Towards 3D Electromagnetic Metamaterials in the THz Range (original) (raw)

ADS

;

• Moser, H. O. ;
• Bahou, M. ;
• Gu, P. D. ;
• Jian, L. K. ;
• Kong, J. R. ;
• Mahmood, S. B. ;
• Wen, Li

Abstract

SSLS has been using its lithography-based micro/nanofabrication facility LiMiNT (Lithography for Micro and Nanotechnology) and its infrared spectro/microscopy facility ISMI to develop and characterize the first electromagnetic metamaterials having their spectral response in the THz range. Derived from Pendry's nested-split-ring resonator design, these structures require micro/nanofabrication in order to have resonances in the THz range. They exhibit a negative refractive index and hold promise of sub-diffraction limit imaging. Besides the reduction of the size of the resonating structures to extend the spectral range towards the visible, outstanding issues include the production of high-aspect-ratio resonators that are sensitive for the magnetic field in any direction (3D sensitivity) and the capability to produce copious amounts of the electromagnetic metamaterials with a good yield. In this paper, we shall report on first results of 3D EM3 structures made by inclined exposures.

Publication:

Synchrotron Radiation Instrumentation

Pub Date:

January 2007

DOI:

10.1063/1.2436340

Bibcode:

2007AIPC..879.1462C

Keywords:

• 85.40.Hp;
• 85.85.+j;
• Lithography masks and pattern transfer;
• Micro- and nano-electromechanical systems and devices