Development of Frequency Tunable Fluid Loaded PMUTs (original) (raw)

2021 IEEE International Ultrasonics Symposium (IUS), 2021

Abstract

We report on the development of a novel technique for creating real-time frequency tuning in Piezoelectric Micromachined Ultrasound Transducers (PMUTs). This technique employs controlled virtual added mass in a confined microfluidic environment as a switch to tune the resonant frequency of a PMUT. Using this technique, we could vary the frequency of a 500mumathrmm500\ \mu\mathrm{m}500mumathrmm circular PMUT from 489 kHz to 210 kHz, corresponding to a tuning range of 57%. This shows the potential of using such a technique in creating PMUTs with a wide range of frequency tuning.

Anuj Ashok hasn't uploaded this paper.

Let Anuj know you want this paper to be uploaded.

Ask for this paper to be uploaded.