MEMS with an embedded fluidic microchannel for sensitive weighing of liquid samples (original) (raw)

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), 2017

Abstract

This paper reports hollow MEMS plate oscillators for the characterization of liquid samples, with a one-fold improvement in both Q-factor and Allan deviation compared to previous alike structures, and fluidic constriction larger than 1μm. These new characteristics make the devices amenable for the first time to liquid weighing with a 100 Hz.(g.L⁻¹)⁻¹ sensitivity and a few g.L⁻¹ detection floor.

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