcept characterization of an X-ray generator for... more We report the design, fabrication, and proof-ofconcept characterization of an X-ray generator for improved X-ray absorption imaging that uses a nanostructured field emission cathode as the electron source and a microstructured transmission anode as the X-ray generating structure. Field emission cathodes consume less power, respond faster, and tolerate lower vacuum than the thermionic cathodes used in conventional X-ray generators. The use of a transmission anode, instead of a conventional reflection anode, allows filtering of the background radiation (bremsstrahlung) while allowing efficient generation of X-ray at lower voltages by exciting atomic shell transitions, resulting in emission of X-ray with narrow spectral linewidth for sharper imaging of biological tissue. The fabricated field emission cathode contains arrays of self-aligned and gated silicon field emitters. The field emission cathodes turn on at bias voltages as low as 25 V, and their gates transmit almost 100% of the electrons to the anode. The cathodes produce per-emitter electron currents in excess of 2 µA (current density >2 A/cm 2 ) at a bias voltage of 80 V. A desktop rig is built to generate X-ray with a field emission cathode and transmission anode. Using the facility, we obtained X-ray absorption images of several objects. The images clearly show details under 500 µm in size, as well as soft tissue and fine bone structures without using contrast agents.

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