Total reflection X-ray photoelectron spectroscopy: A review (original) (raw)
X-Ray Absorption and Photoelectron Spectroscopies Using Total Reflection X-Rays
Analytical Sciences, 1995
X-Ray absorption and X-ray photoelectron spectroscopic measurements of specular surfaces using grazing incidence soft X-rays carried out by the present authors are summarized. The merits of using a sample current induced by totally reflected X-rays are discussed. The probing depth of the sample current has been found to be restricted to within a very shallow surface. The application of the sample current X-ray absorption experiment to the depth profile analysis of flyash powders is described. Very clear X-ray photoelectron spectra excited by totally reflected X-rays are for the first time reported.
Recent developments in instrumentation for x-ray photoelectron spectroscopy
Analytical Chemistry, 1989
X-ray photoelectron spectroscopy (XPS or ESCA) is one of the many electron spectroscopies particularly useful for the chemical analysis of surfaces. The technique, based on the photoemission of electrons induced by soft X-rays, is widely used for detailed surface analytical problem solving hecause it allows multiple-element detection, provides chemical bonding and state information from chemical shifts, and provides quantitative information.
X-ray Photoelectron Spectroscopy
Journal of the Japan Society of Colour Material, 1991
X-ray photoelectron spectroscopy (XPS) is a non-destructive technique used to analyze the elemental compositions, chemical and electronic states of materials. XPS has a depth of analysis from 1 to 10nm. Chemical studies can be performed with more depth if surfaces are removed or etched. Samples need to be cleaned and free of surface
Journal of Physics D, 2021
Near total reflection regime has been widely used in X-ray science, specifically in grazing incidence small angle X-ray scattering and in hard X-ray photoelectron spectroscopy. In this work, we introduce some practical aspects of using near total reflection in ambient pressure X-ray photoelectron spectroscopy and apply this technique to study chemical concentration gradients in a substrate/photoresist system. Experimental data are accompanied by X-ray optical and photoemission simulations to quantitatively probe the photoresist and the interface with the depth accuracy of ~1 nm. Together, our calculations and experiments confirm that near total reflection X-ray photoelectron spectroscopy is a suitable method to extract information from buried interfaces with highest depth-resolution, which can help address open research questions regarding our understanding of concentration profiles, electrical gradients, and charge transfer phenomena at such interfaces. The presented methodology is especially attractive for solid/liquid interface studies, since it provides all the strengths of a Bragg-reflection standing-wave spectroscopy without the need of an artificial multilayer mirror serving as a standing wave generator, thus dramatically simplifying the sample synthesis.
Surface and Interface Analysis, 2024
Strategies to deal with sample charging effects on X-ray photoelectron spectroscopy(XPS) spectra are presented. These strategies combine charge compensation (or lackof) via a flow of electrons and an electrical connection (or lack of) of samples to theground. Practical examples involving samples with a range of different electrical prop-erties, sample structure/composition and sensitivity to X-rays, illustrate the correla-tion between sample properties, measurement strategies, and the resulting XPS data.The most appropriate measurement strategy for a particular sample is also recom-mended. We highlight the crucial importance of appropriate XPS data acquisition toobtain a correct data interpretation
Low-Angle X-Ray Spectroscopy and Reflectometry Techniques in Interdisciplinary Applications
Acta Physica Polonica A, 2021
In this paper, the low-angle X-ray spectroscopy and reflectometry techniques, namely: the total reflection X-ray fluorescence analysis, grazing emission X-ray fluorescence analysis, grazing incidence X-ray fluorescence analysis, X-ray reflectometry and total reflection X-ray photoelectron spectroscopy, are presented. These techniques are used in the scientific activity, in interdisciplinary applications, at the Institute of Physics of the Jan Kochanowski University in Kielce (UJK) and the Department of Physical Methods of the Holy Cross Cancer Center (ŚCO). The studies were conducted in international cooperation with the European Synchrotron Radiation Facility (ESRF, Grenoble, France), the University of Fribourg (Switzerland) and Elettra Sincrotrone Trieste (Elettra, Trieste, Italy). The physical basics of the techniques are discussed as well as experimental setups applying either X-ray tube radiation or synchrotron radiation. Examples of the study possibilities and interdisciplinary applications, presented in the article, include elemental content analysis in human biological materials, biological and environmental samples (total reflection X-ray fluorescence analysis) and depth profiling of silicon wafer impurities (grazing emission X-ray fluorescence analysis). The paper also presents depth profiling, morphology study and surface elemental and chemical composition analysis of titanium and titanium dioxides nanolayers deposited on different substrates and irradiated by Xe ions in high charge states (grazing incidence X-ray fluorescence analysis, X-ray reflectometry, total reflection X-ray photoelectron spectroscopy). topics: low-angle X-ray spectroscopy (TXRF, GEXRF, GIXRF), X-ray reflectometry (XRR), total reflection X-ray photoelectron spectroscopy (TRXPS)
On line shape analysis in X-ray photoelectron spectroscopy
Surface Science, 2001
Any solid state X-ray photoelectron spectrum (XPS) contains contributions due to multiple inelastic scattering in the bulk, surface excitations, energy losses originating from the screening of the ®nal state hole (intrinsic losses), and, for non-monochromatized incident radiation, ghost lines originating from the X-ray satellites. In the present paper it is shown how all these contributions can be consecutively removed from an experimental spectrum employing a single general deconvolution procedure. Application of this method is possible whenever the contributions mentioned above are uncorrelated. It is shown that this is usually true in XPS to a good approximation. The method is illustrated on experimental non-monochromatized MgKa spectra of Au acquired at dierent detection angles but for the same angle of incidence of the X-rays. Ó
The alignment of spectrometers and quantitative measurements in X-ray photoelectron spectroscopy
Journal of Electron Spectroscopy and Related Phenomena, 1997
The alignment of the sample in X-ray photoelectron spectrometers is usually made to optimize the spectral intensities. There are two important classes of spectrometer: (i) those in which the analyser acceptance area is independent of the analysed electron kinetic energy; and (ii) those in which this area varies. Model experiments show how an example of a VG ESCALAB II conforms to class (i) whereas an example of an SSI X-probe is of class (ii) and shows an analyser acceptance area which depends approximately inversely on the emitted electron kinetic energy. This latter result means that the SSI X-probe spectrometer must be aligned for the electrons of the highest kinetic energy (smallest analyser acceptance area). A misalignment of 0.1 mm in the sample height can cause a 10% change in the relative intensities between 0 and 1000 eV binding energies. This dependence of the analyser acceptance area with energy is an effect likely to be common in the advanced electron optical systems of modern electron spectrometers and should be understood in order to use such spectrometers effectively. Such dependencies should be determined by analysts for their own instruments in the operating mode that is used for conducting work in which the repeatability of intensity measurements is important.