Fabrication of a dielectrophoretic chip with 3D silicon electrodes (original) (raw)

Fabrication of a dielectrophoretic chip with 3D silicon electrodes

Journal of Micromechanics and Microengineering, 2004

Abstract

This paper describes a device in which the DEP electrodes form the channel walls. This is achieved by fabricating microfluidic channel walls from highly doped silicon so that they can also function as DEP electrodes. The device is fully enclosed and there is no fluidic ...

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