Al2O3 Passivation on c-si Surfaces for Low Temperature Solar Cell Applications (original) (raw)
Si surface passivation by Al2O3 thin films deposited using a low thermal budget atomic layer deposition process
Michele Perego
Applied Physics Letters, 2013
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Thermal stability of the Al 2 O 3 passivation on p-type silicon surfaces for solar cell applications
Armin Richter
physica status solidi (RRL) - Rapid Research Letters, 2009
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First Principles Calculations of Bonding and Charges at the Al2Interface in a c-Si/SiO2O3Interface in a c-Si/SiO2/am-Al2O3Structure Applicable for the Surface Passivation of Silicon-Based Solar Cells
AKANSHA BANSAL
IEEE Transactions on Electron Devices, 2016
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Optimization of ALD \hbox {Al}_{2}\hbox {O}_{3}$$ Al 2 O 3 process parameters for passivation of c-silicon and its implementation on industrial monocrystalline silicon solar cell
AKANSHA BANSAL
Applied Physics B, 2019
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Si surface passivation by Al2O3 thin films deposited using a low thermal budget atomic layer deposition process
Michele Perego
Applied Physics Letters, 2013
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On the c-Si surface passivation mechanism by the negative-charge-dielectric Al[sub 2]O[sub 3]
Bram Hoex
Journal of Applied Physics, 2008
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Thermal stability of the Al2O3 passivation on p-type silicon surfaces for solar cell application
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Angewandte Chemie, 2010
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2010 35th IEEE Photovoltaic Specialists Conference, 2010
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Surface Passivation for Si Solar Cells: A Combination of Advanced Surface Cleaning and Thermal Atomic Layer Deposition of Al2O3
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Solid State Phenomena, 2012
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Energy Procedia, 2013
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Jhuma Gope
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Energy Procedia, 2012
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Study on Annealing Process of Aluminum Oxide Passivation Layer for PERC Solar Cells
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Coatings, 2021
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Armin Richter
2010 35th IEEE Photovoltaic Specialists Conference, 2010
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Silicon Surface Passivation by Al2O3 film using Atomic Layer Deposition
Neha Batra
Environmental Science and Engineering, 2013
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Surface passivation for ultrathin Al2O3layers grown at low temperature by thermal atomic layer deposition
Michele Perego
Physica Status Solidi A-applications and Materials Science, 2012
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Passivation effects of atomic-layer-deposited aluminum oxide
Laurent Francis
EPJ Photovoltaics, 2013
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Spatially separated atomic layer deposition of Al2O3, a new option for high-throughput Si solar cell passivation
Fred Roozeboom
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Materials for Renewable and Sustainable Energy, 2012
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