A review on micro-electron beam welding with a modernized SEM: Process, applications, trends and future prospect (original) (raw)

2019, Journal of Micromanufacturing

Electron beam welding (EBW) is a well-established joining method in the field of manufacturing. If this technology is downscaled to a micro-level (i.e., micro-EBW (µ-EBW)), it will be able to solve a variety of problems. The necessity of adopting µ-EBW technology lies with the fact that it can be used from micro-mechanical fabrication to micro-electronics components joining, micro-electro-mechanical system (MEMS), medical instrument, etc. µ-EBW has some special properties like the possibility of obtaining exact focussing of the beam and conducting measurement up to micrometer level, accurate control of energy input, inertia-free manipulation, high-frequency oscillation movement and ability to work under high vacuum chamber. µ-EBW has several important applications like micro-joining and micro-fabrication, which is welding of dissimilar materials. This article deals with a review of the recent developments, significant applications, and advantages of µ-EBW, multiple modes of joining ...