Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors (original) (raw)
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Abstract
We have been developing a piezoresistive position detection for scanning micro mirrors in order to combine high position resolution with the capability of monolithic integration. In comparison to our formerly published results, the sensor sensitivity was strongly enhanced by implanting a 1 μm thick p-doped layer of NA ~ 1017 cm-3 into the lowly p-doped SOI device layer of NA ~ 1015 cm-3. This sensitivity was even further improved by at least a factor of 3 by a novel sensor design, allowing to couple more mechanical stress into the sensor structure.
Publication:
MOEMS and Miniaturized Systems X
Pub Date:
March 2011
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