Nanoliter MEMS package gas sampling to determine hermeticity (original) (raw)

SPIE Proceedings, 2005

Abstract

Maintaining the integrity of the internal atmosphere of a hermetic device is essential for long-term component reliability because it is within this environment that all internal materials age. As MEMS package sizes decrease with miniaturization, characterization of the internal atmosphere becomes increasingly difficult. Typical transistor metal cans (e.g., TO-5 type) and large MEMS devices have internal volumes of tenths of

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