Deposition and Characterization of Thick Pb(Zr,Ti)O3 Films on Optical Fibers (original) (raw)
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Micromachines, 2018
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An optical fiber interferometer for measuring the d33 coefficient of piezoelectric samples is described. Its configuration is based on the Mach-Zehnder interferometer, and a double incidence on the thin-film samples successfully suppresses the undesirable bending effect of the substrate. Detection of the small displacement is based on an active homodyne scheme. Results are reported for a bulk piezoelectric transducer (PZT) sample and a PZT thin-film incorporated in a microactuator.
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We report on the structural, ferroelectric and optical properties of lead zirconate titanate (PZT) thin films (with a molar ratio of Zr: Ti:: 65: 35) deposited by solgel technique on ITO-coated corning 7059 glass substrates. A seed layer of PbTiO3 (0.1 μm) was coated by sol ...