Sensorless Damping Control of a High Speed Flexure Guided Nanopositioner (original) (raw)
2014, IFAC Proceedings Volumes
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2009
Abstract This paper presents experimental implementation of a positive position feedback (PPF) control scheme for vibration and cross-coupling compensation of a piezoelectric tube scanner in a commercial atomic force microscope (AFM). The AFM is a device capable of generating images with extremely high resolutions down to the atomic level. It is also being used in applications that involve manipulation of matter at a nanoscale. Early AFMs were operated in open loop.
Review of Scientific Instruments, 2009
We adjust the transient dynamics of a piezoactuated bimorph atomic force microscopy (AFM) probe using a state feedback controller. This approach enables us to adjust the quality factor and the resonance frequency of the probe simultaneously. First, we first investigate the effect of feedback gains on dynamic response of the probe and then show that the time constant of the probe can be reduced by reducing its quality factor and/or increasing its resonance frequency to reduce the scan error in tapping mode AFM.
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