Preparation and characterization of titanium oxy-nitride thin films (original) (raw)

Applied Surface Science, 2007

Abstract

The interest in TiNxOy films has increased recently due to their properties dependence on the N/O ratio.In this work, we studied comparatively the influence of different flow rate ratios of the reactive gases (O2 and N2) on the properties of the TiNxOy films deposited by two different methods: rf pulsed laser deposition (rf PLD) and reactive pulsed magnetron sputtering (RPM).Film

George Epurescu hasn't uploaded this paper.

Let George know you want this paper to be uploaded.

Ask for this paper to be uploaded.