A review of micromachined sensors for automotive applications (original) (raw)
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An integrated resonant accelerometer microsystem for automotive applications
Sensors and Actuators A …, 1998
In the project IRMA-EU (IRMA: integrated resonant accelerometer microsystem for automotive applications), a project sponsored by the European Commision under ESPRIT, SensoNor and project partners Autoliv and SINTEF are developing a resonant-structure two-chip accelerometer silicon microsystem for automotive applications, the SA30 Crash Sensor for front impacts, with range f 50g. The project is focusing on the development of key process technologies, product designs and manufacture of functional prototypes. The IRMA project is coordinated with other activities performed by the partners to cover all aspects of research and technology development as well as establishment of high-volume production capabilities needed for successful product innovation of this new generation of crash sensors. The sensing principle is an acceleration-sensitive resonant structure, with an ASIC for resonance control and signal conditioning. Prototypes in silicon of both the sensor chip and the ASIC chip have confirmed the feasibility of the concept. Ramp up to high-volume production will be started as soon as fully functional microsystems are demonstrated. 0 1998 Elsevier Science S.A. All rights reserved.
Electronics and Communications in Japan (Part II: Electronics), 1991
Photofabrication developed for integrated circuits can be used to fabricate sensors with threedimensional structures and devices with many other types of structures. The micromachining technology is useful in forming a small-sized, high-performance sensor system. Using this technology, it is possible to form a system with a sensor, actuator, and electronic circuit on a silicon wafer.
Robust micromachined gyroscopes for automotive applications
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Sensors are essential components of automotive electronic control systems. Sensors are defined as “devices that transform (or transduce) physical quantities such as pressure or acceleration (called measurands) into output signals (usually electrical) that serve as inputs for control systems". It wasn’t that long ago that the primary automotive sensors were discrete devices used to measure oil pressure, fuel level, coolant temperature, etc. Starting in the late1970s, microprocessor-based automotive engine control modules were phased into satisfy federal emissions regulations .These systems required new sensors such as MAP (manifold absolute pressure), air temperature, and exhaust-gas stoichiometric air-fuel-ratio operating point sensors. The need for sensors is evolving and is progressively growing. For example, in engine control applications, the number of sensors used will increase from approximately ten in1995, to more than thirty in 2010. Automotive engineers are challenged by a multitude of stringent requirements. For example, automotive sensors typically must have combined/total error less than 3% over their entire range of operating temperature and measurands change, including all measurement errors due to nonlinearity. Engine sensors in a vehicle are incorporated to provide the correct amount of fuel for all operating conditions. A large number of input sensors are monitored by the engine control unit. Today, sensor technology has become common in modern vehicles. Sensors enhance safety of the people - both on board and on road, control vehicle emissions and make vehicles more efficient. In this article, we will discuss different types of engine sensors used in modern vehicles. The aim of the present textbook was to review the importance of using sensors in automobiles from different points of view which include how fuel injection system works, crankshaft position sensor, cylinder head temperature gauge, internal combustion engine cooling, exhaust gas temperature gauge, idle air control actuator, engine knocking, manifold absolute pressure sensor (MAP), mass flow sensor, nitrogen oxide sensor, oxygen sensor, and throttle position sensor.
A frequency determination method for automotive nanosensors
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The growing popularity of nanosensors in various automotive applications requires new methods for counting the frequency of electrical signals, into which the measured non-electrical parameters are converted. This need is because automobile nanosensors are to register very small changes in the measured parameters that, besides, can change very fast. The paper proposes for use in automotive nanosensors a frequency calculation method based on the principle of rational approximation, which meets the above requirements.