LTCC-3D Coaxial Flow Focusing Microfluidic Reactor for Micro and Nanoparticle Fabrication and Production Scale-Out (original) (raw)
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LTCC-3D Flow Focusing Fluidic Microreactor for Nanoparticle Fabrication and Production Scale-Out
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The mixture of fluids and reagents constitutes basic stage in many processes in industry and applied science, with applications in Medicine, Pharmacy and Analytical Chemistry. Microfluidic systems and devices display advantages as portability, small volumes of samples and continuous production. Microfluidic mixers with channel size from 1 mm to 1 μm, and flow speed typically of 1 m/s are being used for several applications. Reynolds number is smaller than 1000, characterizing laminar flow regime. Thus, in micro scale the mixture of fluids is dominated by diffusion mechanism, which is a slow and inefficient process. It is possible to speed up this process, by means of active and passive microfluidic devices. In this work an active and passive microfluidic mixers are considered. Devices are implemented in LTCC (Low Temperature Co-fired Ceramics) technology, driven by ultrasound where the mixing is done by mass transport. Passive devices are implemented using micro-channels with sharp ...
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The development of microreactors that operate under harsh conditions is always of great interest for many applications. Here we present a microfabrication process based on low-temperature co-fired ceramic (LTCC) technology for producing microreactors which are able to perform chemical processes at elevated temperature (>400 °C) and against concentrated harsh chemicals such as sodium hydroxide, sulfuric acid and hydrochloric acid. Various micro-scale cavities and/or fluidic channels were successfully fabricated in these microreactors using a set of combined and optimized LTCC manufacturing processes. Among them, it has been found that laser micromachining and multi-step low-pressure lamination are particularly critical to the fabrication and quality of these microreactors. Demonstration of LTCC microreactors with various embedded fluidic structures is illustrated with a number of examples, including micro-mixers for studies of exothermic reactions, multiple-injection microreactors...