Jean-yves Rauch | University of Franche-Comte (original) (raw)

Papers by Jean-yves Rauch

Research paper thumbnail of Thin amorphous silicon oxide ICPECVD layer on gold surface for surface plasmon resonance measurements

The present study demonstrates that thin layers of amorphous silicon oxide (SiOx) grown by induct... more The present study demonstrates that thin layers of amorphous silicon oxide (SiOx) grown by inductively-coupled plasma enhanced chemical vapor deposition (ICPECVD) technology at lower temperatures can be successfully combined with biosensors. In particular, gold-amorphous silica (Au/SiOx) interfaces were investigated for their potential applications as a low-cost Surface Plasmon Resonance (SPR) sensor chip. We report here on the fabrication and characterization of stable and good reliabilities of SiOx deposited at 80°C at different pressures. The refractive index (n) of SiOx varied from 1.456 to 1.462. The results show that the sensitivity and minimum light reflectivity at the resonance angle is extremely sensitive to any changes in the index of refraction and any changes in optical thickness.

Research paper thumbnail of The OmniSAW device concept

We report the theoretical evidence for the occurrence of omnidirectional elastic band gap in one-... more We report the theoretical evidence for the occurrence of omnidirectional elastic band gap in one-dimensional phononic crystal structures. The structure is constituted by a periodic layered deposited on a specific substrate that exhibit total reflection of waves for all incident angles and polarizations in a given frequency range the omnidirectional band gap. We present the influence of the nature and filling fraction of the layered structures as well as the substrate nature on the omnidirectional band gap. By introducing a defect piezoelectric layer, for instance AlN or ZnO, in the finite size layered structure, under certain condition a selective resonance modes occur within the omnidirectional bang gap. In this case, the elastic energy is localized in the defect layer. The frequencies of the defect modes are sensitive to the nature of the material and to the layer thicknesses. In order to excite the localized mode in the defect layer. We introduce interdigital transducers on the top of the surface. This implies the introduction of a new spatial periodicity and the reduction of the parallel wave vector in the first Brillouin zone. The omnidirectional character of the bad gap in this case is crucial to confine the elastic energy in the defect layer.

Research paper thumbnail of Titanium Oxynitride Thin Films by Reactive Sputtering with an Independent Pulsing of O2 and N2 Gases

Titanium oxynitride thin films are deposited by DC reactive magnetron sputtering. A pure titanium... more Titanium oxynitride thin films are deposited by DC reactive magnetron sputtering. A pure titanium target is sputtered in a reactive atmosphere composed of argon, oxygen and nitrogen gases. The oxygen mass flow rate as well as that of the nitrogen gas are both pulsed during the deposition time using an independent and rectangular signal for each reactive gas. A constant pulsing period T = 45 s is applied for both reactive gases and a delay time  of 34 s between N2 and O2 injection times is set for all depositions. Oxygen and nitrogen duty cycles are systematically and independently changed from 0 to 100% of their pulsing period. From real time measurements of the Ti target potential and total sputtering pressure, it is shown that the reactive process alternates between oxidized, nitrided and elemental sputtering modes as a function of the oxygen and nitrogen injection times. The full poisoning of the Ti target surface by oxygen and/or nitrogen can be avoided for some given ranges of O2 and N2 duty cycles. Deposition rates of titanium oxynitride films are substantially enhanced and can be adjusted between that of pure Ti and TiN films with a gradual transition of their optical transmittance in the visible range. These results support that titanium oxynitride compounds exhibiting absorbent to transparent behaviors can be precisely sputter-deposited by means of a two reactive gases pulsing process.

Research paper thumbnail of Miniaturized Robotics: The Smallest Camera Operator Bot Pays Tribute to David Bowie

IEEE Robotics & Automation Magazine, Sep 1, 2020

Research paper thumbnail of Evidence for complete surface wave band gaps in a piezoelectric phononic crystal

HAL (Le Centre pour la Communication Scientifique Directe), 2006

Rapid communicationInternational audienc

Research paper thumbnail of Smallest microhouse in the world, assembled on the facet of an optical fiber by origami and welded in the μRobotex nanofactory

HAL (Le Centre pour la Communication Scientifique Directe), 2018

Research paper thumbnail of Proposal for a complete 3D surface reconstruction using images from a scanning electron microscope (SEM)

Frontiers in Optics + Laser Science 2022 (FIO, LS), 2022

A three-dimensional model enables the development of accurate solutions to have more information ... more A three-dimensional model enables the development of accurate solutions to have more information about the thickness, texture, and characteristics of small-size samples for education and metrology applications. This project proposes an idea to obtain a complete 3D surface reconstruction using the application of Pollen 3D for the scanning electron microscope (SEM) images with high magnification. The main objective is to have a set of images of the complete 360° rotation of the sample with a robot inside the chamber of the SEM. Simulation SEM images with Blender (open source application) are proposed for results validation.

Research paper thumbnail of Tunable Electrical Properties of Ti-B-N Thin Films Sputter-Deposited by the Reactive Gas Pulsing Process

Research paper thumbnail of Self-focused beams to couple light into a whispering-gallery mode resonator

arXiv (Cornell University), Jul 7, 2014

Research paper thumbnail of Design, fabrication and CFD modeling of a Stirling engine microregenerator

HAL (Le Centre pour la Communication Scientifique Directe), Aug 24, 2016

International audienceThis paper reports the design, fabrication and CFD modeling of a microregen... more International audienceThis paper reports the design, fabrication and CFD modeling of a microregenerator in order to be integrated in a multiphase piezoelectric smart membrane Stirling engine. The application aims to recover waste heat at low temperatures and to convert it into electricity via the piezoelectric element. The suggested geometry for the microregenerator is a microchannel integrated with staggered DRIE etched silicon micropillars, the whole is encapsulated between two glass wafers. The porosity ranges from 0.8 to 0.9. A 2D numerical study of the microregenerator thermofluidic performances was investigated. Three gases (air, helium andhydrogen) were investigated. The gas flow is set to be incompressible and viscous under laminar unidirectional steady flow conditions for low Reynolds number (<10). According to the obtained results, helium has shown the highest pressure drop since it’s the most viscous gas. The pressure drop encountered with helium gas is more than twice the one registered with hydrogen. Nevertheless it was the fastest gas to heat up. Trade-off between heat transfer and pressure drop needs to be reached

Research paper thumbnail of Evidence for complete surface wave band gaps in a piezoelectric phononic crystal

Rapid communicationInternational audienc

Research paper thumbnail of Influence du traitement thermique sur les propriétés des résistances de platine d’un microcapteur de flux thermique

HAL (Le Centre pour la Communication Scientifique Directe), Jun 3, 2019

International audienceRésumé - Cette étude se situe dans le cadre du développement de fluxmètres ... more International audienceRésumé - Cette étude se situe dans le cadre du développement de fluxmètres thermiques en microtechnologie. Ces fluxmètres consistent en deux résistances de platine déposées sur un substrat en verre. Dans une première partie, nous présentons le principe du fluxmètre et de la mesure de température. Dans une deuxième partie, nous présentons également les étapes de fabrication en salle blanche et les différentes températures de recuits étudiées. Nous présentons des résultats expérimentaux sur la variation de résistance observée selon les différentes températures de recuit et une analyse par Diffraction de Rayons X complétée par des images au microscope à balayage. Nous proposons comme hypothèse que la baisse de résistivité observée pour les faibles températures de recuit est due à l’amélioration du réseau cristallin et que la hausse observée pour les températures les plus élevées est due à la diffusion de la couche d’accroche en chrome dans le platine

Research paper thumbnail of Experimental Thermal Performance Of A Stirling Machine Milli-Regenerator Made By Multiple Jet Molding

HAL (Le Centre pour la Communication Scientifique Directe), Jul 25, 2021

Research paper thumbnail of Optimisation d'un microéchangeur à partir d'un bilan entropique

Le développement quasi exponentiel des MEMS (Micro-Electro-Mechanical-Systems) dans l'industr... more Le développement quasi exponentiel des MEMS (Micro-Electro-Mechanical-Systems) dans l'industrie permet d'accroître la densité de composants sur différents supports électroniques et informatiques. L'augmentation résultante des sources de chaleur nécessite alors d'intensifier les transferts thermiques dans le but de refroidir ces composants. Le développement des micro-systèmes tire profit de la technologie MEMS. En effet, à ces échelles miniatures, des procédés de micro-fabrication sont utilisés pour la réalisation des prototypes. Nous avons ainsi conçu un micro-échangeur à base d'assemblages de parois en verre et silicium constituants des canaux de dimensions micrométriques pouvant être traversés par un gaz tel que l'azote, l'argon ou l'hélium. L'objectif de cet article est de déterminer les performances optimales d'un micro-échangeur. Les écoulements en microcanal avec transfert de chaleur sont le siège de transferts thermiques et de pertes de...

Research paper thumbnail of Dynamic micro-assembly of LiNbO3 microresonators with low-loss suspended waveguides

Advanced Photonics 2018 (BGPP, IPR, NP, NOMA, Sensors, Networks, SPPCom, SOF), 2018

We report on a LiNbO3 microresonator integrated in a low-loss free-suspended waveguide. The photo... more We report on a LiNbO3 microresonator integrated in a low-loss free-suspended waveguide. The photonic elements are made by optical-grade dicing, and are assembled dynamically. This method opens the way to new 3D photonic architectures.

Research paper thumbnail of Data reduction of friction factor, permeability and inertial coefficient for a compressible gas flow through a milli-regenerator

E3S Web of Conferences, 2021

A regenerator of a Stirling machine alternately absorbs and releases heat from and to the working... more A regenerator of a Stirling machine alternately absorbs and releases heat from and to the working fluid which allows to recycle rejected heat during theoretical isochoric processes. This work focuses on a milli-regenerator fabricated with a multiple jet molding process. The regenerator is a porous medium filled with a dense pillar matrix. The pillars have a geometrical lens shape. Two metallic layers (chromium and copper) are deposited on the polymer pillars to increase heat transfer inside the regenerator. We performed experiments on different milli-regenerators corresponding to three porosities (ε = 0.80, 0.85 and 0.90) under nitrogen steady and oscillating compressible flows (oscillating Reynolds number in the range 0 < Reω < 60 and Reynolds number based on the hydraulic diameter ReDh,max<6000) for different temperature gradients (ΔT < 100°C). Temperature, velocity and pressure experimental measurements are performed with microthermocouples (type K with 7,6 µm diamete...

Research paper thumbnail of Miniaturized Robotics: The Smallest Camera Operator Bot Pays Tribute to David Bowie

IEEE Robotics & Automation Magazine, 2020

Research paper thumbnail of Smallest microhouse in the world, assembled on the facet of an optical fiber by origami and welded in the μRobotex nanofactory

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2018

In this study, the authors have demonstrated that it is possible to realize several three-dimensi... more In this study, the authors have demonstrated that it is possible to realize several three-dimensional (3D) micro- and nanostructures, by the fabrication of the smallest microhouse using a dual beam scanning electron microscope (SEM)/focused ion beam (FIB) Auriga 60 from Zeiss together with a six degree of freedom robot built with SmarAct components. In this new type of nanolab, cutting, etching, folding, assembling, and then welding thin membranes of silica on top of a cleaved optical fiber SMF28, or production of micro- and nanostructures, like the microhouse, are possible. The authors have experimentally shown that FIB can be used, in this new generation of micro/nanofactory, in combination with SEM, and gas injection system, in order to fabricate three-dimensional microstructures: a microhouse in this study, with ultrahigh accuracy assembly down to 10 nm. By using the theory of sputtering, the authors are able to propose a model of folding thin membranes of numerous materials suc...

Research paper thumbnail of Pressure drop analysis of oscillating flows through a miniature porous regenerator under isothermal and nonisothermal conditions

Experimental Thermal and Fluid Science, 2019

Research paper thumbnail of Thin amorphous silicon oxide ICPECVD layer on gold surface for surface plasmon resonance measurements

2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), 2015

The present study demonstrates that thin layers of amorphous silicon oxide (SiOx) grown by induct... more The present study demonstrates that thin layers of amorphous silicon oxide (SiOx) grown by inductively-coupled plasma enhanced chemical vapor deposition (ICPECVD) technology at lower temperatures can be successfully combined with biosensors. In particular, gold-amorphous silica (Au/SiOx) interfaces were investigated for their potential applications as a low-cost Surface Plasmon Resonance (SPR) sensor chip. We report here on the fabrication and characterization of stable and good reliabilities of SiOx deposited at 80°C at different pressures. The refractive index (n) of SiOx varied from 1.456 to 1.462. The results show that the sensitivity and minimum light reflectivity at the resonance angle is extremely sensitive to any changes in the index of refraction and any changes in optical thickness.

Research paper thumbnail of Thin amorphous silicon oxide ICPECVD layer on gold surface for surface plasmon resonance measurements

The present study demonstrates that thin layers of amorphous silicon oxide (SiOx) grown by induct... more The present study demonstrates that thin layers of amorphous silicon oxide (SiOx) grown by inductively-coupled plasma enhanced chemical vapor deposition (ICPECVD) technology at lower temperatures can be successfully combined with biosensors. In particular, gold-amorphous silica (Au/SiOx) interfaces were investigated for their potential applications as a low-cost Surface Plasmon Resonance (SPR) sensor chip. We report here on the fabrication and characterization of stable and good reliabilities of SiOx deposited at 80°C at different pressures. The refractive index (n) of SiOx varied from 1.456 to 1.462. The results show that the sensitivity and minimum light reflectivity at the resonance angle is extremely sensitive to any changes in the index of refraction and any changes in optical thickness.

Research paper thumbnail of The OmniSAW device concept

We report the theoretical evidence for the occurrence of omnidirectional elastic band gap in one-... more We report the theoretical evidence for the occurrence of omnidirectional elastic band gap in one-dimensional phononic crystal structures. The structure is constituted by a periodic layered deposited on a specific substrate that exhibit total reflection of waves for all incident angles and polarizations in a given frequency range the omnidirectional band gap. We present the influence of the nature and filling fraction of the layered structures as well as the substrate nature on the omnidirectional band gap. By introducing a defect piezoelectric layer, for instance AlN or ZnO, in the finite size layered structure, under certain condition a selective resonance modes occur within the omnidirectional bang gap. In this case, the elastic energy is localized in the defect layer. The frequencies of the defect modes are sensitive to the nature of the material and to the layer thicknesses. In order to excite the localized mode in the defect layer. We introduce interdigital transducers on the top of the surface. This implies the introduction of a new spatial periodicity and the reduction of the parallel wave vector in the first Brillouin zone. The omnidirectional character of the bad gap in this case is crucial to confine the elastic energy in the defect layer.

Research paper thumbnail of Titanium Oxynitride Thin Films by Reactive Sputtering with an Independent Pulsing of O2 and N2 Gases

Titanium oxynitride thin films are deposited by DC reactive magnetron sputtering. A pure titanium... more Titanium oxynitride thin films are deposited by DC reactive magnetron sputtering. A pure titanium target is sputtered in a reactive atmosphere composed of argon, oxygen and nitrogen gases. The oxygen mass flow rate as well as that of the nitrogen gas are both pulsed during the deposition time using an independent and rectangular signal for each reactive gas. A constant pulsing period T = 45 s is applied for both reactive gases and a delay time  of 34 s between N2 and O2 injection times is set for all depositions. Oxygen and nitrogen duty cycles are systematically and independently changed from 0 to 100% of their pulsing period. From real time measurements of the Ti target potential and total sputtering pressure, it is shown that the reactive process alternates between oxidized, nitrided and elemental sputtering modes as a function of the oxygen and nitrogen injection times. The full poisoning of the Ti target surface by oxygen and/or nitrogen can be avoided for some given ranges of O2 and N2 duty cycles. Deposition rates of titanium oxynitride films are substantially enhanced and can be adjusted between that of pure Ti and TiN films with a gradual transition of their optical transmittance in the visible range. These results support that titanium oxynitride compounds exhibiting absorbent to transparent behaviors can be precisely sputter-deposited by means of a two reactive gases pulsing process.

Research paper thumbnail of Miniaturized Robotics: The Smallest Camera Operator Bot Pays Tribute to David Bowie

IEEE Robotics & Automation Magazine, Sep 1, 2020

Research paper thumbnail of Evidence for complete surface wave band gaps in a piezoelectric phononic crystal

HAL (Le Centre pour la Communication Scientifique Directe), 2006

Rapid communicationInternational audienc

Research paper thumbnail of Smallest microhouse in the world, assembled on the facet of an optical fiber by origami and welded in the μRobotex nanofactory

HAL (Le Centre pour la Communication Scientifique Directe), 2018

Research paper thumbnail of Proposal for a complete 3D surface reconstruction using images from a scanning electron microscope (SEM)

Frontiers in Optics + Laser Science 2022 (FIO, LS), 2022

A three-dimensional model enables the development of accurate solutions to have more information ... more A three-dimensional model enables the development of accurate solutions to have more information about the thickness, texture, and characteristics of small-size samples for education and metrology applications. This project proposes an idea to obtain a complete 3D surface reconstruction using the application of Pollen 3D for the scanning electron microscope (SEM) images with high magnification. The main objective is to have a set of images of the complete 360° rotation of the sample with a robot inside the chamber of the SEM. Simulation SEM images with Blender (open source application) are proposed for results validation.

Research paper thumbnail of Tunable Electrical Properties of Ti-B-N Thin Films Sputter-Deposited by the Reactive Gas Pulsing Process

Research paper thumbnail of Self-focused beams to couple light into a whispering-gallery mode resonator

arXiv (Cornell University), Jul 7, 2014

Research paper thumbnail of Design, fabrication and CFD modeling of a Stirling engine microregenerator

HAL (Le Centre pour la Communication Scientifique Directe), Aug 24, 2016

International audienceThis paper reports the design, fabrication and CFD modeling of a microregen... more International audienceThis paper reports the design, fabrication and CFD modeling of a microregenerator in order to be integrated in a multiphase piezoelectric smart membrane Stirling engine. The application aims to recover waste heat at low temperatures and to convert it into electricity via the piezoelectric element. The suggested geometry for the microregenerator is a microchannel integrated with staggered DRIE etched silicon micropillars, the whole is encapsulated between two glass wafers. The porosity ranges from 0.8 to 0.9. A 2D numerical study of the microregenerator thermofluidic performances was investigated. Three gases (air, helium andhydrogen) were investigated. The gas flow is set to be incompressible and viscous under laminar unidirectional steady flow conditions for low Reynolds number (<10). According to the obtained results, helium has shown the highest pressure drop since it’s the most viscous gas. The pressure drop encountered with helium gas is more than twice the one registered with hydrogen. Nevertheless it was the fastest gas to heat up. Trade-off between heat transfer and pressure drop needs to be reached

Research paper thumbnail of Evidence for complete surface wave band gaps in a piezoelectric phononic crystal

Rapid communicationInternational audienc

Research paper thumbnail of Influence du traitement thermique sur les propriétés des résistances de platine d’un microcapteur de flux thermique

HAL (Le Centre pour la Communication Scientifique Directe), Jun 3, 2019

International audienceRésumé - Cette étude se situe dans le cadre du développement de fluxmètres ... more International audienceRésumé - Cette étude se situe dans le cadre du développement de fluxmètres thermiques en microtechnologie. Ces fluxmètres consistent en deux résistances de platine déposées sur un substrat en verre. Dans une première partie, nous présentons le principe du fluxmètre et de la mesure de température. Dans une deuxième partie, nous présentons également les étapes de fabrication en salle blanche et les différentes températures de recuits étudiées. Nous présentons des résultats expérimentaux sur la variation de résistance observée selon les différentes températures de recuit et une analyse par Diffraction de Rayons X complétée par des images au microscope à balayage. Nous proposons comme hypothèse que la baisse de résistivité observée pour les faibles températures de recuit est due à l’amélioration du réseau cristallin et que la hausse observée pour les températures les plus élevées est due à la diffusion de la couche d’accroche en chrome dans le platine

Research paper thumbnail of Experimental Thermal Performance Of A Stirling Machine Milli-Regenerator Made By Multiple Jet Molding

HAL (Le Centre pour la Communication Scientifique Directe), Jul 25, 2021

Research paper thumbnail of Optimisation d'un microéchangeur à partir d'un bilan entropique

Le développement quasi exponentiel des MEMS (Micro-Electro-Mechanical-Systems) dans l'industr... more Le développement quasi exponentiel des MEMS (Micro-Electro-Mechanical-Systems) dans l'industrie permet d'accroître la densité de composants sur différents supports électroniques et informatiques. L'augmentation résultante des sources de chaleur nécessite alors d'intensifier les transferts thermiques dans le but de refroidir ces composants. Le développement des micro-systèmes tire profit de la technologie MEMS. En effet, à ces échelles miniatures, des procédés de micro-fabrication sont utilisés pour la réalisation des prototypes. Nous avons ainsi conçu un micro-échangeur à base d'assemblages de parois en verre et silicium constituants des canaux de dimensions micrométriques pouvant être traversés par un gaz tel que l'azote, l'argon ou l'hélium. L'objectif de cet article est de déterminer les performances optimales d'un micro-échangeur. Les écoulements en microcanal avec transfert de chaleur sont le siège de transferts thermiques et de pertes de...

Research paper thumbnail of Dynamic micro-assembly of LiNbO3 microresonators with low-loss suspended waveguides

Advanced Photonics 2018 (BGPP, IPR, NP, NOMA, Sensors, Networks, SPPCom, SOF), 2018

We report on a LiNbO3 microresonator integrated in a low-loss free-suspended waveguide. The photo... more We report on a LiNbO3 microresonator integrated in a low-loss free-suspended waveguide. The photonic elements are made by optical-grade dicing, and are assembled dynamically. This method opens the way to new 3D photonic architectures.

Research paper thumbnail of Data reduction of friction factor, permeability and inertial coefficient for a compressible gas flow through a milli-regenerator

E3S Web of Conferences, 2021

A regenerator of a Stirling machine alternately absorbs and releases heat from and to the working... more A regenerator of a Stirling machine alternately absorbs and releases heat from and to the working fluid which allows to recycle rejected heat during theoretical isochoric processes. This work focuses on a milli-regenerator fabricated with a multiple jet molding process. The regenerator is a porous medium filled with a dense pillar matrix. The pillars have a geometrical lens shape. Two metallic layers (chromium and copper) are deposited on the polymer pillars to increase heat transfer inside the regenerator. We performed experiments on different milli-regenerators corresponding to three porosities (ε = 0.80, 0.85 and 0.90) under nitrogen steady and oscillating compressible flows (oscillating Reynolds number in the range 0 < Reω < 60 and Reynolds number based on the hydraulic diameter ReDh,max<6000) for different temperature gradients (ΔT < 100°C). Temperature, velocity and pressure experimental measurements are performed with microthermocouples (type K with 7,6 µm diamete...

Research paper thumbnail of Miniaturized Robotics: The Smallest Camera Operator Bot Pays Tribute to David Bowie

IEEE Robotics & Automation Magazine, 2020

Research paper thumbnail of Smallest microhouse in the world, assembled on the facet of an optical fiber by origami and welded in the μRobotex nanofactory

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2018

In this study, the authors have demonstrated that it is possible to realize several three-dimensi... more In this study, the authors have demonstrated that it is possible to realize several three-dimensional (3D) micro- and nanostructures, by the fabrication of the smallest microhouse using a dual beam scanning electron microscope (SEM)/focused ion beam (FIB) Auriga 60 from Zeiss together with a six degree of freedom robot built with SmarAct components. In this new type of nanolab, cutting, etching, folding, assembling, and then welding thin membranes of silica on top of a cleaved optical fiber SMF28, or production of micro- and nanostructures, like the microhouse, are possible. The authors have experimentally shown that FIB can be used, in this new generation of micro/nanofactory, in combination with SEM, and gas injection system, in order to fabricate three-dimensional microstructures: a microhouse in this study, with ultrahigh accuracy assembly down to 10 nm. By using the theory of sputtering, the authors are able to propose a model of folding thin membranes of numerous materials suc...

Research paper thumbnail of Pressure drop analysis of oscillating flows through a miniature porous regenerator under isothermal and nonisothermal conditions

Experimental Thermal and Fluid Science, 2019

Research paper thumbnail of Thin amorphous silicon oxide ICPECVD layer on gold surface for surface plasmon resonance measurements

2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), 2015

The present study demonstrates that thin layers of amorphous silicon oxide (SiOx) grown by induct... more The present study demonstrates that thin layers of amorphous silicon oxide (SiOx) grown by inductively-coupled plasma enhanced chemical vapor deposition (ICPECVD) technology at lower temperatures can be successfully combined with biosensors. In particular, gold-amorphous silica (Au/SiOx) interfaces were investigated for their potential applications as a low-cost Surface Plasmon Resonance (SPR) sensor chip. We report here on the fabrication and characterization of stable and good reliabilities of SiOx deposited at 80°C at different pressures. The refractive index (n) of SiOx varied from 1.456 to 1.462. The results show that the sensitivity and minimum light reflectivity at the resonance angle is extremely sensitive to any changes in the index of refraction and any changes in optical thickness.