Dusan Korytar | Slovak Academy of Sciences (original) (raw)

Research in the field of crystal X-ray optics, nanomachining and surface processsing

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Papers by Dusan Korytar

Research paper thumbnail of Spatial micrometer-resolution three-dimensional local lattice misorientation determination of GaAs wafers by synchrotron radiation rocking-curve imaging

Acta Crystallographica Section A Foundations of Crystallography, 2004

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Research paper thumbnail of Laboratory-based multi-modal X-ray microscopy and micro-CT with Bragg magnifiers

Optics Express, 2015

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Research paper thumbnail of Research and Development Centre for Advanced X-ray Technologies

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Research paper thumbnail of Calculations and surface quality measurements of high-asymmetry angle x-ray crystal monochromators for advanced x-ray imaging and metrological applications

Optical Engineering, 2015

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Research paper thumbnail of In Situ X-Ray Reciprocal Space Mapping for Characterization of Nanomaterials

X-ray and Neutron Techniques for Nanomaterials Characterization, 2016

Definition of Topic In this chapter, we will focus on the small-angle X-ray scattering (SAXS) tec... more Definition of Topic In this chapter, we will focus on the small-angle X-ray scattering (SAXS) technique performed on planar samples in the grazing-incidence small-angle X-ray scattering (GISAXS) geometry. This particular method of SAXS allows a fast, nondestructive analysis of the near-surface electron density variations on the lateral length scale ranging from several angstroms up to several hundreds of nanometers with adjustable in-depth sensitivity down to several nanometers. Special emphasis will be given to GISAXS experiments with laboratory X-ray sources as these are much more easily accessible as compared to synchrotron facilities.

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Research paper thumbnail of Nanomachining of Hard X-ray Crystal Optics

Ductile or plastic mode is known from metals and shaping of single Cu crystals in this mode is st... more Ductile or plastic mode is known from metals and shaping of single Cu crystals in this mode is straightforward. This ductile mode is used nowadays also for preparation of the Ge infrared optics. Contrary to the standard stochastic technology this technique is deterministic in its nature because of ultraprecise NC axes and a single point diamond tool (SPDT) [1]. When decreasing the depth of cut or chip thickness below a critical value, material removal mechanism changes from the brittle through brittle-ductile to ductile regime even for brittle materials such as single crystal silicon and germanium. Simple and complex surfaces such as aspheres in general can be prepared with submicrometer precision in this way.

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Research paper thumbnail of High Resolution Crystal Optics Schemes for HIKE-PES

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Research paper thumbnail of Radiation imaging detectors 2006

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2007

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Research paper thumbnail of Radiation imaging detectors 2006

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2007

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Research paper thumbnail of Nano-machining for advanced X-ray crystal optics

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Research paper thumbnail of Ductile nanomachining of crystal X-ray optics and its characterization

Standard technology of preparation of crystal optics (Si, Ge,...) is based on stochastic brittle ... more Standard technology of preparation of crystal optics (Si, Ge,...) is based on stochastic brittle mode of material removal. Ductile or plastic mode, now used for preparation of infrared optics, is deterministic in its nature because of ultraprecise CNC axes and single point diamond tool (SPDT). Simple and complex surfaces such as aspheres in general can be prepared with submicrometer precision. The application to crystal optics may also significantly improve surface roughness and subsurface damage (SSD) but needs some development period.

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Research paper thumbnail of Calculations and surface quality measurements of high-asymmetry angle x-ray crystal monochromators for advanced x-ray imaging and metrological applications

Optical Engineering, 2015

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Research paper thumbnail of Simulations and surface quality testing of high asymmetry angle x-ray crystal monochromators for advanced x-ray imaging applications

Advances in X-Ray/EUV Optics and Components IX, 2014

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Research paper thumbnail of Extreme X-ray beam compression for a high-resolution table-top grazing-incidence small-angle X-ray scattering setup

Journal of Applied Crystallography, 2013

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Research paper thumbnail of Potential use of V-channel Ge(220) monochromators in X-ray metrology and imaging

Journal of Applied Crystallography, 2013

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Research paper thumbnail of In-line Bragg magnifier based on V-shaped germanium crystals

Journal of Synchrotron Radiation, 2011

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Research paper thumbnail of X-Ray Optics for HRXRD Measurements and X-ray Imaging

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Research paper thumbnail of On the design of a monolithic 4-bounce high resolution X-ray monochromator

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2007

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Research paper thumbnail of Linearly graded GeSi beam-expanding/compressing X-ray monochromator

Journal of Applied Crystallography, 2010

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Research paper thumbnail of 1D X-ray Beam Compressing Monochromators

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Research paper thumbnail of Spatial micrometer-resolution three-dimensional local lattice misorientation determination of GaAs wafers by synchrotron radiation rocking-curve imaging

Acta Crystallographica Section A Foundations of Crystallography, 2004

Bookmarks Related papers MentionsView impact

Research paper thumbnail of Laboratory-based multi-modal X-ray microscopy and micro-CT with Bragg magnifiers

Optics Express, 2015

Bookmarks Related papers MentionsView impact

Research paper thumbnail of Research and Development Centre for Advanced X-ray Technologies

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Research paper thumbnail of Calculations and surface quality measurements of high-asymmetry angle x-ray crystal monochromators for advanced x-ray imaging and metrological applications

Optical Engineering, 2015

Bookmarks Related papers MentionsView impact

Research paper thumbnail of In Situ X-Ray Reciprocal Space Mapping for Characterization of Nanomaterials

X-ray and Neutron Techniques for Nanomaterials Characterization, 2016

Definition of Topic In this chapter, we will focus on the small-angle X-ray scattering (SAXS) tec... more Definition of Topic In this chapter, we will focus on the small-angle X-ray scattering (SAXS) technique performed on planar samples in the grazing-incidence small-angle X-ray scattering (GISAXS) geometry. This particular method of SAXS allows a fast, nondestructive analysis of the near-surface electron density variations on the lateral length scale ranging from several angstroms up to several hundreds of nanometers with adjustable in-depth sensitivity down to several nanometers. Special emphasis will be given to GISAXS experiments with laboratory X-ray sources as these are much more easily accessible as compared to synchrotron facilities.

Bookmarks Related papers MentionsView impact

Research paper thumbnail of Nanomachining of Hard X-ray Crystal Optics

Ductile or plastic mode is known from metals and shaping of single Cu crystals in this mode is st... more Ductile or plastic mode is known from metals and shaping of single Cu crystals in this mode is straightforward. This ductile mode is used nowadays also for preparation of the Ge infrared optics. Contrary to the standard stochastic technology this technique is deterministic in its nature because of ultraprecise NC axes and a single point diamond tool (SPDT) [1]. When decreasing the depth of cut or chip thickness below a critical value, material removal mechanism changes from the brittle through brittle-ductile to ductile regime even for brittle materials such as single crystal silicon and germanium. Simple and complex surfaces such as aspheres in general can be prepared with submicrometer precision in this way.

Bookmarks Related papers MentionsView impact

Research paper thumbnail of High Resolution Crystal Optics Schemes for HIKE-PES

Bookmarks Related papers MentionsView impact

Research paper thumbnail of Radiation imaging detectors 2006

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2007

Bookmarks Related papers MentionsView impact

Research paper thumbnail of Radiation imaging detectors 2006

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2007

Bookmarks Related papers MentionsView impact

Research paper thumbnail of Nano-machining for advanced X-ray crystal optics

Bookmarks Related papers MentionsView impact

Research paper thumbnail of Ductile nanomachining of crystal X-ray optics and its characterization

Standard technology of preparation of crystal optics (Si, Ge,...) is based on stochastic brittle ... more Standard technology of preparation of crystal optics (Si, Ge,...) is based on stochastic brittle mode of material removal. Ductile or plastic mode, now used for preparation of infrared optics, is deterministic in its nature because of ultraprecise CNC axes and single point diamond tool (SPDT). Simple and complex surfaces such as aspheres in general can be prepared with submicrometer precision. The application to crystal optics may also significantly improve surface roughness and subsurface damage (SSD) but needs some development period.

Bookmarks Related papers MentionsView impact

Research paper thumbnail of Calculations and surface quality measurements of high-asymmetry angle x-ray crystal monochromators for advanced x-ray imaging and metrological applications

Optical Engineering, 2015

Bookmarks Related papers MentionsView impact

Research paper thumbnail of Simulations and surface quality testing of high asymmetry angle x-ray crystal monochromators for advanced x-ray imaging applications

Advances in X-Ray/EUV Optics and Components IX, 2014

Bookmarks Related papers MentionsView impact

Research paper thumbnail of Extreme X-ray beam compression for a high-resolution table-top grazing-incidence small-angle X-ray scattering setup

Journal of Applied Crystallography, 2013

Bookmarks Related papers MentionsView impact

Research paper thumbnail of Potential use of V-channel Ge(220) monochromators in X-ray metrology and imaging

Journal of Applied Crystallography, 2013

Bookmarks Related papers MentionsView impact

Research paper thumbnail of In-line Bragg magnifier based on V-shaped germanium crystals

Journal of Synchrotron Radiation, 2011

Bookmarks Related papers MentionsView impact

Research paper thumbnail of X-Ray Optics for HRXRD Measurements and X-ray Imaging

Bookmarks Related papers MentionsView impact

Research paper thumbnail of On the design of a monolithic 4-bounce high resolution X-ray monochromator

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2007

Bookmarks Related papers MentionsView impact

Research paper thumbnail of Linearly graded GeSi beam-expanding/compressing X-ray monochromator

Journal of Applied Crystallography, 2010

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Research paper thumbnail of 1D X-ray Beam Compressing Monochromators

Bookmarks Related papers MentionsView impact

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